TW-I925434-B - ETCHANT COMPOSITION FOR ETCHING SILICON AND METHOD OF FORMING PATTERN USING THE SAME

Inventors

• ROH, JIN KYU
• KIM, SANG KWON
• AHN, KYU SANG
• YOON, HYO JOONG

Assignees

• 南韓商東友精細化工有限公司

Dates

Publication Date

20260511

Application Date

20250102

Priority Date

20240124