US-12625435-B2 - Reticle storage cabinet system and method using the same

US12625435B2US 12625435 B2US12625435 B2US 12625435B2US-12625435-B2

Abstract

The present invention discloses a reticle storage pod including an outer pod which includes an outer cover and an outer base. The outer cover and the outer base can be coupled to securely accommodate one of a first inner pod and a second inner pod that are differently structured in the outer pod. The first inner pod and the second inner pod are for individually accommodating a reticle. The outer cover is provided with at least one first hold-down mechanism and at least one second hold-down mechanism, and the first hold-down mechanism and the second hold-down mechanism respectively act on a cover of the first inner pod and a cover of the second inner pod that are differently structured.

Inventors

Ming-Chien Chiu
Chia-Ho CHUANG
Hsin-Min Hsueh
Hsing-Min Wen

Assignees

GUDENG PRECISION INDUSTRIAL CO., LTD.

Dates

Publication Date: 20260512
Application Date: 20231120

Claims (19)

1 . A reticle storage cabinet system, comprising: a storage cabinet, including multiple storage racks, each of the multiple storage racks being adapted for carrying a dedicated reticle storage pod; and a mechanical arm, configured to cooperate with the storage cabinet to move said dedicated reticle storage pod; wherein said dedicated reticle storage pod is dedicated for storage and movement within the storage cabinet; wherein the storage cabinet includes a buffer zone which is configured for placement of one or more cleaned or used dedicated reticle storage pods; wherein each of the multiple storage racks is a tablet rack having a front end and a rear end, the front end of the storage rack has a notch configured to cooperate with a front end of the mechanical arm, the rear end of the storage rack has a stop portion configured to restrict one side of said dedicated reticle storage pod, and the stop portion has an identifiable information configured to be read during an interaction between a front end of the mechanical arm and the storage rack.
2 . The reticle storage cabinet system according to claim 1 , further comprising: a port, configured to connect with a reticle loading system.
3 . The reticle storage cabinet system according to claim 1 , further comprising: a cleaning device, configured to be adjacent the buffer zone.
4 . The reticle storage cabinet system according to claim 1 , further comprising: a management means, configured to manage reticle information and detect the temperature and humidity of the storage cabinet.
5 . The reticle storage cabinet system according to claim 1 , further comprising: a gas control means configured to control a supply of non-reactive gas to said storage rack.
6 . A reticle storage cabinet system, adapted to store one or more dedicated reticle storage pod, the system comprising: a storage rack, configured to carry a dedicated reticle storage pod, and being a tablet rack having a front end and a rear end; wherein the front end of the storage rack has a notch configured to cooperate with a front end of a mechanical arm; wherein the rear end of the storage rack has a stop portion configured to restrict one side of said dedicated reticle storage pod, and the stop portion has an identifiable information configured to be read during an interaction between a front end of the mechanical arm and the storage rack.
7 . The reticle storage cabinet system according to claim 6 , wherein an upward surface of the storage rack has multiple coupling pins for coupling a bottom of said dedicated reticle storage pod so as to position said dedicated reticle storage pod on the storage rack.
8 . The reticle storage cabinet system according to claim 6 , wherein an upward surface of the storage rack has multiple nozzles for connecting with a bottom of said dedicated reticle storage pod so as to supply a non-reactive gas to said dedicated reticle storage pod.
9 . The reticle storage cabinet system according to claim 7 , wherein the storage rack has a pair of connection arms, and the storage rack is positioned in a space via the pair of connection arms.
10 . A reticle storage cabinet system, adapted to store one or more dedicated reticle storage pod which is a single pod, the system comprising: a storage chamber, being a pod having an opening for accommodating a single pod composed of a cover and a base; wherein an upward surface of the storage chamber has multiple kinematic coupling pins; wherein the storage chamber has multiple connectors for connecting the storage chamber to a non-reactive gas source.
11 . The reticle storage cabinet system according to claim 10 , wherein the opening of the storage chamber is provided with a gate operable with a front end of a mechanical arm to open, and when the gate is opened, the storage chamber allows an access of a grasp mechanism of the mechanical arm to the single pod accommodated therein.
