US-12622213-B1 - Cassette handle

US12622213B1US 12622213 B1US12622213 B1US 12622213B1US-12622213-B1

Abstract

A cassette handle includes a body, a first foot, and a second foot. When in a position following the application of a force to the body, the first foot and the second foot can engage a cassette for semiconductor wafers or samples. When in another position following the removal of the applied force, or absent an application of a force to the body, the first foot and the second foot are disengaged from the cassette. Recesses and/or markers on the first foot and the second foot indicate when the first foot and the second foot are correctly engaged with the cassette. Where the cassette handle includes both recesses and markers, the markers may be inset within the recesses.

Inventors

David Donovan
Tracy Flynn

Assignees

MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.

Dates

Publication Date: 20260505
Application Date: 20240318

Claims (20)

1 . A cassette handle, comprising: a body to receive a force; a first foot in communication with a first side of the body, the first foot including a first set of recesses; a second foot in communication with a second side of the body, the second foot including a second set of recesses; a first arm in communication with the first foot; a second arm in communication with the second foot; and a crossmember positioned between and in communication with the first arm and the second arm, wherein, when the force is applied to the body, the first foot and the second foot actuate between a first position and a second position, wherein, when the first foot and the second foot are in the first position, the first set of recesses and the second set of recesses are disengaged from a cassette, and wherein, when the first foot and the second foot are in the second position, the first set of recesses and the second set of recesses engage the cassette.
2 . The cassette handle of claim 1 , wherein the first set of recesses are within a first set of surfaces of the first foot, wherein the second set of recesses are within a second set of surfaces of the second foot, wherein, when the first foot and the second foot are in the first position, the first set of recesses and the second set of recesses are disengaged from a respective set of protrusions on the cassette, and wherein, when the first foot and the second foot are in the second position, the first set of recesses and the second set of recesses engage the respective set of protrusions on the cassette.
3 . The cassette handle of claim 2 , wherein the first set of recesses includes a first set of markers, wherein the second set of recesses includes a second set of markers, wherein, when the first foot and the second foot are in the first position, the first set of recesses and the second set of recesses are disengaged from the respective set of protrusions of the cassette such that the first set of markers and the second set of markers are visible, and wherein, when the first foot and the second foot are in the second position, the first set of recesses and the second set of recesses engage the respective set of protrusions of the cassette such that the first set of markers and the second set of markers are not visible.
4 . The cassette handle of claim 1 , wherein the first set of recesses are within a first sidewall of the first foot, wherein the second set of recesses are within a second sidewall of the second foot, wherein, when the first foot and the second foot are in the first position, the first set of recesses and the second set of recesses are disengaged from a respective rim on the cassette, and wherein, when the first foot and the second foot are in the second position, the first set of recesses and the second set of recesses engage the respective rim on the cassette.
5 . The cassette handle of claim 4 , wherein the first set of recesses includes a first set of markers, wherein the second set of recesses includes a second set of markers, wherein, when the first foot and the second foot are in the first position, the first set of recesses and the second set of recesses are disengaged from the respective rim of the cassette such that the first set of markers and the second set of markers are visible, and wherein, when the first foot and the second foot are in the second position, the first set of recesses and the second set of recesses engage the respective rim of the cassette such that the first set of markers and the second set of markers are not visible.
6 . The cassette handle of claim 1 , wherein a longitudinal axis is defined through the body, wherein, when the first foot and the second foot are in the first position, the first foot and the second foot are at a first distance relative to the longitudinal axis through the body, wherein, when the first foot and the second foot are in the second position, the first foot and the second foot are at a second distance relative to the longitudinal axis through the body, and wherein the first distance is greater than the second distance.
7 . The cassette handle of claim 1 , wherein the first arm, the second arm, and the crossmember at least partially define a cavity within the body.
8 . The cassette handle of claim 7 , wherein, when the force is applied to the first arm and the second arm, the crossmember flexes in response to the force applied to the first arm and the second arm, and wherein the first foot and the second foot transitions between the first position and the second position via the force applied to the first arm and the second arm.
