TW-I925218-B - SUBSTRATE CLEANING DEVICE
Inventors
- TAKAHASHI, TAKUMA
- SHINOHARA, TOMOYUKI
- ISHII, JUNICHI
- NAKAMURA, KAZUKI
- SHINOHARA, TAKASHI
- OKITA, NOBUAKI
- OKADA, YOSHIFUMI
Assignees
- 日商斯庫林集團股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20220704
- Priority Date
- 20210715