US-12618491-B2 - Microfluidic component with metal layer stack and fluid conduit element made of another material bonded with it

US12618491B2US 12618491 B2US12618491 B2US 12618491B2US-12618491-B2

Abstract

A microfluidic component for a sample separation device includes a layer body with multiple metal layer structures that are connected with each other, and an element made of a material different from the metal layer structures, which includes at least one microfluidic structure and is bonded with the layer body.

Inventors

Armin Steinke
Christian Daniel Ruf

Assignees

AGILENT TECHNOLOGIES, INC.

Dates

Publication Date: 20260505
Application Date: 20210609
Priority Date: 20200615

Claims (17)

1 . A microfluidic component for a sample separation device, the microfluidic component comprising: a layer body comprising a plurality of metal layer structures connected to each other; and an element having a material composition different from a material composition of the metal layer structures, wherein the element comprises at least one microfluidic structure and is bonded with the layer body, wherein the layer body has a cavity and the element is disposed in the cavity such that the element is embedded in the layer body.
2 . The microfluidic component according to claim 1 , wherein the microfluidic component is selected from the group consisting of: a fluid valve; a component of a fluid valve; a stator component of a fluid valve; a rotor component of a fluid valve; a sample separation unit; a part of a sample separation unit; a sample enrichment unit; a part of a sample enrichment unit; a heat exchanger; and a mixer.
3 . The microfluidic component according to claim 1 , wherein the element comprises an undercut disposed in the cavity under at least one of the metal layer structures.
4 . The microfluidic component according to claim 1 , wherein the element is embedded in the layer body such that the element comprises an exposed functional surface that is exposed to a region outside of the microfluidic component.
5 . The microfluidic component according to claim 4 , comprising at least one of the following features: wherein the exposed functional surface of the element is aligned with an exterior surface of the layer body; wherein, at the exposed functional surface of the element, the at least one microfluidic structure is accessible from the region outside of the microfluidic component.
6 . The microfluidic component according to claim 1 , comprising one of the following features: wherein at least one of the metal layer structures of the layer body comprises at least one further microfluidic structure; wherein at least one of the metal layer structures of the layer body comprises at least one further microfluidic structure fluidically coupled with the at least one microfluidic structure of the element.
7 . The microfluidic component according to claim 1 , wherein the element is a disk or a stepped disk.
8 . The microfluidic component according to claim 4 , wherein the exposed functional surface of the element comprises a lower roughness Ra than another exterior surface of the element.
9 . A microfluidic component for a sample separation device, the microfluidic component comprising: a layer body comprising a plurality of metal layer structures connected to each other; and an element having a material composition different from a material composition of the metal layer structures, wherein the element comprises at least one microfluidic structure and is bonded with the layer body, wherein the element further comprises a collar that is interrupted in a circumferential direction around the collar.
10 . A microfluidic component for a sample separation device, the microfluidic component comprising: a layer body comprising a plurality of metal layer structures connected to each other; and an element having a material composition different from a material composition of the metal layer structures, wherein the element comprises at least one microfluidic structure and is bonded with the layer body, and wherein: the element further comprises an exposed functional surface that is exposed to a region outside of the microfluidic component; and the element further comprises a circumferential collar which, at least in portions of the circumferential collar, comprises a compression ring protruding in a direction toward the exposed functional surface of the element.
11 . The microfluidic component according to claim 1 , wherein the element is disposed in the cavity such that the element is surrounded by at least two metal layer structures of the plurality of metal layer structures.
12 . The microfluidic component according to claim 1 , wherein the element comprises a bottom side, the plurality of metal layer structures comprises an adjoining metal layer structure that adjoins the bottom side of the element, and the adjoining metal layer structure comprises at least one balancing recess configured to balance thermal expansion phenomena during bonding due to different coefficients of thermal expansion of the element and the metal layer structures.
13 . A sample separation device for separating a fluidic sample, the sample separation device comprising: a fluid drive configured to drive a mobile phase and the fluidic sample contained therein; a sample separation unit configured to separate the fluidic sample in the mobile phase; and the microfluidic component according to claim 1 , wherein the fluidic sample and/or the mobile phase is to be delivered through the at least one microfluidic structure during the separation.
14 . The sample separation device according to claim 13 , further comprising at least one of the following features: the sample separation unit is configured as a chromatographic separation unit; the sample separation device is configured for analyzing at least one physical, chemical and/or biological parameter of at least one fraction of the fluidic sample; the sample separation device comprises a device selected from the group consisting of: a device for a chemical, biological and/or pharmaceutical analysis; a chromatography device; a liquid chromatography device; a gas chromatography device; a device for supercritical liquid chromatography; a high-pressure liquid chromatography device; an ultra-high-pressure liquid chromatography device; an electrophoresis device; and a gel electrophoresis device; the fluid drive is configured to drive the mobile phase with a pressure of at least 100 bar; the fluid drive is configured to drive the mobile phase with a pressure of at least 500 bar; the fluid drive is configured to drive the mobile phase with a pressure of at least 1000 bar; the sample separation device is configured as a microfluidic device; the sample separation device is configured as a nanofluidic device; the sample separation device comprises a sample insertion unit configured to insert the fluidic sample into a fluidic path between the fluid drive and the sample separation unit; the sample separation device comprises a detector for detecting the separated fluidic sample; the sample separation device comprises a sample fractionator configured to fractionize the separated fluidic sample.
15 . The microfluidic component according to claim 1 , wherein the at least one microfluidic structure comprises a feature selected from the group consisting of: a structure configured to conduct fluid through the structure; a structure configured to conduct fluid through the structure and at least partially filled with a stationary phase; a structure configured to conduct fluid through the structure and having an inner diameter in a range between 0.05 mm and 1 mm; a structure configured to conduct fluid through the structure and having an inner diameter in a range between 0.1 mm and 0.5 mm; a fully circumferentially limited channel; and a groove.
16 . The microfluidic component according to claim 1 , wherein the metal layer structures are composed of stainless steel or iron.
17 . The microfluidic component according to claim 1 , wherein the element comprises a material selected from the group consisting of: a non-metallic material; a ceramic; aluminum oxide; and zirconium oxide.