9 . The cassette handle of claim 8 , wherein the crossmember becomes concave relative to the cavity defined within the body via the force applied to the first arm and the second arm.
10 . The cassette handle of claim 7 , wherein the body further comprises: a head coupled to the first arm and the second arm, wherein the first arm, the second arm, the crossmember, and the head define the cavity within the body, and wherein the head flexes in response to the force applied to the first arm and the second arm.
11 . The cassette handle of claim 10 , wherein the head becomes concave relative to the cavity defined within the body via the force applied to the first arm and the second arm.
12 . The cassette handle of claim 1 , further comprising: a first leg, wherein the first foot is coupled to the first side of the body via the first leg; and a second leg, wherein the second foot is coupled to the second side of the body via the second leg.
13 . A cassette handle, comprising: a body to receive a force; a first foot in communication with a first side of the body, the first foot including a first set of markers; and a second foot in communication with a second side of the body, the second foot including a second set of markers; wherein, when the force is applied to the body, the first foot and the second foot actuate between a first position and a second position, wherein, when the first foot and the second foot are in the first position, the first foot and the second foot are disengaged from a cassette such that the first set of markers and the second set of markers are visible, and wherein, when the first foot and the second foot are in the second position, the first foot and the second foot engage with the cassette such that the first set of markers and the second set of markers are not visible.
14 . The cassette handle of claim 13 , wherein the first set of markers are positioned in a first set of recesses within a first set of surfaces of the first foot, wherein the second set of markers are positioned in a second set of recesses within a second set of surfaces of the second foot, wherein, when the first foot and the second foot are in the first position, the first set of recesses and the second set of recesses are disengaged from a respective set of protrusions on the cassette such that the first set of markers and the second set of markers are visible, and wherein, when the first foot and the second foot are in the second position, the first set of recesses and the second set of recesses engage the respective set of protrusions on the cassette such that the first set of markers and the second set of markers are not visible.
15 . The cassette handle of claim 13 , wherein the first set of markers are positioned on a first set of surfaces of the first foot, wherein the second set of markers are positioned on a second set of surfaces of the second foot, wherein, when the first foot and the second foot are in the first position, the first set of surfaces and the second set of surfaces are disengaged from the cassette such that the first set of markers and the second set of markers are visible, and wherein, when the first foot and the second foot are in the second position, the first set of surfaces and the second set of surfaces engage the cassette such that the first set of markers and the second set of markers are not visible.
16 . The cassette handle of claim 13 , wherein the first set of markers are positioned in a first set of recesses within a first sidewall of the first foot, wherein the second set of markers are positioned in a second set of recesses within a second sidewall of the second foot, wherein, when the first foot and the second foot are in the first position, the first set of recesses and the second set of recesses are disengaged from a respective rim on the cassette such that the first set of markers and the second set of markers are visible, and wherein, when the first foot and the second foot are in the second position, the first set of recesses and the second set of recesses engage the respective rim on the cassette such that the first set of markers and the second set of markers are not visible.
17 . The cassette handle of claim 13 , wherein the body comprises: a first arm in communication with the first foot; a second arm in communication with the second foot; and a crossmember positioned between and in communication with the first arm and the second arm, wherein the first arm, the second arm, and the crossmember at least partially define a cavity within the body.
18 . The cassette handle of claim 17 , wherein, when the force is applied to the first arm and the second arm, the crossmember flexes in response to the force applied to the first arm and the second arm, and wherein the first foot and the second foot transitions between the first position and the second position via the force applied to the first arm and the second arm.
19 . The cassette handle of claim 18 , wherein the crossmember becomes concave relative to the cavity defined within the body via the force applied to the first arm and the second arm.
20 . The cassette handle of claim 17 , wherein the body further comprises: a head coupled to the first arm and the second arm, wherein the first arm, the second arm, the crossmember, and the head define the cavity within the body, and wherein the head flexes in response to the force applied to the first arm and the second arm.

