US-12618451-B2 - Rapid active vibration reduction method for high-speed motion stage

US12618451B2US 12618451 B2US12618451 B2US 12618451B2US-12618451-B2

Abstract

A rapid active vibration reduction method for a high-speed motion stage includes acquiring motion parameters of a motion body of the motion stage in current motion; determining a vibration reduction mode of a vibration reduction device according to the motion parameters; and controlling an action end of the vibration reduction device to contact with the motion body of the motion stage or contact with a driving device for driving the motion body to move based on the vibration reduction mode, so that a contact friction force used for suppressing vibration of the motion body is generated. Realizing vibration reduction by means of active friction can reduce vibration of the motion body in a specific stage needing vibration reduction, and the action end of the vibration reduction device does not need to contact with the motion body or does not need to contact with the driving device before vibration reduction.

Inventors

Lanyu Zhang
Jian Gao
Shaoxuan ZHANG
Yun Chen
Xin Chen
Kai Zhang

Assignees

GUANGDONG UNIVERSITY OF TECHNOLOGY

Dates

Publication Date: 20260505
Application Date: 20230113
Priority Date: 20220121

Claims (10)

1 . A rapid active vibration reduction method for a high-speed motion stage, comprising the following steps of: S 1 : acquiring motion parameters of a motion body of the motion stage in current motion, and determining a vibration reduction mode of a vibration reduction device according to the motion parameters; wherein the motion parameters comprise a speed, an accelerated speed and a displacement of the motion body; the vibration reduction mode determines a magnitude of output displacement, a magnitude of force and a moment of vibration reduction output of the vibration reduction device; and a response time of the vibration reduction device to a signal of a control device is T1, a reaction time of the vibration reduction device after receiving the signal of the control device is T2, a maximum acting time of the vibration reduction device is T3, an error prevention time is T4, and a time from a beginning of motion of the motion body to a moment when inertial vibration is generated by deceleration and positioning to be performed on the motion body is T p , and when T1+T2+T3+T4<T p , the time is the moment of vibration reduction output of the vibration reduction device; and S 2 : controlling an action end of the vibration reduction device to contact with the motion body of the motion stage or contact with a driving device for driving the motion body to move based on the vibration reduction mode during a vibration reduction phase, so that a contact friction force used for suppressing vibration of the motion body is generated; wherein the vibration reduction device is arranged outside the motion body, the action end of the vibration reduction device is telescopically controlled, and the action end does not contact with the motion body or does not contact with the driving device when the motion body is in a high-speed motion phase prior to the vibration reduction phase.
2 . The rapid active vibration reduction method for the high-speed motion stage according to claim 1 , wherein the S 2 specifically comprises: controlling the action end of the vibration reduction device to contact with the motion body based on the vibration reduction mode, so that the contact friction force used for suppressing vibration of the motion body is generated; wherein an action direction of the action end of the vibration reduction device is orthogonal to a motion direction of the motion body.
3 . The rapid active vibration reduction method for the high-speed motion stage according to claim 1 , wherein the S 2 specifically comprises: S 21 : controlling a position detection device to acquire displacement information of the motion body; S 22 : when it is judged according to the displacement information that the motion body moves to a preparation position with a preset distance from a target position, controlling the action end of the vibration reduction device to act based on the vibration reduction mode, so that the action end of the vibration reduction device contacts with the motion body or the driving device during the vibration reduction phase while the motion body moves to the target position; and S 23 : controlling the action end of the vibration reduction device to contact with the motion body or the driving device until an inertial vibration amplitude of the motion body is smaller than a preset amplitude, wherein the inertial vibration amplitude is determined according to detection data of the position detection device.
4 . The rapid active vibration reduction method for the high-speed motion stage according to claim 3 , wherein the position detection device is an absolute grating ruler.
5 . The rapid active vibration reduction method for the high-speed motion stage according to claim 3 , wherein the vibration reduction device comprises a telescopic driving device; and one end of a telescopic portion of the driving device is capable of contacting with the motion body or contacting with the driving device.
6 . The rapid active vibration reduction method for the high-speed motion stage according to claim 5 , wherein the vibration reduction device further comprises a buffer structure; and the buffer structure is mounted at a telescopic end of the telescopic driving device, and is used for contacting with the motion body or the driving device.
7 . The rapid active vibration reduction method for the high-speed motion stage according to claim 5 , wherein the telescopic driving device is a linear motor device, a piezoelectric ceramic element, a magnetostriction element, an electric push rod device, a hydraulic push rod device or other linear telescopic devices.
8 . The rapid active vibration reduction method for the high-speed motion stage according to claim 6 , wherein the buffer structure is an aluminum alloy cushion block, a brass block, oil film paper or other contact buffer structures.
9 . The rapid active vibration reduction method for the high-speed motion stage according to claim 1 , wherein the driving device comprises a driving motor and a screw rod; the screw rod is pivotally fixed on a stage body of the motion stage, and the screw rod movably penetrates through the motion body, and is in threaded fit with the motion body; and the driving motor is mounted on the stage body, and an output shaft is connected with one end of the screw rod.
10 . The rapid active vibration reduction method for the high-speed motion stage according to claim 9 , wherein the S 2 specifically comprises: controlling the action end of the vibration reduction device to contact with the output shaft of the driving motor or contact with the screw rod based on the vibration reduction mode during the vibration reduction phase, so that the contact friction force used for suppressing vibration of the motion body is generated; wherein an action direction of the action end of the vibration reduction device is orthogonal to an axial direction of the output shaft of the driving motor, or is orthogonal to an axial direction of the screw rod.