Description

RELATED APPLICATIONS This application is the national stage under 35 U.S.C. 371 of International Application No. PCT/IB2021/055057, filed Jun. 9, 2021; which claims priority to German Application No. DE 10 2020 115 728.2, filed Jun. 15, 2020; the entire contents of each of which are incorporated by reference herein. TECHNICAL FIELD The present invention relates to a microfluidic component, a sample separation device, and a method for manufacturing a microfluidic component for a sample separation device. BACKGROUND In a high-performance liquid chromatography (HPLC) system, typically a liquid (mobile phase) with a very precisely controlled flow rate (for example in a range of microliters to milliliters per minute) and at a high pressure (typically 20 to 1000 bar and above, currently up to 2000 bar), where the compressibility of the liquid is noticeable, is moved through a so-called stationary phase (for example in a chromatographic column), to separate single components of a sample liquid which is introduced in the mobile phase from each other. For example, such a HPLC-system is known from EP 0,309,596 B1, of the same applicant, Agilent Technologies, Inc. Such a HPLC-system has frequently one or more switchable fluid valves. Microfluidic components, such as components of fluid valves, are conventionally manufactured by pressing a, for example powdery, starting material in a molding tool to a desired shape. However, the manufacture of fluid valves (in particular of rotor-and/or stator components of a fluid valve) and other microfluidic components for sample separation devices is still elaborate and prone to errors. A difficulty is that the microfluidic components for sample separation devices have to withstand high and highest pressures. Moreover, the microfluidic components which get in contact with a fluidic sample and solvents shall preferably be biologically and chemically inert. Additionally, fluids shall be able to reliably flow through microfluidic structures of the microfluidic components. This is increasingly critical, when microfluidic structures of the microfluidic components become smaller and smaller. In this case, during a manufacturing process, it might occur that microfluidic channels or the like are undesirably closed, for example. SUMMARY It is an object of the present subject matter to manufacture a microfluidic component with microfluidic structures with an acceptable effort and a high error robustness during fabrication and operation. According to an exemplary embodiment of the present invention, a microfluidic component for a sample separation device is provided, wherein the microfluidic component comprises a layer body with multiple metal layer structures which are connected to each other, and an element which is made of another material than the metal layer structures, comprises at least one microfluidic structure, and is bonded with the layer body. According to another exemplary embodiment, a sample separation device for separating a fluidic sample is provided, wherein the sample separation device comprises a fluid drive for driving a mobile phase and the fluidic sample contained therein, a sample separation unit for separating the fluidic sample in the mobile phase, and a microfluidic component with the above described features, wherein the fluidic sample and/or the mobile phase is to be delivered through the at least one microfluidic structure during the separation. According to a further exemplary embodiment, a method for manufacturing a microfluidic component for a sample separation device is provided, wherein the method comprises connecting multiple metal layer structures for forming a layer body, and bonding an element, which is made of another material than the metal layer structures and is formed with at least one microfluidic structure, with the layer body. In the context of the present application, the term “microfluidic component” in particular denotes a component which makes a functional contribution in terms of a sample separation analysis, which encompasses conducting a fluid (in particular the fluidic sample to be separated and/or a mobile phase) through microfluidic structures of the component. Such a microfluidic component may be fluidically coupled via fluid conduits (for example capillaries) with one or more other microfluidic components. Examples for such microfluidic components are a fluidic valve which is switchable between different fluid coupling states, or a component of it, a sample separation unit for separating a fluidic sample or a component of it, a detector or a detector component for detecting the separated fluidic sample, a fluidic heat exchanger, a mixer for mixing fluids, etc. In the context of the present application, the term “microfluidic structure” in particular denotes a branched or non-branched channel, a multiplicity of such channels, or another structure with dimensions in the range of micrometers to millimeters, through which a fluid can flow