TW-I925614-B - ACOUSTO-OPTIC DEFLECTOR UNIT FOR LASER PROCESSING APPARATUSInventorsMATSUDA, MITSUHIROTEJIKA, YASUHIROHASEGAWA, NAOTOTOYAMA, HIROSHIWAKABAYASHI, YUKIAssignees日商伯東股份有限公司DatesPublication Date20260511Application Date20250421