TW-I925059-B - Methods for measuring the length of patterns or inspecting defects, image data processing systems, and computer-readable recording media.
Inventors
- KAGETANI, RYUGO
- SHINDO, HIROYUKI
- FUKAYA, KAORU
- KASHIWA, TAEKO
Assignees
- 日商日立全球先端科技股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20231110
- Priority Date
- 20221111