TW-I925507-B - PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUBSTRATE

Inventors

• SHAIKH, FAYAZ
• LINEBARGER, NICK
• BAILEY, CURTIS

Assignees

• 美商蘭姆研究公司

Dates

Publication Date

20260511

Application Date

20180830

Priority Date

20170831