TW-I925737-B - UPPER ELECTRODE ASSEMBLY, AND SEMICONDUCTOR PROCESS CHAMBER, AND SEMICONDUCTOR PROCESSING EQUIPMENT
Inventors
- CHI, WEN KAI
- LAN, YUN FENG
- REN, XIAO YAN
- WANG, YONG FEI
- WANG, HONG BIAO
- LI, HAO DONG
- WANG, HAO
Assignees
- 大陸商北京北方華創微電子裝備有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20250804
- Priority Date
- 20240816