TW-I925022-B - PHOTONIC INTEGRATED CIRCUIT DEVICE AND METHOD OF FORMING THE SAME

Inventors

• Lu, Chih-Hsin
• LIN, CHIA-CHIA
• TSAI, CHUNG-HAO
• WANG, CHUEI-TANG
• YU, CHEN-HUA

Assignees

• 台灣積體電路製造股份有限公司

Dates

Publication Date

20260511

Application Date

20230621

Priority Date

20230428