TW-I925234-B - LIGHT SOURCE USING PRE-IONIZATION AND METHOD OF GENERATING EXTREME ULTRA-VIOLET LIGHT

Inventors

• NIELL, FREDERICK MARVIN, III
• REISMAN, DAVID B.
• ARCARO, Daniel J.
• SMITH, DONALD K.
• RODERICK, MICHAEL J.

Assignees

• 日商濱松赫德尼古斯股份有限公司
• 美商愛能級科技股份有限公司

Dates

Publication Date

20260511

Application Date

20240829

Priority Date

20240224