US-12625102-B2 - Resistance measuring apparatus and resistance measuring method based on the same

US12625102B2US 12625102 B2US12625102 B2US 12625102B2US-12625102-B2

Abstract

A method of measuring resistance of a specimen including a specimen electrode includes forming a center electrode and an edge electrode in at least a partial region on an upper surface of the specimen, transmitting, by a power supply, current to the specimen electrode, the center electrode, and the edge electrode, measuring, by an ammeter, the current flowing between the specimen electrode and the center electrode, and removing the center electrode and the edge electrode from the upper surface of the specimen.

Inventors

Kiryong Lee

Assignees

SEMES CO., LTD.

Dates

Publication Date: 20260512
Application Date: 20231106
Priority Date: 20221107

Claims (20)

1 . A method of measuring resistance of a specimen comprising a specimen electrode embedded within the specimen electrode, the method comprising: forming a center electrode and an edge electrode in at least a partial region on an upper surface of the specimen; transmitting, by a power supply, current to the specimen electrode, the center electrode, and the edge electrode; measuring, by an ammeter, the current flowing between the specimen electrode and the center electrode; and a step of removing electrodes from the specimen comprising removing only the center electrode and the edge electrode from the upper surface of the specimen without removing the specimen electrode from the specimen.
2 . The method of claim 1 , wherein the forming of the center electrode and the edge electrode includes attaching a mask including an electrode pattern to the upper surface of the specimen, and forming the center electrode and the edge electrode on the electrode pattern.
3 . The method of claim 2 , wherein the forming of the center electrode and the edge electrode includes applying a liquid electrode to the electrode pattern.
4 . The method of claim 1 , wherein a sum of an area of the center electrode and an area of the edge electrode is smaller than an area of the specimen electrode, and the measuring of the current includes measuring the current flowing through the specimen located between the center electrode and the specimen electrode.
5 . The method of claim 1 , wherein resistance of the center electrode is about 1000 ohms to about 2000 ohms, and resistance of the edge electrode is about 1000 ohms to about 2000 ohms.
6 . The method of claim 1 , wherein, in the forming of the center electrode and the edge electrode, the center electrode is formed in a circular shape, and the edge electrode has a ring shape and is formed to surround the center electrode.
7 . The method of claim 1 , wherein a state of the specimen before forming the center electrode and the edge electrode is a start state, and a state of the specimen after removing the center electrode and the edge electrode is an end state, and the start state of the specimen and the end state of the specimen are the same.
8 . The method of claim 1 , wherein the removing of the center electrode and the edge electrode includes spraying an alkaline liquid or an alcohol liquid onto the specimen.
9 . The method of claim 1 , wherein the specimen includes a ceramic electrostatic chuck or a ceramic heater.
10 . A resistance measuring apparatus of a specimen comprising a specimen electrode embedded within the specimen, the resistance measuring apparatus comprising: a center electrode and an edge electrode configured to be detachable from an upper surface of the specimen; a power supply configured to supply power to the specimen electrode, the center electrode, and the edge electrode; and an ammeter configured to measure current between the specimen, the specimen electrode embedded within the specimen, and the center electrode, wherein the edge electrode is spaced apart from the center electrode and surrounds the center electrode.
11 . The resistance measuring apparatus of claim 10 , wherein a thickness of the center electrode is about 10 μm to about 800 μm, and a thickness of the edge electrode is about 10 μm to about 800 μm.
12 . The resistance measuring apparatus of claim 10 , wherein an upper surface of the center electrode is a circular shape, and an upper surface of the edge electrode is ring-shaped.
13 . The resistance measuring apparatus of claim 12 , wherein a diameter of the upper surface of the center electrode is about 40 mm to about 55 mm.
14 . The resistance measuring apparatus of claim 10 , wherein an area of an upper surface of the center electrode is smaller than an area of the upper surface of the specimen.
15 . The resistance measuring apparatus of claim 10 , wherein an area of the specimen electrode is greater than a sum of an area of the center electrode and an area of the edge electrode.
16 . The resistance measuring apparatus of claim 10 , wherein resistance of the center electrode is about 1000 ohms to about 2000 ohms, and resistance of the edge electrode is about 1000 ohms to about 2000 ohms.
17 . The resistance measuring apparatus of claim 10 , wherein the center electrode and the edge electrode include at least one of a liquid electrode and a conductive rubber.
18 . The resistance measuring apparatus of claim 10 , wherein the power supply includes a high voltage direct current (HVDC) transmission system.
19 . The resistance measuring apparatus of claim 10 , wherein the specimen is a ceramic electrostatic chuck or a ceramic heater.
20 . A resistance measuring apparatus of a ceramic specimen comprising a specimen electrode embedded within the specimen, the resistance measuring apparatus comprising: a center electrode and an edge electrode configured to be detachable from an upper surface of the specimen and formed by applying a liquid electrode in a spray manner, wherein, when attached to the upper surface of the specimen, electrode materials making up the center electrode and the edge electrode are in direct contact with the upper surface of the specimen; a power supply configured to supply power to the specimen electrode, the center electrode, and the edge electrode; and an ammeter configured to measure current between the specimen and the center electrode, wherein the ceramic specimen comprises a ceramic electrostatic chuck or a ceramic heater, an area of an upper surface of the center electrode is smaller than an area of the upper surface of the specimen, and the edge electrode is spaced apart from the center electrode and surrounds the center electrode.

