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US-12623292-B2 - Coated tool

US12623292B2US 12623292 B2US12623292 B2US 12623292B2US-12623292-B2

Abstract

A coated tool of the present invention includes a base material and a hard coating film on the base material. The hard coating film is a nitride or carbonitride containing aluminum (Al) of 65 atomic % or more 90 atomic % or less, titanium (Ti) of 10 atomic % or more 35 atomic % or less, a total of aluminum (Al) and titanium (Ti) of 85 atomic % or more, and argon (Ar) of 0.20 atomic % or less. The hard coating film satisfies a relationship of Ih×100/Is≤12 when a peak intensity of a (010) plane of AlN of a hexagonal close-packed structure is Ih and a sum of peak intensities due to predetermined nine crystal planes of TiN and AlN is Is in an intensity profile obtained from a selected area diffraction pattern of a transmission electron microscope.

Inventors

  • Tomoya Sasaki
  • Kazuyuki Kubota
  • Kumar Yalamanchili
  • Denis Kurapov
  • Wolfgang Kalss

Assignees

  • MOLDINO TOOL ENGINEERING, LTD.
  • OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON

Dates

Publication Date
20260512
Application Date
20210219
Priority Date
20200221

Claims (16)

  1. 1 . A coated tool comprising: a base material; and a hard coating film on the base material, wherein the hard coating film is a nitride or carbonitride which contains aluminum (Al) of 70 atomic % or more and 90 atomic % or less and titanium (Ti) of 10 atomic % or more and 30 atomic % or less with respect to a total amount of metal (including metalloid) elements, a total of aluminum (Al) and titanium (Ti) of 85 atomic % or more, and argon (Ar) of 0.20 atomic % or less with respect to a total amount of metal (including metalloid) elements and non-metal elements, and wherein no peak intensity of AlN having a hexagonal close packed structure is detected in the X-ray diffraction of the hard coating, and the hard coating film satisfies a relationship of Ih×100/Is≤12 when a peak intensity due to a (010) plane of AlN of a hexagonal close-packed structure is Ih and a sum of a peak intensity due to a (111) plane of AlN, a (111) plane of TiN, a (200) plane of AlN, a (200) plane of TiN, a (220) plane of AlN, and a (220) plane of TiN of a face-centered cubic structure and a peak intensity due to a (010) plane of AlN, a (011) plane of AlN, and a (110) plane of AlN of a hexagonal close-packed structure is Is in an intensity profile obtained from a selected area diffraction pattern of a transmission electron microscope.
  2. 2 . The coated tool according to claim 1 , wherein the hard coating film has a structure having a region mainly composed of relatively coarse particles and a region mainly composed of relatively fine particles.
  3. 3 . The coated tool according to claim 2 , wherein an average crystal grain size of the region mainly composed of the relatively coarse particles is 1.2 times or more and 4.0 times or less the average crystal grain size of the region mainly composed of the relatively fine particles.
  4. 4 . The coated tool according to claim 3 , wherein the value of Ih×100/Is is 0 or more and 8 or less in the region mainly composed of the relatively coarse particles and the value of Ih×100/Is is 4 or more and 12 or less in the region mainly composed of the relatively fine particles.
  5. 5 . The coated tool according to claim 1 , wherein the hard coating film is provided directly above the base material.
  6. 6 . The coated tool according to claim 1 , wherein the hard coating film has a nanoindentation hardness of 30 GPa or more and an elastic modulus of 500 GPa or more.
  7. 7 . The coated tool according to claim 2 , wherein the hard coating film is provided directly above the base material.
  8. 8 . The coated tool according to claim 3 , wherein the hard coating film is provided directly above the base material.
  9. 9 . The coated tool according to claim 4 , wherein the hard coating film is provided directly above the base material.
  10. 10 . The coated tool according to claim 2 , wherein the hard coating film has a nanoindentation hardness of 30 GPa or more and an elastic modulus of 500 GPa or more.
  11. 11 . The coated tool according to claim 3 , wherein the hard coating film has a nanoindentation hardness of 30 GPa or more and an elastic modulus of 500 GPa or more.
  12. 12 . The coated tool according to claim 4 , wherein the hard coating film has a nanoindentation hardness of 30 GPa or more and an elastic modulus of 500 GPa or more.
  13. 13 . The coated tool according to claim 5 , wherein the hard coating film has a nanoindentation hardness of 30 GPa or more and an elastic modulus of 500 GPa or more.
  14. 14 . The coated tool according to claim 7 , wherein the hard coating film has a nanoindentation hardness of 30 GPa or more and an elastic modulus of 500 GPa or more.
  15. 15 . The coated tool according to claim 8 , wherein the hard coating film has a nanoindentation hardness of 30 GPa or more and an elastic modulus of 500 GPa or more.
  16. 16 . The coated tool according to claim 9 , wherein the hard coating film has a nanoindentation hardness of 30 GPa or more and an elastic modulus of 500 GPa or more.

