TW-I924972-B - METHOD AND SENSOR ASSEMBLY SYSTEM FOR SUBSTRATE SUPPORT CHARACTERIZATION TO BUILD A DIGITAL TWIN
Inventors
- SHAH, Vivek Bharat
- ZHANG, CHUNLEI
- NOTTROTT, ANDERS ANDELMAN
Assignees
- 美商應用材料股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20221214
- Priority Date
- 20211221