Search

US-12625113-B2 - Ultrasonic transducing module and ultrasonic probe

US12625113B2US 12625113 B2US12625113 B2US 12625113B2US-12625113-B2

Abstract

An ultrasonic transducing module, including a base, a piezoelectric ultrasonic transducer, and a micromachined ultrasonic transducer, is provided. The piezoelectric ultrasonic transducer is disposed on the base. The micromachined ultrasonic transducer is disposed on the piezoelectric ultrasonic transducer. The piezoelectric ultrasonic transducer is disposed between the base and the micromachined ultrasonic transducer. An ultrasonic wave emitted by the piezoelectric ultrasonic transducer penetrates the micromachined ultrasonic transducer and is then transmitted to the outside. An ultrasonic probe is also provided.

Inventors

  • Fu-Sheng Jiang

Assignees

  • QISDA CORPORATION

Dates

Publication Date
20260512
Application Date
20230324
Priority Date
20220714

Claims (20)

  1. 1 . An ultrasonic transducing module, comprising: a base; a piezoelectric ultrasonic transducer, disposed on the base; and a micromachined ultrasonic transducer, disposed on the piezoelectric ultrasonic transducer, wherein the piezoelectric ultrasonic transducer is disposed between the base and the micromachined ultrasonic transducer, and an ultrasonic wave emitted by the piezoelectric ultrasonic transducer penetrates the micromachined ultrasonic transducer and is then transmitted to an outside.
  2. 2 . The ultrasonic transducing module according to claim 1 , wherein the micromachined ultrasonic transducer is a capacitive micromachined ultrasonic transducer or a piezoelectric micromachined ultrasonic transducer.
  3. 3 . The ultrasonic transducing module according to claim 1 , wherein the piezoelectric ultrasonic transducer is a lead zirconium titanate or single crystal ultrasonic transducer.
  4. 4 . The ultrasonic transducing module according to claim 1 , wherein the micromachined ultrasonic transducer is a thin-film micromachined ultrasonic transducer.
  5. 5 . The ultrasonic transducing module according to claim 4 , wherein a thickness of the thin-film micromachined ultrasonic transducer falls within a range of 1 micron to 10 microns.
  6. 6 . The ultrasonic transducing module according to claim 4 , wherein the micromachined ultrasonic transducer is flexible.
  7. 7 . The ultrasonic transducing module according to claim 1 , wherein the piezoelectric ultrasonic transducer is in a sheet shape.
  8. 8 . The ultrasonic transducing module according to claim 1 , wherein the piezoelectric ultrasonic transducer is curved.
  9. 9 . The ultrasonic transducing module according to claim 1 , further comprising a controller electrically connected to the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer, wherein the controller is used to command the piezoelectric ultrasonic transducer to emit the ultrasonic wave, the ultrasonic wave penetrates the micromachined ultrasonic transducer to be transmitted to a test object, the test object reflects the ultrasonic wave into a reflected wave, and the micromachined ultrasonic transducer receives the reflected wave.
  10. 10 . The ultrasonic transducing module according to claim 1 , further comprising a controller electrically connected to the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer, wherein the controller is used to command the piezoelectric ultrasonic transducer to emit a first ultrasonic wave, the first ultrasonic wave penetrates the micromachined ultrasonic transducer to be transmitted to a test object, the test object reflects the first ultrasonic wave into a first reflected wave, the piezoelectric ultrasonic transducer receives the first reflected wave, the controller is used to command the micromachined ultrasonic transducer to emit a second ultrasonic wave, the second ultrasonic wave is transmitted to the test object, the test object reflects the second ultrasonic wave into a second reflected wave, and the micromachined ultrasonic transducer receives the second reflected wave.
  11. 11 . The ultrasonic transducing module according to claim 1 , further comprising a controller electrically connected to the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer, wherein the controller is used to command the piezoelectric ultrasonic transducer to emit a first ultrasonic wave, the first ultrasonic wave penetrates the micromachined ultrasonic transducer to be transmitted to a test object, the controller is used to command the micromachined ultrasonic transducer to emit a second ultrasonic wave, the second ultrasonic wave is transmitted to the test object, the test object reflects the second ultrasonic wave into a reflected wave, and the micromachined ultrasonic transducer receives the reflected wave.
  12. 12 . The ultrasonic transducing module according to claim 1 , further comprising a matching layer disposed between the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer.
  13. 13 . An ultrasonic probe, comprising: a hand grip, having a first end and a second end; a piezoelectric ultrasonic transducer, disposed on the first end of the hand grip; and a micromachined ultrasonic transducer, disposed on the piezoelectric ultrasonic transducer, wherein an ultrasonic wave emitted by one of the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer closer to the second end penetrates other one of the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer further away from the second end and is then transmitted to an outside.
  14. 14 . The ultrasonic probe according to claim 13 , wherein the micromachined ultrasonic transducer is a capacitive micromachined ultrasonic transducer or a piezoelectric micromachined ultrasonic transducer.
  15. 15 . The ultrasonic probe according to claim 13 , wherein the micromachined ultrasonic transducer is a thin-film micromachined ultrasonic transducer.
  16. 16 . The ultrasonic probe according to claim 13 , wherein the micromachined ultrasonic transducer is flexible.
  17. 17 . The ultrasonic probe according to claim 13 , wherein the piezoelectric ultrasonic transducer is curved.
  18. 18 . The ultrasonic transducer according to claim 13 , wherein the piezoelectric ultrasonic transducer is disposed between the hand grip and the micromachined ultrasonic transducer.
  19. 19 . The ultrasonic probe according to claim 18 , further comprising a controller electrically connected to the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer, wherein the controller is used to command the piezoelectric ultrasonic transducer to emit the ultrasonic wave, the ultrasonic wave penetrates the micromachined ultrasonic transducer to be transmitted to a test object, the test object reflects the ultrasonic wave into a reflected wave, and the micromachined ultrasonic transducer receives the reflected wave.
  20. 20 . The ultrasonic probe according to claim 13 , further comprising a matching layer disposed between the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer.

