US-12625164-B2 - Probe device, probe system including the probe device and operating method thereof

US12625164B2US 12625164 B2US12625164 B2US 12625164B2US-12625164-B2

Abstract

The present disclosure provides a probe device, a probe system including the probe device and an operating thereof. The operating method includes: approaching the probe device to a reference region; stopping the probe device when a first pin of a sensing module of the probe device touches the reference region; rotating the probe device and approaching the probe device to the reference region; and stopping the probe device when both the first pin and a second pin of the sensing module of the probe device touch the reference region.

Inventors

Choon Leong Lou
Ho-Yeh Chen
Hsiao-Hui Hsieh
DAI-CHUN CHEN

Assignees

STAR TECHNOLOGIES, INC.

Dates

Publication Date: 20260512
Application Date: 20230531

Claims (9)

1 . A probe device, comprising: a body; an optical probe disposed on the body; and a sensing module disposed on the body, comprising at least a first pin, a second pin, and a third pin to adjust two relative orientations between the optical probe and a reference region, wherein the first pin and the second pin are configured to adjust a first relative orientation of the two relative orientations, wherein the second pin and the third pin are configured to adjust a second relative orientation of the two relative orientations.
2 . The probe device of claim 1 , wherein the first pin and the second are arranged along a first axis.
3 . The probe device of claim 2 , wherein the first pin and the second pin are configured to adjust the first relative orientation by: rotating the probe device until both the first pin and the second pin touch the reference region.
4 . The probe device of claim 2 , wherein the second pin and the third pin are arranged along a second axis which is perpendicular to the first axis.
5 . The probe device of claim 4 , wherein the second pin and the third pin are configured to adjust the second relative orientation by: rotating the probe device until both the second pin and the third pin touch the reference region.
6 . The probe device of claim 1 , wherein the sensing module further comprise a fourth pin, a circuit is between the fourth pin and one of the first pin, the second pin and the third pin, and whether the probe device moves toward a DUT depends on a status of the circuit is open or short.
7 . The probe device of claim 1 , wherein the optical probe includes a fiber array block.
8 . The probe device of claim 1 , wherein the reference region is an auxiliary chuck or a testkey of scribe line of a device under test.
9 . A probe system, comprising: a frame; a probe device, assembled with the frame and comprising: a body; and an optical probe disposed on the body; and a sensing module disposed on the body or the frame, comprising at least a first pin, a second pin, and a third pin to adjust two relative orientations between the optical probe and a reference region, wherein the first pin and the second pin are configured to adjust a first relative orientation of the two relative orientations, wherein the second pin and the third pin are configured to adjust a second relative orientation of the two relative orientations.

Description

CROSS REFERENCE TO RELATED APPLICATION This application claims priority of U.S. provisional application No. 63/350,616 filed on Jun. 9, 2022, which is incorporated by reference in its entirety. TECHNICAL FIELD The present disclosure relates to a probe device, a probe system including the probe device and operating method thereof and, more particularly, to a probe device with optical probe, a probe system including the probe device and operating method of aligning the optical probe to a device under test. DISCUSSION OF THE BACKGROUND According to prior art, optical probes receive lights from light transmission devices of a device under test (DUT) to fulfill specific testing purposes. Before receiving lights from light transmission devices of the DUT, the optical probes need to be aligned to light transmission devices of the DUT. However, the alignment between the optical probes and the light transmission devices is usually operated manually so that controlling the precision of the alignment is difficult and the results of testing are inaccurate. The above description of the prior art merely serves to reveal background technology but is not intended to acknowledge that the above description of the prior art discloses the subject matters of the disclosure, is intended to constitute the prior art of the disclosure, or is intended to be any part of the disclosure. SUMMARY An embodiment of the disclosure provides a method for operating a probe device. The method includes: approaching the probe device to a reference region; stopping the probe device when a first pin of a sensing module of the probe device touches the reference region; rotating the probe device and approaching the probe device to the reference region; stopping the probe device when both the first pin and a second pin of the sensing module of the probe device touch the reference region; rotating the probe device about a second axis and approaching the probe device to the reference region; and stopping the probe device when the first pin, the second pin and a third pin of the sensing module of the probe device touch the reference region. Another embodiment of the disclosure provides a probe device. The probe device includes a body, an optical probe and a sensing module. The optical probe is disposed on the body. The sensing module is disposed on the body and includes at least a first pin, a second pin, and a third pin to adjust two relative orientations between the optical probe and a reference region. The first pin and the second pin are configured to adjust a first relative orientation of the two relative orientations. The second pin and the third pin are configured to adjust a second relative orientation of the two relative orientations. Another embodiment of the disclosure provides a probe system. The probe system includes a frame, a probe device and a sensing module. The frame and the probe device are assembled. The probe device includes a body and an optical probe. The optical probe is disposed on the body. The sensing module is disposed on the body or the frame and includes at least a first pin, a second pin, and a third pin to adjust two relative orientations between the optical probe and a reference region. The first pin and the second pin are configured to adjust a first relative orientation of the two relative orientations. The second pin and the third pin are configured to adjust a second relative orientation of the two relative orientations. The above description extensively explains the technical features and advantages of the disclosure to render the detailed description below comprehensible. The other advantages and technical features which define the claims of the disclosure are described below. Persons skilled in the art understand that objectives identical to the ones of the disclosure can be easily achieved by changing or designing the other structures or processes in accordance with concepts and specific embodiments disclosed hereunder. Persons skilled in the art also understand that the aforesaid equivalent construction cannot depart from the spirit and scope of the appended claims of the disclosure. BRIEF DESCRIPTION OF THE DRAWINGS Persons skilled in the art can gain insight into the disclosure by referring to the embodiments, claims and drawings of the disclosure. In the drawings, like components are denoted by like reference numerals. FIG. 1A is a schematic view of a probe system according to some embodiments of the disclosure. FIG. 1B is a schematic view of a probe device according to some embodiments of the disclosure. FIGS. 1C to 1H illustrate adjustment of the relative orientation between an optical probe and a reference region according to some embodiments of the disclosure. FIG. 1I illustrates the relative movement between the probe device and a DUT according to some embodiments of the disclosure. FIGS. 1J to 1L illustrate adjustment of the relative position between the optical probe and the DUT according to some embod