Description

CROSS REFERENCE TO RELATED APPLICATIONS This application claims foreign priority of Chinese Patent Application No. 202210074157.3, filed on Jan. 21, 2022 in the China National Intellectual Property Administration, the disclosures of all of which are hereby incorporated by reference. TECHNICAL FIELD The present application relates to the technical field of mechanical devices, and particularly to a rapid active vibration reduction method for a high-speed motion stage. BACKGROUND OF THE DISCLOSURE High-speed motion stage device is one of core devices in microelectronic manufacturing. Since a motion stage in the high-speed motion stage device is usually accompanied by inertial vibration during positioning, how to rapidly suppress inertial vibration is a key issue to improve the operation efficiency and the development of microelectronic manufacturing. At present, in the face of the vibration problem of the high-speed motion stage device, vibration reduction is often realized by using a control method or adding a vibration reduction structure. The control method still has the problems of complex parameter adjustment and poor adaptability for the vibration reduction of the stage under a condition of high-speed motion. However, a mode of adding the vibration reduction structure is usually a passive vibration reduction mode, with an unsatisfactory effect on vibration suppression of the high-speed stage device. SUMMARY OF THE DISCLOSURE In view of this, the present application aims to provide a rapid active vibration reduction method for a high-speed motion stage, which has a flexible and good vibration suppression effect. In order to achieve the above objective, the present application provides a rapid active vibration reduction method for a high-speed motion stage, which comprises the following steps of: S1: acquiring motion parameters of a motion body of the motion stage in current motion, and determining a vibration reduction mode of a vibration reduction device according to the motion parameters; andS2: controlling an action end of the vibration reduction device to contact with the motion body of the motion stage or contact with a driving device for driving the motion body to move based on the vibration reduction mode, so that a contact friction force used for suppressing vibration of the motion body is generated;wherein the vibration reduction device is arranged outside the motion body, the action end of the vibration reduction device is telescopically controlled, and the action end does not contact with the motion body or does not contact with the driving device when the motion body is in a motion state. Furthermore, the S2 specifically comprises: controlling the action end of the vibration reduction device to contact with the motion body based on the vibration reduction mode, so that the contact friction force used for suppressing vibration of the motion body is generated;wherein an action direction of the action end of the vibration reduction device is orthogonal to a motion direction of the motion body. Furthermore, the S2 specifically comprises: S21: controlling a position detection device to acquire displacement information of the motion body;S22: when it is judged according to the displacement information that the motion body moves to a preparation position with a preset distance from a target position, controlling the action end of the vibration reduction device to act based on the vibration reduction mode, so that the action end of the vibration reduction device contacts with the motion body or the driving device while the motion body moves to the target position; andS23: controlling the action end of the vibration reduction device to contact with the motion body or the driving device until an inertial vibration amplitude of the motion body is smaller than a preset amplitude, wherein the inertial vibration amplitude is determined according to detection data of the position detection device. Furthermore, the position detection device is an absolute grating ruler. Furthermore, the vibration reduction device comprises a telescopic driving device; and one end of a telescopic portion of the driving device is capable of contacting with the motion body or contacting with the driving device. Furthermore, the vibration reduction device further comprises a buffer structure; and the buffer structure is mounted at a telescopic end of the telescopic driving device, and is used for contacting with the motion body or the driving device. Furthermore, the telescopic driving device is a linear motor device, a piezoelectric ceramic element, a magnetostriction element, an electric push rod device, a hydraulic push rod device or other linear telescopic devices. Furthermore, the buffer structure is an aluminum alloy cushion block, a brass block, oil film paper or other contact buffer structures. Furthermore, the driving device comprises a driving motor and a screw rod; the screw rod is pivotally fixed on a stage body of th