TW-I924927-B - Photosensitive radioactive or radiosensitive resin compositions, photosensitive radioactive or radiosensitive films, pattern forming methods, manufacturing methods of electronic components, and compounds.
Inventors
- MIYOSHI, Taro
- YAMAGUCHI, SHUHEI
- YOSHIOKA, TOMOAKI
- FUKUZAKI, EIJI
- KAMINO, YUKA
Assignees
- 日商富士軟片股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20220830
- Priority Date
- 20210831