TW-I925181-B - Semiconductor device with a slab tomb structureInventorsYAHATA, TatsuyaTANIGUCHI, KoheiHASHIMOTO, SHINTAROOZAKI, YOSHINOBUAssignees日商力森諾科股份有限公司DatesPublication Date20260511Application Date20200424Priority Date20190425