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US-12626852-B2 - Inductor component

US12626852B2US 12626852 B2US12626852 B2US 12626852B2US-12626852-B2

Abstract

An inductor component includes a base body having a main surface, an inductor wiring extending in parallel to the main surface in the base body, a first vertical wiring, connected to a first end of the inductor wiring, that is exposed through the main surface, and a second vertical wiring, connected to a second end of the inductor wiring, that is exposed through the main surface. The base body has an upper magnetic layer disposed closer to the main surface than the inductor wiring. The first vertical wiring and the second vertical wiring have columnar shapes extending in a thickness direction while penetrating the upper magnetic layer. The dimension in the thickness direction of the penetration portion, which penetrates the upper magnetic layer, of the first vertical wiring is five times or more the maximum dimension in the thickness direction of the inductor wiring.

Inventors

  • Yoshimasa YOSHIOKA
  • Ryuichiro Tominaga
  • Keisuke Kunimori
  • Yuuki KAWAKAMI

Assignees

  • MURATA MANUFACTURING CO., LTD.

Dates

Publication Date
20260512
Application Date
20210811
Priority Date
20200826

Claims (20)

  1. 1 . An inductor component comprising: a base body having a main surface; an inductor wiring extending in parallel to the main surface in the base body; a first vertical wiring connected to a first end of the inductor wiring, the first vertical wiring being exposed through the main surface; and a second vertical wiring connected to a second end of the inductor wiring, the second vertical wiring being exposed through the main surface, wherein the base body has a magnetic layer disposed closer to the main surface than the inductor wiring, the first vertical wiring and the second vertical wiring have columnar shapes extending in a thickness direction while penetrating the magnetic layer, the thickness direction being orthogonal to the main surface, a dimension in the thickness direction of a penetration portion is five times or more a maximum dimension in the thickness direction of the inductor wiring, the penetration portion being a portion of the first vertical wiring penetrating the magnetic layer, the first end of the inductor wiring is at an end of an outer winding of the inductor wiring, the second end of the inductor wiring is surrounded by the outer winding of the inductor wiring, a ratio of the dimension in the thickness direction of the penetration portion to a width dimension in a direction parallel to the main surface of the first vertical wiring is 2.0 or more, and a portion of the inductor wiring that passes a pad at the first end of the inductor wiring to which the first vertical wiring is attached has a curve that maintains a distance between the outer perimeter of the pad and an edge of the portion of the inductor wiring facing the pad.
  2. 2 . The inductor component according to claim 1 , wherein the dimension in the thickness direction of the penetration portion is 100 μm or more.
  3. 3 . The inductor component according to claim 1 , wherein the dimension in the thickness direction of the inductor wiring is from 10 μm to 50 μm.
  4. 4 . The inductor component according to claim 1 , wherein the first vertical wiring has a plurality of columnar portions arranged in the thickness direction, and central axes of the plurality of columnar portions extend in the thickness direction.
  5. 5 . The inductor component according to claim 4 , wherein the central axes of at least two columnar portions of the plurality of columnar portions are not present on the same straight line.
  6. 6 . The inductor component according to claim 4 , wherein maximum dimensions in the direction parallel to the main surface of the plurality of columnar portions are identical to each other.
  7. 7 . The inductor component according to claim 4 , wherein the columnar portions of the plurality of columnar portions are in direct contact with each other.
  8. 8 . The inductor component according to claim 1 , wherein a side surface of the first vertical wiring is covered with an insulating film with higher insulation than the magnetic layer, the side surface being an outer surface of the first vertical wiring excluding a portion of the outer surface in contact with the inductor wiring and a portion of the outer surface exposed through the main surface.
  9. 9 . The inductor component according to claim 1 , wherein the first vertical wiring contains not less than 99 wt % of copper.
  10. 10 . The inductor component according to claim 1 , wherein a ratio of the dimension in the thickness direction of the penetration portion to the width dimension in the direction parallel to the main surface of the first vertical wiring is 2.1 or more, and the dimension in the thickness direction of the penetration portion is seven times or more the maximum dimension in the thickness direction of the inductor wiring.
  11. 11 . The inductor component according to claim 1 , wherein a maximum dimension in the thickness direction of the base body is 500 μm or less.
  12. 12 . The inductor component according to claim 1 , wherein at least part of an outer surface of the inductor wiring is in contact with a non-magnetic material.
  13. 13 . The inductor component according to claim 1 , wherein an inductance when a small signal current at a frequency of 100 MHz flows through the inductor wiring is from 1 nH to 10 nH.
  14. 14 . The inductor component according to claim 2 , wherein the dimension in the thickness direction of the inductor wiring is from 10 μm to 50 μm.
  15. 15 . The inductor component according to claim 2 , wherein the first vertical wiring has a plurality of columnar portions arranged in the thickness direction, and central axes of the plurality of columnar portions extend in the thickness direction.
  16. 16 . The inductor component according to claim 5 , wherein maximum dimensions in the direction parallel to the main surface of the plurality of columnar portions are identical to each other.
  17. 17 . The inductor component according to claim 5 , wherein the columnar portions of the plurality of columnar portions are in direct contact with each other.
  18. 18 . The inductor component according to claim 2 , wherein a side surface of the first vertical wiring is covered with an insulating film with higher insulation than the magnetic layer, the side surface being an outer surface of the first vertical wiring excluding a portion of the outer surface in contact with the inductor wiring and a portion of the outer surface exposed through the main surface.
  19. 19 . The inductor component according to claim 2 , wherein the first vertical wiring contains not less than 99 wt % of copper.
  20. 20 . The inductor component according to claim 2 , wherein a ratio of the dimension in the thickness direction of the penetration portion to the width dimension in the direction parallel to the main surface of the first vertical wiring is 2.1 or more, and the dimension in the thickness direction of the penetration portion is seven times or more the maximum dimension in the thickness direction of the inductor wiring.

