TW-I925184-B - METHOD FOR CLEANING CHAMBER SURFACES AND SUBSTRATE PROCESSING SYSTEM
Inventors
- YU, JENGYI
- Tan, Samantha SiamHwa
- HEO, Seongjun
- YUAN, Ge
- KANAKASABAPATHY, Siva Krishnan
Assignees
- 美商蘭姆研究公司
Dates
- Publication Date
- 20260511
- Application Date
- 20191003
- Priority Date
- 20181005