US-12620971-B2 - Vibrator element, vibrator device, and method of manufacturing vibrator element

US12620971B2US 12620971 B2US12620971 B2US 12620971B2US-12620971-B2

Abstract

A vibrating arm of a vibrator element has a first surface, a second surface at an opposite side to the first surface in a Z direction, a first side surface and a second side surface as side surfaces, and a third side surface as a tip surface. At least one of the first side surface, the second side surface, and the third side surface includes a first side surface part tilted with respect to a Z direction, and a second side surface part tilted toward the first surface or the second surface with respect to the first side surface part. The first weight is arranged so that an outer edge of the first weight is located at inner side of innermost parts in the first side surface part and the second side surface part, or at the same position as the innermost parts when viewed from the Z direction.

Inventors

Osamu Kawauchi
Takuro KOBAYASHI

Assignees

SEIKO EPSON CORPORATION

Dates

Publication Date: 20260505
Application Date: 20220606
Priority Date: 20210616

Claims (9)

1 . A vibrator element comprising: a base part; a vibrating arm which includes a first surface, a second surface at an opposite side to the first surface in a direction along a Z axis, a first side surface, a second side surface at an opposite side to the first side surface in a direction along an X axis perpendicular to the Z axis, and a third side surface located at an opposite side to the base part, and extends from the base part in a direction along a Y axis perpendicular to the Z axis and the X axis; and a first weight arranged on the second surface, wherein each of the first side surface, and the second side surface is configured by a first side surface part and a second side surface part that is directly contiguous with the first side surface part, and the first side surface part is tilted with respect to a direction along the Z axis, and the second side surface part is tilted toward the first surface or the second surface with respect to the first side surface part, the first side surface part of the first side surface and the first side surface part of the second side surface are directly contiguous with the second surface, and when viewed from a direction along the Z axis, the first weight is arranged such that an outer edge portion on the first side surface side is substantially aligned with the innermost portions of the first side surface part and the second side surface part of the first side surface, and an outer edge portion on the second side surface side is substantially aligned with the innermost portions of the first side surface part and the second side surface part of the second side surface.
2 . The vibrator element according to claim 1 , wherein the third side surface has the first side surface part and the second side surface part, and when viewed from a direction along the Z axis, the first weight is arranged so that an outer edge portion on the third side surface side is closer to the base part than the innermost portions in the first side surface part and the second side surface part of the third side surface.
3 . The vibrator element according to claim 1 , wherein the vibrating arm has a weight part provided with the first weight and an arm part which is located at the base part side of the weight part, and the first surface and the second surface of the arm part are provided with a recessed part, and a width in a direction along the X axis in the second surface of the weight part is smaller than a width in a direction along the X axis in the first surface of the weight part.
4 . The vibrator element according to claim 3 , wherein a width in a direction along the X axis in the first surface of the arm part is equal to a width in a direction along the X axis in the second surface of the arm part.
5 . The vibrator element according to claim 1 , further comprising: a second weight arranged on the first side surface part.
6 . A vibrator device comprising: the vibrator element according to claim 1 ; and a package configured to house the vibrator element.
7 . A method of manufacturing a vibrator element, comprising: a frequency adjustment method of adjusting a frequency of the vibrator element, wherein the vibrator element includes a base part, a vibrating arm which includes a first surface, a second surface at an opposite side to the first surface in a direction along a Z axis, a first side surface, a second side surface at an opposite side to the first side surface in a direction along an X axis perpendicular to the Z direction, and a third side surface located at an opposite side to the base part, and extends from the base part in a direction along a Y axis perpendicular to the Z axis and the X axis, and a first weight arranged on the second surface, each of the first side surface and the second side surface is configured by a first side surface part and a second side surface part that is directly contiguous with the first side surface part, and the first side surface part is tilted with respect to a direction along the Z axis, and the second side surface part is tilted toward the first surface or the second surface with respect to the first side surface part, the first side surface part of the first side surface and the first side surface part of the second side surface are directly contiguous with the second surface, when viewed from a direction along the Z axis the first weight is arranged such that an outer edge portion on the first side surface side is substantially aligned with the innermost portions of the first side surface part and the second side surface part of the first side surface, and an outer edge portion on the second side surface side is substantially aligned with the innermost portions of the first side surface part and the second side surface part of the second side surface, and the frequency adjustment method includes irradiating at least a part of the first weight with a laser beam from the first surface side in a direction along the Z axis to remove the at least a part of the first weight to thereby change an oscillation frequency of the vibrator element.
8 . The method of manufacturing the vibrator element according to claim 7 , wherein the vibrating arm is provided with a second weight arranged on the first side surface part, and the frequency adjustment method includes irradiating at least a part of the second weight with a laser beam from the first surface side in a direction along the Z axis to remove the at least a part of the second weight to thereby change the oscillation frequency of the vibrator element.
9 . The method of manufacturing the vibrator element according to claim 7 , wherein the third side surface has the first side surface part and the second side surface part, and when viewed from a direction along the Z axis, the first weight is arranged so that an outer edge portion on the third side surface side is closer to the base part than the innermost portions in the first side surface part and the second side surface part of the third side surface.

