US-12628532-B2 - Light emitting element and method for manufacturing the same

US12628532B2US 12628532 B2US12628532 B2US 12628532B2US-12628532-B2

Abstract

Embodiments provide a light emitting element that includes a base layer, a first electrode disposed on the base layer, a second electrode facing the first electrode, and functional layers disposed between the first electrode and the second electrode. The first electrode includes a first layer disposed on the base layer, and a second layer disposed on the first layer and including a reflective metal. Photonic crystal pore patterns, each spaced apart along a first direction and extending along a second direction crossing the first direction, are defined between the base layer and the first layer.

Inventors

Youngtak Lee
Seungwon Lee
Byeong-Kwon Ju
Jaewon Park
Jun-Young Park
Jae Young Lee
Young Hyun HWANG
Ha HWANG

Assignees

SAMSUNG DISPLAY CO., LTD.
KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION

Dates

Publication Date: 20260512
Application Date: 20230424
Priority Date: 20220603

Claims (20)

1 . A light emitting element comprising: a base layer; a first electrode disposed on the base layer; a second electrode facing the first electrode; and a plurality of functional layers disposed between the first electrode and the second electrode, wherein the first electrode includes: a first layer disposed on the base layer; and a second layer disposed on the first layer and including a reflective metal, and a plurality of photonic crystal pore patterns, each spaced apart along a first direction and extending along a second direction crossing the first direction, are defined between the base layer and the first layer.
2 . The light emitting element of claim 1 , wherein the plurality of photonic crystal pore patterns each have a width in the first direction in a range of about 50 nm to about 550 nm.
3 . The light emitting element of claim 1 , wherein the plurality of photonic crystal pore patterns each have a height in a third direction crossing each of the first direction and the second direction in a range of about 20 nm to about 110 nm.
4 . The light emitting element of claim 1 , wherein the first electrode further comprises a third layer disposed on the second layer and including a transparent conductive oxide.
5 . The light emitting element of claim 4 , wherein an upper surface of the third layer is a flat surface.
6 . The light emitting element of claim 1 , wherein the plurality of photonic crystal pore patterns is each in a vacuum state.
7 . The light emitting element of claim 1 , wherein the first layer comprises: a first portion disposed between the plurality of photonic crystal pore patterns; and a second portion extending from the first portion and disposed on the plurality of photonic crystal pore patterns.
8 . The light emitting element of claim 7 , wherein the second layer comprises: a third portion disposed on the first portion; and a fourth portion extending from the third portion and disposed on the second portion.
9 . The light emitting element of claim 7 , wherein a thickness of the first portion and a thickness of the second portion are substantially the same.
10 . The light emitting element of claim 7 , wherein the first portion contacts an upper surface of the base layer, and the plurality of photonic crystal pore patterns are defined between the base layer and the second portion.
11 . The light emitting element of claim 1 , wherein the first layer comprises indium zinc oxide, indium tin oxide, or a combination thereof, and the second layer comprises silver (Ag), gold (Au), aluminum (Al), or a combination thereof.
12 . The light emitting element of claim 1 , wherein the plurality of functional layers comprise: a hole transport region disposed on the first electrode; an emission layer disposed on the hole transport region; and an electron transport region disposed on the emission layer.
13 . The light emitting element of claim 1 , wherein an upper surface of the base layer is a flat surface.
14 . A light emitting element comprising: a base layer; a first electrode disposed on the base layer; a second electrode facing the first electrode; and a plurality of functional layers disposed between the first electrode and the second electrode, wherein the first electrode includes: a first layer disposed on the base layer, and having a portion thereof disposed directly on the base layer and a remaining portion thereof disposed to be spaced apart from the base layer with a void therebetween; a second layer disposed on the first layer and including a reflective metal; and a third layer disposed on the second layer and including a transparent conductive oxide.
15 . A method for manufacturing a display device, the method comprising: forming a first electrode on a base layer; forming a plurality of functional layers on the first electrode; and forming a second electrode on the plurality of functional layers, wherein the forming of the first electrode includes: forming a plurality of photoresist patterns each spaced apart along a first direction on the base layer and extending in a second direction crossing the first direction; providing a transparent conductive oxide to cover the plurality of photoresist patterns to form a first layer; removing the plurality of photoresist patterns after the forming of the first layer; and providing a reflective metal on the first layer to form a second layer.
16 . The method of claim 15 , wherein the forming of the first electrode further includes: providing a transparent conductive oxide on the second layer to form a third layer.
17 . The method of claim 15 , wherein in the removing of the plurality of photoresist patterns, a plurality of photonic crystal pore patterns in a vacuum state are formed between the base layer and the first layer.
18 . The method of claim 17 , wherein the first layer comprises: a first portion disposed between the plurality of photonic crystal pore patterns; and a second portion extending from the first portion and disposed on the plurality of photonic crystal pore patterns, and the first portion contacts an upper surface of the base layer, and the plurality of photonic crystal pore patterns are defined between the base layer and the second portion.
19 . The method of claim 15 , wherein the transparent conductive oxide comprises indium zinc oxide, indium tin oxide, or a combination thereof, and the reflective metal comprises silver (Ag), gold (Au), aluminum (Al), or a combination thereof.
20 . The method of claim 15 , wherein the forming of the plurality of photoresist patterns is performed through laser interference lithography.

