TW-I924872-B - PLASMA PROCESSING APPARATUS

Inventors

• HAYASAKA, YUSUKE
• SASAKI, ATSUSHI
• MATSUMOTO, KAZUYA
• TAKAHASHI, SHINGO
• NAGAMI, KOICHI

Assignees

• 日商東京威力科創股份有限公司

Dates

Publication Date

20260511

Application Date

20220526

Priority Date

20210527