US-12618739-B2 - Test leakage device

US12618739B2US 12618739 B2US12618739 B2US 12618739B2US-12618739-B2

Abstract

In a test leakage device ( 10 ) for testing the functionality and for calibrating a gas leak detection device having an evacuable test chamber ( 34 ) for receiving a test object and the test leakage device ( 10 ), wherein the test leakage device ( 10 ) has a base ( 12 ), a cover ( 16 ) and at least one side wall ( 14 ) connecting the base ( 12 ) to the cover ( 16 ), which surround an interior space ( 20 ) which can be filled with a test gas or a test liquid, provision is made for the base ( 12 ) to have a membrane ( 24 ) which is permeable to the test gas or constituents of the test liquid, and for mutually opposite sections of that inner side ( 18 ) of the side wall ( 14 ) which faces the interior space ( 20 ) to be at a greater distance from one another in the region of the cover than in the region of the base.

Inventors

Daniel Wetzig
Maximilian Reismann
Josef Grenz
Hendrik van TRIEST

Assignees

INFICON GMBH

Dates

Publication Date: 20260505
Application Date: 20210525
Priority Date: 20200626

Claims (15)

1 . A test leakage device for testing the functionality and for calibrating a gas leak detection device which comprises an evacuable test chamber for receiving the test leakage device, wherein the test leakage device comprises a base, a cover and at least one side wall connecting the base to the cover, wherein the base, the cover and the at least one side wall surround an interior space which can be filled with a test gas or a test liquid, wherein the base has a membrane which is permeable to the test gas or constituents of the test liquid, and mutually opposite sections of the inner side of the side wall which faces the interior space are at a greater distance from one another in the region of the cover than in the region of the base, wherein the distance of the mutually opposite sections of the inner side of the side wall facing the interior space decreases continuously from the cover to the base.
2 . The test leakage device according to claim 1 , wherein the inner side of the side wall cylindrically surrounds the interior space and conically tapers towards the membrane.
3 . The test leakage device according to claim 1 , wherein, in the region of the base, the inner side of the side wall adjoins a through opening comprising the membrane.
4 . The test leakage device according to claim 3 , wherein the through opening is formed in a cylindrical shape and has a circular surface facing the interior, the outer edge of which adjoins the inner side of the side wall.
5 . The test leakage device according to claim 1 , wherein the lower side of the base facing away from the interior space is provided with at least one spacer that prevents the lower side of the base from contacting the bottom of the test chamber, when the test leakage device is contained in the test chamber.
6 . The test leakage device according to claim 1 , wherein the test leakage device has a filling opening closed with a valve.
7 . The test leakage device according to claim 1 , wherein the base and the side wall are formed as an integral part and the inner side is formed as a recess in the integral part.
8 . A test leakage device for testing the functionality and for calibrating a gas leak detection device which comprises an evacuable test chamber for receiving the test leakage device, wherein the test leakage device has a base, a cover and at least one side wall connecting the base to the cover, wherein the base, the cover and the at least one side wall surround an interior space which can be filled with a test gas or a test liquid, wherein the base has a membrane which is permeable to the test gas or constituents of the test liquid, and the base has a recess with an inner side facing the interior space, wherein mutually opposite sections of the inner side are at a greater distance from one another in the region of the cover than in the region of the base, wherein the distance of the mutually opposite sections of the inner side of the side wall facing the interior space decreases continuously from the cover to the base.
9 . The test leakage device according to claim 8 , wherein the distance of the mutually opposite sections of the inner side of the side wall facing the interior space decreases continuously from the cover to the base.
10 . The test leakage device according to claim 8 , wherein the inner side of the side wall cylindrically surrounds the interior space and conically tapers towards the membrane.
11 . The test leakage device according to claim 8 , wherein, in the region of the base, the inner side of the side wall adjoins a through opening comprising the membrane.
12 . The test leakage device according to claim 11 , wherein the through opening is formed in a cylindrical shape and has a circular surface facing the interior, the outer edge of which adjoins the inner side of the side wall.
13 . The test leakage device according to claim 8 , wherein the lower side of the base facing away from the interior space is provided with at least one spacer that prevents the lower side of the base from contacting the bottom of the test chamber, when the test leakage device is contained in the test chamber.
14 . The test leakage device according to claim 8 , wherein the test leakage device has a filling opening closed with a valve.
15 . The test leakage device according to claim 8 , wherein the base and the side wall are formed as an integral part and the inner side is formed as a recess in the integral part.