Description

CROSS-REFERENCE TO RELATED APPLICATION This application is based on and claims priority under 35 U.S.C. § 119 to Korean Patent Application No. 10-2022-0147374, filed on Nov. 7, 2022, in the Korean Intellectual Property Office, the disclosure of which is incorporated by reference herein in its entirety. BACKGROUND 1. Field The disclosure relates to a resistance measuring apparatus and a resistance measuring method based on the same. 2. Description of the Related Art Semiconductor devices may be generally manufactured through various processes such as an oxidation process, a photo process, an etching process, and a deposition process. An electrostatic chuck or heater configured to support a substrate in various processes in a semiconductor manufacturing facility may be provided. As the degree of integration of semiconductor devices increases, the importance of fine patterning increases. During substrate processing, when substrate support is unstable or temperature heating is non-uniform, it may be difficult to form fine patterns, and thus, a high quality electrostatic chuck or heater is required. SUMMARY The disclosure provides a resistance measuring apparatus capable of measuring the volume resistance of a specimen without destroying the specimen and a resistance measuring method based on the resistance measuring apparatus. The disclosure also provides a resistance measuring apparatus capable of measuring the volume resistance of a part of a specimen and a resistance measuring method based on the resistance measuring apparatus. In addition, the problem to be solved by the technical spirit of the disclosure is not limited to the above-mentioned problems, and other problems may be clearly understood by those skilled in the art from the description below. Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented embodiments of the disclosure. According to an aspect to the disclosure, a method of measuring resistance of a specimen including a specimen electrode includes forming a center electrode and an edge electrode in at least a partial region on an upper surface of the specimen, transmitting, by a power supply, current to the specimen electrode, the center electrode, and the edge electrode, measuring, by an ammeter, the current flowing between the specimen electrode and the center electrode, and removing the center electrode and the edge electrode from the upper surface of the specimen. According to an aspect to the disclosure, a resistance measuring apparatus of a specimen including a specimen electrode includes a center electrode and an edge electrode configured to be detachable from an upper surface of the specimen, a power supply configured to supply power to the specimen electrode, the center electrode, and the edge electrode, and an ammeter configured to measure current between the specimen and the center electrode, wherein the edge electrode is spaced apart from the center electrode and surrounds the center electrode. According to an aspect to the disclosure, a resistance measuring apparatus of a ceramic specimen including a specimen electrode includes a center electrode and an edge electrode configured to be detachable from an upper surface of the specimen and formed by applying a liquid electrode in a spray manner, a power supply configured to supply power to the specimen electrode, the center electrode, and the edge electrode, and an ammeter configured to measure current between the specimen and the center electrode, wherein the ceramic specimen includes a ceramic electrostatic chuck or a ceramic heater, an area of an upper surface of the center electrode is smaller than an area of the upper surface of the specimen, and the edge electrode is spaced apart from the center electrode and surrounds the center electrode. BRIEF DESCRIPTION OF THE DRAWINGS The above and other aspects, features, and advantages of certain embodiments of the disclosure will be more apparent from the following description taken in conjunction with the accompanying drawings, in which: FIG. 1 is a structure schematically illustrating a resistance measuring apparatus according to an embodiment; FIG. 2 is a plan view schematically illustrating the resistance measuring apparatus of FIG. 1; FIG. 3 is a structure schematically illustrating a resistance measuring apparatus according to an embodiment; FIG. 4 is a flowchart illustrating a resistance measuring method according to an embodiment; FIG. 5 is a flowchart illustrating a resistance measuring method according to an embodiment; FIG. 6 is a flowchart illustrating a resistance measuring method according to an embodiment; and FIGS. 7A to 7F are cross-sectional views sequentially illustrating a resistance measuring method according to an embodiment. DETAILED DESCRIPTION Reference will now be made in detail to embodiments, examples of which are illustrated in the acc