TW-I925295-B - PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Inventors
- KOSHIMIZU, CHISHIO
- HIROTSU, SHIN
- IKEDA, TAKENOBU
- NAGAMI, KOICHI
- HIMORI, SHINJI
Assignees
- 日商東京威力科創股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20200520
- Priority Date
- 20190528