TW-I925205-B - COOLING DEVICE AND SEMICONDUCTOR PROCESS EQUIPMENT

Inventors

• REN, XIAO BIN
• LIU, JING BIN
• XIA, JUN HAN

Assignees

• 大陸商北京北方華創微電子裝備有限公司

Dates

Publication Date

20260511

Application Date

20240731

Priority Date

20230816