TW-I924846-B - SUBSTRATE PROCESSING APPARATUS, CHEMICAL LIQUID PROCESSING APPARATUS AND METHOD FOR ADJUSTING CENTER ALIGNMENT OF AT LEAST ONE NOZZLE WITH SUBSTRATE IN PROCESSING UNIT
Inventors
- WANG, HUI
- LEE, MARK
- WU, JUN
- CHENG, CHENG
- JUNG, ANDREW
- SOHN, Bruce
- WANG, JUN
- KIM, Yy
Assignees
- 大陸商盛美半導體設備（上海）股份有限公司
- 韓商盛美半導體設備韓國有限公司
- 香港商清芯科技有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20220425
- Priority Date
- 20210425