TW-I924956-B - OPTICAL PROXIMITY CORRECTION SYSTEM, COMPUTER-READABLE MEDIUM AND OPERATING METHOD
Inventors
- LEE, HEE-JUN
- KIM, SANG WOOK
- OH, HEUNG SUK
- JUNG, JEE EUN
Assignees
- 南韓商三星電子股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20221027
- Priority Date
- 20211217