TW-I924966-B - Wafer cleaning device

Inventors

• HE, Xideng
• HAN, Yang
• ZHONG, Zhaoming
• HUANG, TIANYU
• ZHAO, YUNXIANG
• TAO, XIAOFENG
• DENG, Xinping
• JIA, Shena
• WANG, HUI

Assignees

• 大陸商盛美半導體設備（上海）股份有限公司

Dates

Publication Date

20260511

Application Date

20221129

Priority Date

20211129