Description

The invention relates to a test leakage device for testing the functionality of and for calibrating a gas leak detection device. Gas leak detection devices typically comprise an evacuable test chamber into which a test object filled with gas or liquid is placed. The test chamber has a gas analysis device connected thereto which analyzes the gas drawn from the test chamber to detect possible leakage gas that has escaped into the test chamber through a leak in the test object or to detect a liquid that escapes through the leak and is evaporated. Here, it is of particular importance to be able to infer the size of the leak from the amount of the leakage gas detected. For this purpose, test leakage devices are used which contain a predefined amount of a known test gas or test fluid and are provided with a leak having known dimensions and/or a known permeability to the fluid contained. Test leakage devices are typically used to test the functionality of a gas leak detection device and to calibrate the gas leak detection device. The leak of a test leakage device is often designed as a membrane, the leakage rate of which depends on the permeability of the membrane body to the respective test gas or test fluid, the membrane temperature, the temperature and the vapor pressure of the test gas/test fluid, the degree of wetting of the membrane on the inner side/fluid side, and the ventilation on the exit side of the membrane, i.e. on the outer side of the test leakage device. EP 2 447 694 B1, for example, describes a liquid-filled test leakage from which gas or vapor or liquid components transported by gas escape. The gases or the vapor or the liquid components transported by the gas, which escape from the test leakage, are formed by the liquid as a result of its particular vapor pressure or by permeation through a solid layer of a membrane. The leakage rate of a membrane test leakage depends on whether and to what degree the inner side of the membrane is wetted with liquid. In this regard, it may have a significant influence on the leakage rate, whether the membrane is in direct contact with a liquid or only with a liquid vapor. In order to obtain a stable leakage rate, it should either be prevented that liquid reaches the membrane or it should be ensured that only liquid vapor comes into contact with the membrane. DE 10 2014 200 907 B4 describes a reference outgassing system with a reservoir containing a fluid or a fluid mixture. A transport vacuum chamber surrounds the reservoir. A chamber pressure of less than 10 kPa prevails in the transport vacuum chamber. It is an object of the invention to provide an improved test leakage device having a membrane with a stable leakage rate. The test leakage device is defined by the features of claim 1 or by the features of claim 2. According thereto, the test leakage device comprises a base, a cover and at least one side wall connecting the base to the cover, the base, the cover and the side wall surrounding an interior space which can be filled with a test gas or with a test liquid. The test leakage device is provided with a membrane permeable to the test gas or to components of the test liquid, so that the test gas or components of the test liquid can escape from the test leakage device through the membrane. The characteristic of the invention is that the membrane is provided in the base of the test leakage device, and that mutually opposite sections of the inner side of the side wall, which faces the interior, are spaced farther from each other in the region of the cover than in the region of the base. As a consequence, the distance between the opposing sections of the side wall decreases from the cover toward the base, so that the test fluid contained in the interior space is guided by gravity along the sections of the side wall towards the membrane. As an alternative, a recess can be formed in the base of the test leakage device, wherein the recess has an inner side facing the interior, and mutually opposite sections of this inner side are spaced farther from each other in the region of the cover than in the region of the base. In other words, the mutually opposite sections of the inner side are at a distance from each other that decreases from the top (from the cover) to the bottom (towards the base). The distance between the mutually opposite sections of the inner side of the side wall or the recess, which faces the interior, preferably decreases continuously from the cover to the base. The inner side may surround the interior space cylindrically and, in particular, taper conically towards the membrane. Here, it is particularly advantageous if, in the region of the base, the inner side adjoins the membrane or a through opening formed in the base and containing the membrane. In this case, the through opening and/or the membrane can be formed in a cylindrical shape and have a circular surface facing the interior, the inner side of the side wall or the recess adjoining the