12 . The reticle storage cabinet system according to claim 11 , wherein the gate has a plate operable with the front end of the mechanical arm to open the gate, and when the gate is opened, the storage chamber allows the access of the grasp mechanism of the mechanical arm to the single pod accommodated therein.
13 . A method for loading reticle, comprising: providing a reticle storage cabinet system having a storage cabinet including a plurality of storage racks adapted to store one or more dedicated reticle storage pods, said dedicated reticle storage pod dedicated for the storage and movement in the storage cabinet; retrieving, by a mechanical arm, an empty dedicated reticle storage pod from one of the plurality of storage racks of the storage cabinet, and moving the empty dedicated reticle storage pod out of the reticle storage cabinet system, such that the empty dedicated reticle storage pod outside the system receives a reticle; and receiving and storing, by the mechanical arm, the dedicated reticle storage pod with the reticle contained therein to a vacant spot of the storage cabinet; wherein one of the plurality of storage racks is a tablet rack or a storage chamber; wherein the storage rack being the tablet rack has a front end and a rear end, the front end of the storage rack has a notch configured to cooperate with a front end of the mechanical arm, the rear end of the storage rack has a stop portion configured to restrict one side of said dedicated reticle storage pod, and the stop portion has an identifiable information which is readable during an interaction between the front end of the mechanical arm and the storage rack; wherein the storage rack being the storage chamber has a gate which is operatable by the mechanical arm during another interaction between the front end of the mechanical arm and the storage chamber.
14 . The method for loading reticle according to claim 13 , further comprising: supplying a non-reactive gas to a storage rack or chamber in response to having the dedicated reticle storage pod with the reticle stored in the storage rack-or chamber.
15 . The method for loading reticle according to claim 13 , further comprising: transferring, by the front end of the mechanical arm, the dedicated reticle storage pod with the reticle to a vacant storage rack.
16 . The method for loading reticle according to claim 14 , further comprising: operating the front end of the mechanical arm with the gate of the storage chamber to open the gate; transferring, by a grasp mechanism of the mechanical arm, the dedicated reticle storage pod with the reticle to a vacant storage chamber.
17 . A method for unloading reticle, comprising: providing a reticle storage cabinet system having a storage cabinet including a plurality of storage racks adapted to store one or more dedicated reticle storage pods; retrieving, by a mechanical arm, a dedicated reticle storage pod containing a reticle from one of the plurality of storage racks of the storage cabinet, and moving the dedicated reticle storage pod with reticle out of the reticle storage cabinet system, such that the reticle contained in the dedicated reticle storage pod is unloaded outside the system; and receiving and storing, by the mechanical arm, the dedicated reticle storage pod without the reticle to a vacant spot of the storage cabinet; wherein one of the plurality of storage racks is a tablet rack or a storage chamber; wherein the storage rack being the tablet rack has a front end and a rear end, the front end of the storage rack has a notch configured to cooperate with a front end of the mechanical arm, the rear end of the storage rack has a stop portion configured to restrict one side of said dedicated reticle storage pod, and the stop portion has an identifiable information which is readable during an interaction between the front end of the mechanical arm and the storage rack; wherein the storage rack being the storage chamber has a gate which is operatable by the mechanical arm during another interaction between the front end of the mechanical arm and the storage chamber.
18 . The method for loading reticle according to claim 17 , further comprising: transferring, by the front end of the mechanical arm, the dedicated reticle storage pod without the reticle to a vacant storage rack.
19 . The method for loading reticle according to claim 18 , further comprising: operating the front end of the mechanical arm with the gate of the storage chamber to open the gate; transferring, by a grasp mechanism of the mechanical arm, the dedicated reticle storage pod without the reticle to a vacant storage chamber.

