TW-I925669-B - METHOD FOR FORMING TRENCH STRUCTURE AND SEMICONDUCTOR PROCESSING EQUIPMENT
Inventors
- ZHU, MENG JIAO
- XU, LI TIAN
- ZENG, LI
- MA, JUN SHENG
Assignees
- 大陸商北京北方華創微電子裝備有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20250528
- Priority Date
- 20240606