Description

CROSS-REFERENCE TO RELATED APPLICATION This application claims the priority benefit of China application serial no. 202210831440.6, filed on Jul. 14, 2022. The entirety of the above-mentioned patent application is hereby incorporated by reference herein and made a part of this specification. BACKGROUND Technical Field The disclosure relates to a transducer and a probe, and in particular to an ultrasonic transducing module and an ultrasonic probe. Description of Related Art The ultrasonic transducer is a transducer that converts sound energy and electrical energy within the ultrasonic frequency range. The ultrasonic transducer may be mainly divided into three types, 1. transmitter; 2. receiver; and 3. transceiver transducer. The transducer for launching an ultrasonic wave is referred to as the transmitter. When in a transmitting state, the transducer converts electrical energy into mechanical energy and then into sound energy. The transducer for receiving a sound wave is referred to as the receiver. When in a receiving state, the transducer converts sound energy into mechanical energy and then into electrical energy. In some cases, the transducer may be used as both the transmitter and the receiver, and is referred to as the transceiver transducer. The transceiver transducer is the core content of ultrasonic technology and one of the key technologies, and is widely applied in fields such as non-destructive testing, medical imaging, ultrasonic microscope, fingerprint recognition, and the Internet of Things. When the traditional ultrasonic transducer detects a human body, the frequency and the resolution of the ultrasonic wave used are different in response to the requirements of different tissues or parts to be detected (for example, the heart, carotid artery, abdomen, etc.). At this time, whenever ultrasonic image detection is performed on a different part, a different ultrasonic transducer often needs to be replaced, which causes inconvenience in use and increases costs of equipment. SUMMARY The disclosure provides an ultrasonic transducing module, which has a wide range of functions. The disclosure provides an ultrasonic probe, which has a wide range of functions. An embodiment of the disclosure provides an ultrasonic transducing module, which includes a base, a piezoelectric ultrasonic transducer, and a micromachined ultrasonic transducer. The piezoelectric ultrasonic transducer is disposed on the base, and the micromachined ultrasonic transducer is disposed on the piezoelectric ultrasonic transducer. The piezoelectric ultrasonic transducer is disposed between the base and the micromachined ultrasonic transducer, and an ultrasonic wave emitted by the piezoelectric ultrasonic transducer penetrates the micromachined ultrasonic transducer and is then transmitted to an outside. An embodiment of the disclosure provides an ultrasonic probe, which includes a hand grip, a piezoelectric ultrasonic transducer, and a micromachined ultrasonic transducer. The hand grip has a first end and a second end, the piezoelectric ultrasonic transducer is disposed on the first end of the hand grip, and the micromachined ultrasonic transducer is disposed on the piezoelectric ultrasonic transducer. An ultrasonic wave emitted by one of the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer closer to the second end penetrates other one of the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer farther away from the second end and is then transmitted to an outside. In the ultrasonic transducing module and the ultrasonic probe of the embodiments of the disclosure, the stacked piezoelectric ultrasonic transducer and micromachined ultrasonic transducer are adopted, and the piezoelectric ultrasonic transducer and the micromachined ultrasonic transducer may be used for sensing or outputting different ultrasonic waves. Therefore, the ultrasonic transducing module and the ultrasonic probe of the embodiments of the disclosure have a wide range of functions. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded schematic view of an ultrasonic probe according to an embodiment of the disclosure. FIG. 2A is a cross-sectional schematic view of an ultrasonic transducing module in FIG. 1 according to an embodiment. FIG. 2B is a cross-sectional schematic view of another application mode of the ultrasonic transducing module of FIG. 2A. FIG. 2C is a cross-sectional schematic view of yet another application mode of the ultrasonic transducing module of FIG. 2A. FIG. 3 is a cross-sectional schematic view of an ultrasonic transducing module according to another embodiment of the disclosure. DETAILED DESCRIPTION OF DISCLOSED EMBODIMENTS FIG. 1 is an exploded schematic view of an ultrasonic probe according to an embodiment of the disclosure, and FIG. 2A is a cross-sectional schematic view of an ultrasonic transducing module in FIG. 1 according to an embodiment, wherein a base of the ultrasonic trans