Description

The present application is based on, and claims priority from JP Application Serial Number 2021-099985, filed Jun. 16, 2021, the disclosure of which is hereby incorporated by reference herein in its entirety. BACKGROUND 1. Technical Field The present disclosure relates to a vibrator element, a vibrator device, and a method of manufacturing a vibrator element. 2. Related Art In the past, as disclosed in JP-A-2009-88806 (Document 1), there has been known a frequency adjustment method of a quartz crystal vibrator for adjusting a frequency by forming a frequency adjusting metal film on a first surface, a first side surface having a protruding part in a cross-sectional surface, and a second side surface in a vibrator element of the quartz crystal vibrator, making a laser enter a second surface opposed to the first surface, and removing a part of the frequency adjusting metal film. Further, it is known that it is possible to prevent the frequency adjusting metal film which should be removed from remaining as a burr in the frequency adjusting metal film by making an incident angle of the laser acute from the second side surface side toward the first side surface as described in Document 1. However, in the frequency adjustment method of the quartz crystal vibrator described in Document 1, since the incident angle of the laser is made acute from the second side surface toward the first side surface, the laser is deflected or blocked by the second side surface when removing the frequency adjusting metal film at the second side surface side. Therefore, there is a possibility that the frequency adjusting metal film at the second side surface side is not sufficiently irradiated with the laser to form a foreign particle such as a burr. There is a problem that the frequency of the quartz crystal vibrator varies when the foreign particle such as a burr drops on a manufacturing process or after completion of a product. SUMMARY A vibrator element includes a base part, a vibrating arm which includes a first surface, a second surface at an opposite side to the first surface in a direction along a Z axis, a first side surface, a second side surface at an opposite side to the first side surface in a direction along an X axis perpendicular to the Z direction, and a third side surface located at an opposite side to the base part, and extends from the base part in a direction along a Y axis perpendicular to the Z axis and the X axis, and a first weight arranged on the second surface, wherein at least one of the first side surface, the second side surface, and the third side surface includes a first side surface part tilted with respect to a direction along the Z axis, and a second side surface part tilted toward the first surface or the second surface with respect to the first side surface part, and the first weight is arranged so that an outer edge part of the first weight is located at an inner side of innermost parts in the first side surface part and the second side surface part, or at the same position as the innermost parts when viewed from a direction along the Z axis. A vibrator device includes the vibrator element described above, and a package configured to house the vibrator element. A method of manufacturing a vibrator element includes a frequency adjustment method of adjusting a frequency of the vibrator element, wherein the vibrator element includes a base part, a vibrating arm which includes a first surface, a second surface at an opposite side to the first surface in a direction along a Z axis, a first side surface, a second side surface at an opposite side to the first side surface in a direction along an X axis perpendicular to the Z direction, and a third side surface located at an opposite side to the base part, and extends from the base part in a direction along a Y axis perpendicular to the Z axis and the X axis, and a first weight arranged on the second surface, at least one of the first side surface, the second side surface, and the third side surface includes a first side surface part tilted with respect to a direction along the Z axis, and a second side surface part tilted toward the first surface or the second surface with respect to the first side surface part, the first weight is arranged so that an outer edge part of the first weight is located at an inner side of innermost parts in the first side surface part and the second side surface part, or at the same position as the innermost parts when viewed from a direction along the Z axis, and the frequency adjustment method includes irradiating at least a part of the first weight with a laser beam from the first surface side in a direction along the Z axis to remove the at least a part of the first weight to thereby change an oscillation frequency of the vibrator element. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view showing a vibrator element according to Embodiment 1. FIG. 2 is a cross-sectional view along the line A-A in FIG. 1. FIG. 3 is a c