US-12620698-B2 - Metal mesh, thin film sensor and mask

US12620698B2US 12620698 B2US12620698 B2US 12620698B2US-12620698-B2

Abstract

A metal mesh includes: first metal lines ( 11 ) and second metal lines ( 12 ) extending in crossed directions. The first metal lines ( 11 ) are arranged side by side in a first direction and extend in a second direction; the second metal lines ( 12 ) are arranged side by side in the first direction and extend in a third direction. Each first metal line ( 11 ) includes first sub-line segments sequentially connected together in the second direction, and each second metal line ( 12 ) includes second sub-line segments sequentially connected together in the third direction. Each first sub-line segment has a midpoint superposing with a midpoint of one of the second sub-line segments, the first and second sub-line segments having superposed midpoints form a crossed structure ( 10 ), and define two opposite first angles ( θ1 ) and two opposite second angles ( θ2 ). Each first angle ( θ1 ) is not greater than each second angle ( θ1 ).

Inventors

Mengwen JIA
Hai Yu
Yafei Zhang
Yali Wang
Dongdong Zhang
Feng Qu

Assignees

BOE TECHNOLOGY GROUP CO., LTD.

Dates

Publication Date: 20260505
Application Date: 20250425

Claims (11)

1 . A metal mesh, comprising: a plurality of first metal lines and a plurality of second metal lines extending in crossed directions; wherein the first metal lines are arranged side by side in a first direction and extend in a second direction; the second metal lines are arranged side by side in the first direction and extend in a third direction; and wherein each first metal line comprises a plurality of first sub-line segments sequentially connected together in the second direction, and each second metal line comprises a plurality of second sub-line segments sequentially connected together in the third direction; each first sub-line segment has a midpoint superposing with a midpoint of one of the second sub-line segments, the first sub-line segment and the second sub-line segment having superposed midpoints form a crossed structure, and define two opposite first angles and two opposite second angles; and each first angle is not greater than each second angle; and the crossed structure comprises a first virtual quadrangle and a second virtual quadrangle; the first sub-line segment is arranged in the first virtual quadrangle, and the first virtual quadrangle has a width being a maximum width of the first sub-line segment and a length being a length of the first sub-line segment; the second sub-line segment is arranged in the second virtual quadrangle, and the second virtual quadrangle has a width being a maximum width of the second sub-line segment and a length being a maximum length of the second sub-line segment.
2 . The metal mesh according to claim 1 , wherein the first sub-line segment in the crossed structure comprises two first branches, and a first connection part arranged between and connecting the two first branches together; the second sub-line segment comprises two second branches, and a second connection part arranged between and connecting the two second branches together; the first connection part and the second connection part are arranged in a crossed manner; the first branches and the second branches each have a maximum width a1, the first side and the second side each have a length b1, and the first connection part and the second connection part each have a width c1; and any two of the maximum width a1, the length b1, and the width c1 are not equal to each other.
3 . The metal mesh according to claim 2 , wherein each first branch is connected to the first connection part to form a dihedral angle not less than 90°.
4 . The metal mesh according to claim 2 , wherein the first sub-line segment forms an axisymmetric pattern with a straight line running through a midpoint of the maximum width of the first sub-line segment in the second direction as an axis of symmetry; and the second sub-line segment forms an axisymmetric pattern with a straight line running through a midpoint of the maximum width of the second sub-line segment in the third direction as an axis of symmetry.
5 . The metal mesh according to claim 1 , wherein the first sub-line segment forms an axisymmetric pattern with a straight line running through a midpoint of the maximum width of the first sub-line segment in the second direction as an axis of symmetry; and the second sub-line segment forms an axisymmetric pattern with a straight line running through a midpoint of the maximum width of the second sub-line segment in the third direction as an axis of symmetry.
6 . The metal mesh according to claim 1 , wherein each first angle comprises a flat chamfer or a rounded chamfer; and in the crossed structure, a distance L3 is provided between an intersection point of extension lines of the first side and the second side and a vertex of the first angle, and a distance L4 is provided between the intersection point of the extension lines of the first side and the second side and a center of an intersection region of the first sub-line segment and the second sub-line segment; where L3:L4=1:10 to 1:2.
7 . The metal mesh according to claim 1 , wherein each second angle comprises a rounded chamfer or a flat chamfer.
8 . The metal mesh according to claim 1 , wherein a connection line between vertices of the two second angles forms an angle with the first direction.
9 . The metal mesh according to claim 1 , wherein the first sub-line segment in the crossed structure comprises two first branches, and the second sub-line segment comprises two second branches; the crossed structure further comprises a first annular connection part connecting between the two first branches and the two second branches; and in the crossed structure, the two first branches and the two second branches are connected to the first annular connection part at different nodes from each other.
10 . The metal mesh according to claim 9 , wherein a first bridge part is connected between any adjacent two second angles with opposite openings.
11 . A thin film sensor, comprising the metal mesh according to claim 1 .