Description

TECHNICAL FIELD The present invention relates to a coated tool applied to a tool such as a mold or a cutting tool. Priority is claimed on Japanese Patent Application No. 2020-028679, filed Feb. 21, 2020, the content of which is incorporated herein by reference. BACKGROUND ART Al and Ti nitride or carbonitride (hereinafter, referred to as AlTiN or AlTiCN) are film types with excellent wear resistance and heat resistance, and are widely applied to coated molds and coated cutting tools. Generally, in AlTiN and AlTiCN, when an Al content ratio increases, AlN of a fragile hexagonal close-packed structure (hereinafter, also referred to as hcp structure) increases. When the AlN of the hcp structure increases, the hardness of the hard coating film decreases and the tool performance decreases (Patent Document 1). In AlTiN or AlTiCN, even when only a peak intensity of a face-centered cubic structure (hereinafter, referred to as an fee structure) is measured by X-ray diffraction, a microstructure may contain AlN having an hcp structure. Under harsh usage environments such as increasing the hardness and the cutting speed of the work material, the tool performance tends to deteriorate due to an increase in AlN of the hcp structure contained in the microstructure of the hard coating film. In response to such problems, as a coated cutting tool suitable for cutting high-hardness steel, the applicant of the present application provides a coated cutting tool in which Al-rich AlTiN or AlTiCN with reduced hcp-structure AlN contained in a microstructure is provided on an intermediate film formed by titanium bombardment (Patent Document 2). In specific examples of Patent Documents 1 and 2, an arc ion plating method is applied among physical vapor deposition methods. The physical vapor deposition method is mainly applied to coated cutting tools for milling in order to apply residual compressive stress to a hard coating film to improve fracture resistance. Among the physical vapor deposition methods, the arc ion plating method is widely used because a target ionization rate is high and a hard coating film having excellent adhesion to a base material can be obtained. In the arc ion plating method, since the target component is evaporated and coated by arc discharge, the hard coating film inevitably contains a large amount of droplets of several micrometers. On the other hand, since the sputtering method in which the target component is sputtered with argon gas and coated is less likely to generate droplets among the physical vapor deposition methods, a smooth hard coating film can be obtained. However, in the sputtering method, the ionization rate of the target is lower than that in the arc ion plating method, so that voids are easily formed inside the hard coating film and the adhesion between the hard coating film and the base material is poor. Therefore, in general, the hard coating film coated by the sputtering method tends to have lower durability than the hard coating film coated by the arc ion plating method. For small-diameter tools, the influence of droplets present on the surface of the hard coating film is large with respect to the tool diameter. Therefore, if the hard coating film having excellent durability can be coated by the sputtering method, further improvement in tool performance is expected in a small-diameter tool such as a small-diameter end mill having a tool diameter of 3 mm or less and further 2 mm or less. In recent years, in order to increase the ionization rate of a target, a coated cutting tool coated with AlTiN by a high-power sputtering method in which electric power applied to the target is instantaneously increased has begun to be proposed (Patent Documents 3 to 5). Patent Document 6 shows that Al-rich AlTiN coated by a high-power sputtering method has an fcc structure by X-ray diffraction. CITATION LIST Patent Document [Patent Document 1] Japanese Unexamined Patent Application No. Hei8-209333 [Patent Document 2] International Publication No. 2014/157688 [Patent Document 3] Japanese Unexamined Patent Application No. 2011-189419 [Patent Document 4] Japanese Unexamined Patent Application No. 2013-202700 [Patent Document 5] International Publication No. 2017/170536 [Patent Document 6] International Publication No. 2019/48507 SUMMARY OF INVENTION Technical Problem Regarding Al-rich AlTiN coated by the sputtering method, reducing the inevitably contained argon and the AlN of the hcp structure contained in the microstructure has not been sufficiently studied, and there is room for improvement in the durability of the coated tool. In view of the above-described circumstances, an object of the present invention is to reduce defects contained in a hard coating film mainly composed of Al-rich AlTiN or AlTiCN and coated by a sputtering method and to improve durability of a coated tool. Solution to Problem According to the present invention, provided is a coated tool including: a base material; and a hard