Description

RELATED APPLICATIONS This application is a continuation application of U.S. application Ser. No. 17/684,879 filed on Mar. 2, 2022, now approved and claims the benefits of U.S. Provisional Application Ser. No. 63/249,155 filed on Sep. 28, 2021 and claims the benefits of U.S. Provisional Application Ser. No. 63/160,066 filed on Mar. 12, 2021, which is expressly incorporated by reference herein in its entirety. BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a reticle storage pod and a method for securing a reticle, and more particularly to a reticle storage pod including an outer pod and an inner pod and a reticle securing method implemented by the outer pod and the inner pod, wherein the reticle storage pod is applied in a reticle storage system and method. Description of the Prior Art In the current extreme ultraviolet (EUV) lithography processes, a reticle needs to be protected by a conventional dual reticle transport pod (EUV pod) consisting of an EUV inner pod (EIP) and an EUV outer pod (EOP). To store a reticle, the reticle is placed in the inner pod, the inner pod is stored in the outer pod, and the entire conventional reticle transport pod is placed in a nitrogen cabinet that is then filled with nitrogen, thereby storing the reticle. Moreover, the design of such conventional reticle transport pod can avoid particle contamination and reticle damage caused by vibration and deflection during long-distance transportation of the inner pod accommodating the reticle. In addition, the conventional reticle transport pod may be configured to be suitably loaded in different process apparatuses to receive various types of tests and inspections. As a result, the structure of the inner pod is more complicated compared to that of the outer pod, and hence has a higher cost. An inner pod of the reticle transport pod with the design purpose above may not be fully utilized with maximum benefits if such inner pod is stored in a nitrogen cabinet for a long period of time. Referring to FIG. 1 and FIG. 2, a conventional reticle transport pod (10) is a dual pod structure, and includes an inner pod (11) and an outer pod (12). The inner pod (11) stores a reticle (R), and the outer pod (12) accommodates the inner pod (11). The inner pod (11) includes a base (20) and a cover (30), which coordinate with each other to seal and accommodate the reticle (R). The outer pod (12) includes an outer base (40) and an outer cover (50). The outer base (40) includes a support means for the inner pod (11), and the outer cover (50) and the outer base (40) are coupled to define an accommodating space of the inner pod (11). An appropriate hold-down means may be usually provided on an inner side of the outer cover (50) so that the inner pod (11) can be held downward when the outer cover (50) and the outer base (40) are coupled, thereby forming secure accommodation. The outer base (40) generally further includes a latch means for locking the outer cover (50) at the outer base (40). Because transfer of the reticle transport pod (10) in the factory is performed by an overhead hoist transfer (OHT) system, a top end of the outer cover (50) may be provided with a handle (52) for being grasped by an arm of the OHT system. Thus, the height of the handle (52) of the conventional reticle transport pod (10) may disfavor storage in stacked manner, and the height of the handle (52) also occupies an additional storage space. Moreover, in a common design, a corresponding mutual coordinating mechanism is present between a conventional inner pod and a conventional outer pod, so that the conventional outer pod can only be used in coordination with the corresponding inner pod instead of also being adaptively used in coordination with inner pods of different mechanism designs. That is to say, only specific outer pod and inner pod that are compatible can achieve the effect of securely accommodating a reticle, and the expected stability cannot be achieved if an outer pod and an inner pod that are incompatible with each other are used. Considering production costs and storage efficiency, the current outer pod design of a reticle storage pod cannot satisfy requirements. Therefore, there is a need for a dedicated reticle storage pod and an associated method suitable for long-term storage, and a reticle storage system and method for storing the dedicated reticle storage pod in industry. Moreover, the technique of developing one single outer pod to be compatible with inner pods of at least two types of different mechanism designs of the present invention helps reduce storage costs. In a generally known reticle transport pod, an inner pod is provided with a securing mechanism using an external force applied by an outer pod, that is, a hold-down pin. The mechanism acts on a reticle in the inner pod only when the inner pod is accommodated in the outer pod. For example, a top end of the hold-down pin is exposed on an outside of a top portion