Description

CROSS-REFERENCE TO RELATED APPLICATION(S) This application claims priority to and benefits of Korean Patent Application No. 10-2022-0068208 under 35 U.S.C. § 119, filed on Jun. 3, 2022 in the Korean Intellectual Property Office, the entire contents of which are incorporated herein by reference. BACKGROUND 1. Technical Field The disclosure relates to a light emitting element which is usable as a stretchable electrode, and a method for manufacturing the same. 2. Description of the Related Art There is currently a continuous demand for a flexible and readily deformable stretchable electronic element technology, and such stretchable electronic element technology is expected to be highly applicable to technical fields such as wearable elements and robot sensor skin. Stretchable electronic element technology goes beyond simply having excellent bendable or flexible properties to show high light transmittance, and requires electrodes with excellent electrical and mechanical properties even in a stretched or contracted form. It is to be understood that this background of the technology section is, in part, intended to provide useful background for understanding the technology. However, this background of the technology section may also include ideas, concepts, or recognitions that were not part of what was known or appreciated by those skilled in the pertinent art prior to a corresponding effective filing date of the subject matter disclosed herein. SUMMARY The disclosure provides a light emitting element having increased luminous efficiency and improved optical properties such as viewing angle and color purity. The disclosure further provides a method for manufacturing a light emitting element, whereby the method is capable of manufacturing a light emitting element having high luminous efficiency and improved optical properties while reducing process costs through a simple process. An embodiment provides a light emitting element which may include a base layer, a first electrode disposed on a base layer, a second electrode facing the first electrode, and functional layers disposed between the first electrode and the second electrode, wherein the first electrode may include a first layer disposed on the base layer, and a second layer disposed on the first layer and including a reflective metal, and photonic crystal pore patterns, each spaced apart along a first direction and extending along a second direction crossing the first direction, may be defined between the base layer and the first layer. In an embodiment, the photonic crystal pore patterns may each have a width in the first direction in a range of about 50 nm to about 550 nm. In an embodiment, the photonic crystal pore patterns may each have a height in a third direction crossing each of the first direction and the second direction in a range of about 20 nm to about 110 nm. In an embodiment, the first electrode may further include a third layer disposed on the second layer and including a transparent conductive oxide. In an embodiment, an upper surface of the third layer may be a flat surface. In an embodiment, the photonic crystal pore patterns may each be in a vacuum state. In an embodiment, the first layer may include a first portion disposed between the photonic crystal pore patterns, and a second portion extending from the first portion and disposed on the photonic crystal pore patterns. In an embodiment, the second layer may include a third portion disposed on the first portion, and a fourth portion extending from the third portion and disposed on the second portion. In an embodiment, a thickness of the first portion and a thickness of the second portion may be substantially the same. In an embodiment, the first portion may contact an upper surface of the base layer, and the photonic crystal pore patterns may be defined between the base layer and the second portion. In an embodiment, the first layer may include indium zinc oxide, indium tin oxide, or any combination thereof, and the second layer may include silver (Ag), gold (Au), aluminum (Al), or any combination thereof. In an embodiment, the functional layers may include a hole transport region disposed on the first electrode, an emission layer disposed on the hole transport region, and an electron transport region disposed on the emission layer. In an embodiment, an upper surface of the base layer may be a flat surface. An embodiment provides a light emitting element which may include a base layer, a first electrode disposed on the base layer, a second electrode facing the first electrode, and functional layers disposed between the first electrode and the second electrode, wherein the first electrode may include: a first layer disposed on the base layer, and having a portion thereof disposed directly on the base layer and a remaining portion thereof disposed to be spaced apart from the base layer; a second layer disposed on the first layer and including a reflective metal; and a third layer dispose