TW-I925506-B - METHOD FOR ETCHING A MOLYBDENUM LAYER, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER MACHINE-READABLE MEDIUM
Inventors
- FISCHER, ANDREAS
- ROUTZAHN, Aaron Lynn
- LILL, Thorsten Bernd
- VARADARAJAN, SESHASAYEE
Assignees
- 美商蘭姆研究公司
Dates
- Publication Date
- 20260511
- Application Date
- 20210304
- Priority Date
- 20200306