US-12616935-B2 - Air purification apparatus and air purification method using the same

US12616935B2US 12616935 B2US12616935 B2US 12616935B2US-12616935-B2

Abstract

Air purification apparatuses and methods are provided. An air purification apparatus includes an air purification chamber and a supply chamber coupled to the air purification chamber. The air purification chamber includes a purification reactor, a first electron accelerator that irradiates a first electron beam to the purification reactor, and a second electron accelerator that irradiates a second electron beam to the purification reactor. The supply chamber includes a power supply that supplies power to each of the first electron accelerator and the second electron accelerator. The second electron accelerator is opposite to the first electron accelerator across the purification reactor.

Inventors

Byungnam Kim
Youn-Mook Lim
HUISU KIM
Jin Mun YUN
Daeok Kim
Yeongwoo Yim

Assignees

SAMSUNG ELECTRONICS CO., LTD.

Dates

Publication Date: 20260505
Application Date: 20230321
Priority Date: 20220714

Claims (20)

1 . An air purification apparatus, comprising: an air purification chamber; a supply chamber coupled to the air purification chamber; and a controller, wherein the air purification chamber comprises: a purification reactor; a first electron accelerator that is configured to irradiate a first electron beam to the purification reactor; and a second electron accelerator that is configured to irradiate a second electron beam to the purification reactor, wherein the supply chamber comprises a power supply that is configured to supply power to each of the first electron accelerator and the second electron accelerator, wherein the second electron accelerator is opposite to the first electron accelerator across the purification reactor, and wherein the controller is configured to control the first electron accelerator and the second electron accelerator to sequentially and alternately irradiate the first electron beam and the second electron beam to the purification reactor.
2 . The air purification apparatus of claim 1 , wherein the air purification chamber further comprises a shield plate on the supply chamber.
3 . The air purification apparatus of claim 1 , wherein the purification reactor comprises: a reactor housing that comprises a purification space; a first window coupled to the reactor housing, the first window configured to expose the purification space to the first electron accelerator; and a second window coupled to the reactor housing, the second window configured to expose the purification space to the second electron accelerator.
4 . The air purification apparatus of claim 3 , wherein the purification reactor further comprises: a first door that is configured to open and close the first window; and a second door that is configured to open and close the second window, and wherein the controller is further configured to control the first door and the second door to open sequentially and alternately such that the first electron accelerator and the second electron accelerator sequentially and alternately irradiate the first electron beam and the second electron beam to the purification reactor.
5 . The air purification apparatus of claim 1 , wherein the first electron accelerator, the purification reactor, and the second electron accelerator are sequentially disposed in a horizontal direction.
6 . The air purification apparatus of claim 1 , wherein the supply chamber further comprises a cooler that is configured supply cooling water or coolant to each of the first electron accelerator and the second electron accelerator.
7 . The air purification apparatus of claim 1 , further comprising an inlet duct that is configured to send purification-target air to the purification reactor; an outlet duct that is configured to allow purified air to escape from the purification reactor; and a purification housing that encloses the first electron accelerator and the second electron accelerator, wherein the outlet duct comprises: a first outlet duct that extends in a first direction from the purification reactor; a second outlet duct that extends in a second direction from the first outlet duct, the second direction intersecting the first direction; and a third outlet duct that extends in a third direction from the second outlet duct, the third direction intersecting the second direction, and wherein the first outlet duct and the second outlet duct are in the purification housing.
8 . The air purification apparatus of claim 7 , wherein the third outlet duct penetrates the purification housing, and a portion of the third outlet duct is outside of the purification housing.
9 . The air purification apparatus of claim 7 , wherein the second electron accelerator is positioned opposite to the first electron accelerator across the purification reactor.
10 . The air purification apparatus of claim 7 , wherein the purification reactor comprises: a reactor housing that comprises a purification space; a helical structure in the reactor housing; a first window coupled to the reactor housing and directed toward the first electron accelerator; and a second window coupled to the reactor housing and directed toward the second electron accelerator.
11 . The air purification apparatus of claim 7 , wherein the inlet duct comprises: a first inlet duct that extends in the first direction and is connected to the purification reactor; a second inlet duct that extends in the second direction from the first inlet duct; and a third inlet duct that extends from the second inlet duct in the third direction that intersects the second direction, wherein the first inlet duct and the second inlet duct are in the purification housing.
12 . An air purification apparatus, comprising: an air purification chamber; and a supply chamber coupled to the air purification chamber, wherein the air purification chamber comprises: a purification reactor; a first electron accelerator that is configured to irradiate a first electron beam to the purification reactor; and a second electron accelerator that is configured to irradiate a second electron beam to the purification reactor, wherein the supply chamber comprises a power supply that is configured to supply power to each of the first electron accelerator and the second electron accelerator, and wherein the second electron accelerator is opposite to the first electron accelerator across the purification reactor, wherein the air purification chamber further comprises a shield plate on the supply chamber, wherein each of the first electron accelerator and the second electron accelerator is connected to the power supply via a power supply cable, wherein the power supply cable penetrates the shield plate, wherein the supply chamber comprises a cable shield member that envelops a portion of the power supply cable, and wherein the cable shield member is coupled to a bottom surface of the shield plate.
13 . The air purification apparatus of claim 12 , wherein the cable shield member comprises a curvature portion that has a curved shape, and the power supply cable is curved within the curvature portion of the cable shield member.
14 . An air purification method, comprising: introducing air to a purification reactor of an air purification apparatus; irradiating at least one electron beam to the purification reactor; and discharging the air from the purification reactor, wherein the air purification apparatus includes: a first electron accelerator on one side of the purification reactor; and a second electron accelerator on another side of the purification reactor, and wherein the irradiating the at least one electron beam to the purification reactor comprises: stopping operation of the second electron accelerator and operating the first electron accelerator to irradiate a first electron beam to the purification reactor; and stopping operation of the first electron accelerator and operating the second electron accelerator to irradiate a second electron beam to the purification reactor.
15 . The air purification method of claim 14 , wherein introducing the air to the purification reactor comprises: allowing the air to move in a first direction through an inlet duct connected to the purification reactor; and allowing the air that has moved in the first direction to move in a second direction through the inlet duct, the second direction intersecting the first direction.
16 . The air purification method of claim 14 , wherein discharging the air from the purification reactor comprises: allowing the air to move in a first direction through an outlet duct connected to the purification reactor; and allowing the air that has moved in the first direction to move in a second direction through the outlet duct, the second direction intersecting the first direction.
17 . The air purification method of claim 14 , wherein the irradiating the first electron beam to the purification reactor comprises: opening a first door that is configured to open and close a first window of the purification reactor; and closing a second door that is configured to open and close a second window of the purification reactor, wherein the first window is configured to expose a purification space of the purification reactor to the first electron accelerator, and wherein the second window is configured to expose the purification space to the second electron accelerator.
18 . The air purification method of claim 14 , wherein irradiating the first electron beam to the purification reactor is performed for 3 hours to 9 hours.
19 . The air purification method of claim 14 , wherein the irradiating the first electron beam to the purification reactor comprises allowing a power supply to supply the first electron accelerator with power.
20 . The air purification method of claim 14 , wherein the irradiating the first electron beam to the purification reactor comprises allowing a cooler to supply the first electron accelerator with cooling water or coolant.

