TW-I925237-B - CYCLOSILOXANES AND FILMS MADE THEREWITH AND METHOD OF DEPOSITING A SILICON-CONTAINING FILM
Inventors
- BROWN, FORREST
- VRTIS, Raymond
- RIDGEWAY, Robert
- XIAO, MANCHAO
- RAJARAMAN, SURESH
- SPENCE, Daniel
Assignees
- 美商慧盛材料美國責任有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20210723
- Priority Date
- 20200724