TW-I925299-B - Capacitively Coupled Plasma Generator

Inventors

• XIA, Hui
• SHAO, SHOUQIAN
• ZHANG, XIAOJUN
• HU, XIAOBO
• FENG, JUNJIE
• XIE, MINGHUI

Assignees

• 大陸商深圳市矩陣多元科技有限公司

Dates

Publication Date

20260511

Application Date

20241018

Priority Date

20240524