TW-I925348-B - LID OPENING MECHANISM FOR PROCESS CHAMBERS AND SEMICONDUCTOR PROCESS EQUIPMENT

Inventors

• GUO, QI YAO
• MA, EN ZE
• LI, XIANG

Assignees

• 大陸商北京北方華創微電子裝備有限公司

Dates

Publication Date

20260511

Application Date

20241115

Priority Date

20231205