Description

CROSS REFERENCE TO RELATED APPLICATIONS This is a Continuation of U.S. patent application Ser. No. 17/789,772, filed Jun. 28, 2022, which is a National Phase Application filed under 35 U.S.C. 371 as a national stage of PCT/CN2021/102533 filed on Jun. 25, 2021, the content of each of which is incorporated herein by reference in its entirety. TECHNICAL FIELD The present disclosure relates to the field of sensor technology, and specifically relates to a metal mesh, a thin film sensor, and a mask. BACKGROUND The current micro-nano processing technology commonly used in the glass-based semiconductor industry has a line width of 5 μm or less. However, some thin film display and sensing devices has put forward higher requirements on the line width of micro-nano processing, such as transparent antennas or radio frequency devices. SUMMARY Some embodiments of the present disclosure provide a metal mesh, a thin film sensor, and a mask. In a first aspect, an embodiment of the present disclosure provides a metal mesh, including: a plurality of first metal lines and a plurality of second metal lines extending in crossed directions; wherein the first metal lines are arranged side by side in a first direction and extend in a second direction; the second metal lines are arranged side by side in the first direction and extend in a third direction; and wherein each first metal line includes a plurality of first sub-line segments sequentially connected together in the second direction, and each second metal line includes a plurality of second sub-line segments sequentially connected together in the third direction. Each first sub-line segment has a midpoint superposing with a midpoint of one of the second sub-line segments, the first sub-line segment and the second sub-line segment having the superposed midpoints form a crossed structure, and define two opposite first angles and two opposite second angles; each first angle is not greater than each second angle; and the crossed structure includes a first virtual quadrangle and a second virtual quadrangle; the first sub-line segment is arranged in the first virtual quadrangle, and the first virtual quadrangle has a width being a maximum width of the first sub-line segment and a length being a length of the first sub-line segment; the second sub-line segment is arranged in the second virtual quadrangle, and the second virtual quadrangle has a width being a maximum width of the second sub-line segment and a length being a maximum length of the second sub-line segment. The first sub-line segment in the crossed structure includes two first branches, and a first connection part arranged between and connecting the two first branches; the second sub-line segment includes two second branches together, and a second connection part arranged between and connecting the two second branches together; the first connection part and the second connection part are arranged in a crossed manner; the first branches and the second branches each have a maximum width a1, the first side and the second side each have a length b1, and the first connection part and the second connection part each have a width c1; and any two of the maximum width a1, the length b1, and the width c1 are not equal to each other. Each first branch is connected to the first connection part to form a dihedral angle not less than 90°. The first sub-line segment forms an axisymmetric pattern with a straight line running through a midpoint of the maximum width of the first sub-line segment in the second direction as an axis of symmetry; and the second sub-line segment forms an axisymmetric pattern with a straight line running through a midpoint of the maximum width of the second sub-line segment in the third direction as an axis of symmetry. Each first angle includes a flat chamfer or a rounded chamfer; and in the crossed structure, a distance L3 is provided between an intersection point of extension lines of the first side and the second side and a vertex of the first angle, and a distance L4 is provided between the intersection point of the extension lines of the first side and the second side and a center of an intersection region of the first sub-line segment and the second sub-line segment; where L3:L4=1:10 to 1:2. For any crossed structure, two sides defining each first angle are a first side and a second side, respectively, and a length of a connection line between a point S1 on the first side and a point S2 on the second side is a maximum distance L1 between the first side and the second side; the connection line between the point S1 and the point S2 intersects with a side of the first virtual quadrangle at a point S3, intersects with a side of the second virtual quadrangle at a point S4, and a connection line between the point S3 and the point S4 has a length L2; wherein L1 is greater than L2. For any crossed structure, two sides defining each second angle are a third side and a fourth side, respectively, and a length of a