TW-I925172-B - Computers, programs, and methods for managing the state of charged particle beam devices

Inventors

• MAEDA, Takehiro
• KAWANO, HAJIME
• OSAKI, MAYUKA
• HARADA, MINORU
• KASAI, HIROAKI
• KIZAWA, SHUN

Assignees

• 日商日立全球先端科技股份有限公司

Dates

Publication Date

20260511

Application Date

20240625

Priority Date

20230704