TW-I925567-B - PEDESTAL FOR USE IN A SEMICONDUCTOR PROCESSING CHAMBER AND APPARATUS INCLUDING THE SAME

Inventors

• LAVDOVSKY, NATHAN
• BERNEY, BUTCH
• KAWAGUCHI, MARK NAOSHI
• ZHU, JI
• SI, HONGBO

Assignees

• 美商蘭姆研究公司

Dates

Publication Date

20260511

Application Date

20210330

Priority Date

20200401