Description

FIELD OF THE DISCLOSURE The disclosure relates to semiconductor processing and, in particular, is directed to a cassette handle for use during the processing of semiconductors. BACKGROUND The background description includes information that may be useful in understanding the present inventive subject matter. It is not an admission that any of the information provided herein is prior art or relevant to the presently claimed disclosure, or that any publication specifically or implicitly referenced is prior art. Wet chemistry procedures (or wet chemical procedures) of semiconductor wafers or samples may be used for chemical removal of material (i.e., wet etching), deposition of material (e.g., electroplating), and/or cleaning of the semiconductor wafer. Processing fluids such as acids, bases, solvents, etc. that may be used for the wet chemistry procedures can be harmful to an operator, such that contact with the processing fluids should be avoided. One option for wet chemistry procedures includes dipping or submerging a cassette that houses the semiconductor wafers or samples in a processing bath containing the fluid. Following completion of the wet chemistry procedures on the semiconductor wafers or samples, the cassette must be removed from the bath without the operator making contact with the fluid. Where the cassette is improperly secured by the operator, the possibility of the cassette slipping and causing splashing or other movement of the fluid in the direction of the operator is increased, thus increasing the risk of harm to the operator. SUMMARY As such, there exists a need for a cassette handle, and a system and method for using the same, to remove a cassette that houses semiconductor wafers or samples from a processing bath, as well as insertion of the same into the processing bath prior to the wet chemistry procedures. The cassette handle should reduce or eliminate the possibility of contact with the processing fluids in the processing bath. To accomplish this, the cassette handle should provide an indicator to the operator that the cassette handle is properly attached to the cassette. The cassette handle should additionally be able to engage with (and disengage from) the cassette easily and efficiently via the method. Embodiments of the present disclosure are directed to a cassette handle with a first leg and a second leg. The first leg and the second leg each include feet, with one or more contact points that are capable of engaging a cassette. When spread or open, each foot is able to receive (or release) one or more corresponding contact points on the cassette. When collapsed or closed, each foot is able to engage the one or more contact points on the cassette. Embodiments of the present disclosure are also directed to the cassette handle including a body that joins together the first leg and the second leg. The body includes a first arm, a second arm, a crossmember, and optionally a head that define a cavity. The head and/or the crossmember operate as a living hinge, to allow the body to flex when a force is applied to at least one of the first sidewall and the second sidewall. The flexing of the body causes the first leg and the second leg to actuate outward from (or inward toward) a longitudinal axis through the body, altering the distance between the feet by increasing the distance between each foot and the longitudinal axis. The altering of the distance causes the opening and closing of the feet. In embodiments, the cassette handle is formed from a flexible material (i.e., plastic, either with or without a central flexible core fabricated from a metal or a second, different plastic) that has sufficient elasticity to allow for the spreading and collapsing of the feet via the living hinge portions of the head and/or the crossmember. In some embodiments, the cassette handle includes aural and/or tactile indicators that inform an operator when the cassette handle is properly or correctly coupled to the cassette. For example, the indicators may include a clicking or snapping sound that occurs when the foot engages the cassette. For instance, a protrusion on the cassette may engage a recess in the foot, causing the clicking or snapping sound. It is noted that the engagement of the protrusion and the recess may be observed through a tactile sensation that transfers from the foot and through the body to the operator, where the operator is manipulating the body to cause the feet to engage the cassette. In additional embodiments, the cassette handle includes visual indicators that inform an operator when the cassette handle is properly or correctly coupled to the cassette. For example, the indicators may include markers that are differentiable from the rest of the foot (and the cassette handle, in general). The markers may be positioned on a surface of the foot, including flush on the surface of the foot. In further embodiments, the visual indicators, the aural indicators, and/or tactile indicators