Description

CROSS-REFERENCE TO THE RELATED APPLICATION This U.S. non-provisional application claims priority under 35 U.S.C § 119 to Korean Patent Application No. 10-2022-0086766, filed on Jul. 14, 2022, in the Korean Intellectual Property Office, the disclosure of which is hereby incorporated by reference in its entirety. BACKGROUND 1. Field Embodiments of the present disclosure relate to an air purification apparatus and an air purification method using the same, and more particularly, to an air purification apparatus capable of operating without interruption and an air purification method using the same. 2. Description of the Related Art A semiconductor device may be fabricated through various processes. For example, the semiconductor device may be fabricated by a deposition process, a photolithography process, an etching process, and a cleaning process that are performed on a substrate. Various kinds of substrate processing apparatuses may be used for diverse processes performed on the substrate. The substrate processing apparatus may discharge air contacting harmful materials. Before the air is exhausted into the atmosphere from the substrate processing apparatus, it may be required to purify the harmful materials in the air. In addition, during the procedure for purifying the harmful materials such as odorous substances, it may be needed to protect heath of workers and people living nearby. SUMMARY Some embodiments of the present disclosure provide an air purification apparatus capable of operating without interruption and an air purification method using the same. Some embodiments of the present disclosure provide an air purification apparatus capable of preventing radiation leakage and an air purification method using the same. Some embodiments of the present disclosure provide an air purification apparatus capable of increasing a lifespan of an electron accelerator and an air purification method using the same. Some embodiments of the present disclosure provide an air purification apparatus capable of eliminating odorous substances without injuring health of people nearby such as workers and an air purification method using the same. According to embodiments of the present disclosure, an air purification apparatus is provided. The air purification apparatus includes an air purification chamber, and a supply chamber coupled to the air purification chamber. The air purification chamber includes: a purification reactor; a first electron accelerator that is configured to irradiate a first electron beam to the purification reactor; and a second electron accelerator that is configured to irradiate a second electron beam to the purification reactor. The supply chamber includes a power supply that is configured to supply power to each of the first electron accelerator and the second electron accelerator. The the second electron accelerator is opposite to the first electron accelerator across the purification reactor. According to embodiments of the present disclosure, an air purification apparatus is provided. The air purification apparatus includes: a purification reactor; a first electron accelerator that is configured to irradiate a first electron beam to the purification reactor; a second electron accelerator that is configured to irradiate a second electron beam to the purification reactor; an inlet duct that is configured to send purification-target air to the purification reactor; an outlet duct that is configured to allow purified air to escape from the purification reactor; and a purification housing that encloses the first electron accelerator and the second electron accelerator. The outlet duct includes: a first outlet duct that extends in a first direction from the purification reactor; a second outlet duct that extends in a second direction from the first outlet duct, the second direction intersecting the first direction; and a third outlet duct that extends in a third direction from the second outlet duct, the third direction intersecting the second direction. The first outlet duct and the second outlet duct are in the purification housing. According to embodiments of the present disclosure, an air purification method is provided. The air purification method includes: introducing air to a purification reactor of an air purification apparatus; irradiating at least one electron beam to the purification reactor; and discharging the air from the purification reactor. The air purification apparatus includes: a first electron accelerator on one side of the purification reactor; and a second electron accelerator on another side of the purification reactor. The irradiating the at least one electron beam to the purification reactor includes: stopping operation of the second electron accelerator and operating the first electron accelerator to irradiate a first electron beam to the purification reactor; and stopping operation of the first electron accelerator and operating the second electron accelerator to irradia