TW-I925101-B - COMPOSITION AND METHOD FOR SELECTIVELY ETCHING SILICON NITRIDE
Inventors
- YEO, Juhee
- HONG, SeongJin
- KIM, WonLae
- PARK, Younghun
- KANG, Yeonhui
- JEONG, JINWOOK
Assignees
- 美商恩特葛瑞斯股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20240315
- Priority Date
- 20230315