Description

CROSS-REFERENCE TO RELATED APPLICATION This application claims benefit of priority to Japanese Patent Application No. 2020-142632, filed Aug. 26, 2020, the entire content of which is incorporated herein by reference. BACKGROUND Technical Field The present disclosure relates to an inductor component. Background Art The inductor component described in Japanese Patent No. 6024243 has a base body with a main surface. A first inductor wiring and a second inductor wiring are disposed in the base body. The first inductor wiring and the second inductor wiring extend in parallel to the main surface. In addition, the first inductor wiring and the second inductor wiring extend spirally. The layer of the first inductor wiring and the layer of the second inductor wiring are disposed in the direction orthogonal to the main surface. SUMMARY In an inductor component such as the one described in Japanese Patent No. 6024243, a second inductor wiring is present in addition to a first inductor wiring in the base body. When the wiring length of the second inductor wiring is long, if the external shape of the inductor component is the same, the ratio of the volume of the magnetic material in the base body to the volume of the inductor component becomes smaller. Accordingly, the inductance of the inductor component is not as high as expected even though the second inductor wiring is provided in addition to the first inductor wiring, thereby reducing the inductance acquisition efficiency. According to preferred embodiments of the present disclosure, there is provided an inductor component including a base body having a main surface; an inductor wiring extending in parallel to the main surface in the base body; a first vertical wiring connected to a first end of the inductor wiring, the first vertical wiring being exposed through the main surface; and a second vertical wiring connected to a second end of the inductor wiring, the second vertical wiring being exposed through the main surface. The base body has a magnetic layer disposed closer to the main surface than the inductor wiring. The first vertical wiring and the second vertical wiring have columnar shapes extending in a thickness direction while penetrating the magnetic layer, the thickness direction being orthogonal to the main surface. A dimension in the thickness direction of a penetration portion is five times or more a maximum dimension in the thickness direction of the inductor wiring, the penetration portion being a portion of the first vertical wiring penetrating the magnetic layer. In the structure described above, the dimension in the thickness direction of the penetration portion of the first vertical wiring has a reasonable size as compared with the dimension in the thickness direction of the inductor wiring. By increasing the dimensions in the thickness direction of the first vertical wiring so as to actively configure the first vertical wiring as a wiring that contributes to inductance as described above, the inductance can be improved. Meanwhile, since the first vertical wiring has a columnar shape extending in the thickness direction and not in parallel to the main surface of the base body, it is possible to suppress the volume of the magnetic layer from becoming excessively small due to the presence of the first vertical wiring. As a result, the occurrence of a situation in which an expected inductance cannot be obtained due to reduction in the volume of the magnetic layer can be suppressed. Reduction in the inductance acquisition efficiency can be suppressed. Other features, elements, characteristics and advantages of the present disclosure will become more apparent from the following detailed description of preferred embodiments of the present disclosure with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded perspective view of an inductor component according to a first embodiment; FIG. 2 is a transparent plan view of the inductor component according to the first embodiment; FIG. 3 is a sectional view of the inductor component taken along line 3-3 in FIG. 2; FIG. 4 is an explanatory diagram of a manufacturing method for the inductor component according to the first embodiment; FIG. 5 is an explanatory diagram of the manufacturing method for the inductor component according to the first embodiment; FIG. 6 is an exploratory diagram of the manufacturing method for the inductor component according to the first embodiment; FIG. 7 is an explanatory diagram of the manufacturing method for the inductor component according to the first embodiment; FIG. 8 is an explanatory diagram of the manufacturing method for the inductor component according to the first embodiment; FIG. 9 is an explanatory diagram of the manufacturing method for the inductor component according to the first embodiment; FIG. 10 is an explanatory diagram of the manufacturing method for the inductor component according to the first embodiment; FIG. 11 is an