US-20260125221-A1 - DEVICE, SYSTEM, AND METHOD FOR AUTOMATED MATERIAL DELIVERY TO A DISPENSING MACHINE

US20260125221A1US 20260125221 A1US20260125221 A1US 20260125221A1US-20260125221-A1

Abstract

In some aspects, a device includes side walls, a top wall, a floor, an interior space, and a back wall; a machine readable code device; at least one power connector configured to provide power to components of the material delivery device; at least one sensor configured to sense a physical characteristic associated with the material delivery device and/or the service element to generate, in part, device related information; a transceiver configured to transmit the device related information to a controller; and a holding mechanism arranged within the interior space and configured to receive and/or securely hold the service element.

Inventors

Cutler Crowell
Alan Lewis
David Padgett
Garrett Wong

Assignees

NORDSON CORPORATION

Dates

Publication Date: 20260507
Application Date: 20231016

Claims (20)

1 . A material delivery device configured to provide delivery of a service element to a machine within a device manufacturing facility, the material delivery device comprising: side walls, a top wall, a floor, an interior space, and a back wall; a machine readable code device; at least one power connector configured to provide power to components of the material delivery device; at least one sensor configured to sense a physical characteristic associated with the material delivery device and/or the service element to generate, in part, device related information; a transceiver configured to transmit the device related information to a controller; and a holding mechanism arranged within the interior space and configured to receive and/or securely hold the service element.
2 . The material delivery device according to claim 1 wherein the at least one sensor comprises a temperature sensor.
3 . The material delivery device according to claim 1 wherein the material delivery device comprises a configuration of a front opening unified pod (FOUP) that is configured to hold the service element.
4 . The material delivery device according to claim 1 further comprising a connection assembly configured to connect to a component of a transportation system.
5 . The material delivery device according to claim 1 wherein the service element includes a machine-readable code.
6 . The material delivery device according to claim 1 wherein the holding mechanism is configured to engage a surface of the service element.
7 . The material delivery device according to claim 1 wherein the holding mechanism comprises as an elastic component, a gripper component, a material component, a friction fit component, and/or a holder component.
8 . The material delivery device according to claim 1 wherein the service element comprises at least one of a syringe of material, a dispenser valve, a dispenser cartridge, a cleaning strip, a fiducial tile, a purge cup, a scale cup, a cleaning strip, and/or a dispenser cup.
9 . The material delivery device according to claim 1 wherein the machine comprises a dispensing machine.
10 . A system for automated material delivery configured to provide delivery of a service element to a machine, the system for automated material delivery comprising the material delivery device according to claim 1 and the system for automated material delivery further comprising: a machine configured to use a service element; a controller configured to provide operation, control, and/or oversight of the service element, the material delivery device, and/or the machine; and at least one machine code reading device configured to read the machine readable code device of the material delivery device and/or a machine readable code device of the service element.
11 . The system for automated material delivery according to claim 10 wherein the controller is configured to provide an error indication and/or stop operation when the controller determines that the material delivery device and/or the service element is incorrect based on the device related information.
12 . The system for automated material delivery according to claim 10 wherein the machine comprises a conveyance system configured to remove the service element from the material delivery device.
13 . The system for automated material delivery according to claim 10 wherein the machine is configured to move the service element onto an operative portion of the machine.
14 . The system for automated material delivery according to claim 10 wherein the machine comprises a conveyance system configured to insert the service element into the material delivery device.
15 .- 19 . (canceled)
20 . The system for automated material delivery according to claim 10 further comprising a module device configured as an equipment front end module (EFEM).
21 . The system for automated material delivery according to claim 20 wherein the module device comprises a refrigerated compartment to hold the material delivery device and/or the service element.
22 . The system for automated material delivery according to claim 20 wherein the module device is configured to convey the material delivery device and/or the service element along a transport path to and from the machine.
23 .- 38 . (canceled)
39 . A material delivery process to provide delivery of a service element to a machine within a device manufacturing facility, the material delivery process comprising: implementing a material delivery device; configuring the material delivery device with side walls, a top wall, a floor, an interior space, and a back wall; configuring the material delivery device with a machine readable code device; configuring the material delivery device with at least one power connector configured to provide power to components of the material delivery device; configuring the material delivery device with at least one sensor to sense a physical characteristic associated with the material delivery device and/or the service element to generate, in part, device related information; configuring the material delivery device with a transceiver to transmit the device related information to a controller; and configuring the material delivery device with a holding mechanism arranged within the interior space to receive and/or securely hold the service element.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS This application is a National Stage Application of International Patent App. No. PCT/US 2023/076946, filed Oct. 16, 2023, which claims the benefit of U.S. Provisional Patent App. No. 63/416,654, filed Oct. 17, 2022, the entire disclosures of both of which are hereby incorporated by reference as if set forth in their entirety herein. FIELD OF THE DISCLOSURE The disclosure relates to a device for automated material delivery to a dispensing machine. Additionally, the disclosure relates to a system for automated material delivery to a dispensing machine. Further, the disclosure relates to a method for automated material delivery to a dispensing machine. BACKGROUND OF THE DISCLOSURE In particular device manufacturing, such as semiconductor manufacturing, electronic device manufacturing, and/or the like fabrication typically takes place inside a clean room. In this regard, utilizing a clean room may be central part of a fabrication process. More specifically, the manufacturing may be carried out in a hermetically sealed environment to improve yield, with automated material handling systems taking care of the transport of wafers from machine to machine. In this regard, Front Opening Unified Pods (FOUPs) are typically used to transport the silicon wafers between various process tools within a factory using an Automated Material Handling-System (AMHS). However, additional supplies are needed for certain manufacturing machines, such as dispensing machines. In this regard, personnel must enter the clean room to provide the additional supplies for these certain manufacturing machines. This results in potential contamination of the clean room and possible impact on the quality of the resulting devices. Accordingly, what is needed is a device, system, and method for automated material delivery to a machine that will reduce contamination of the clean room and limit impact on the quality of the resulting electronic devices. Moreover, what is needed is a device, system, and method for automated material delivery to a machine that provides data, information, and/or the like for operation, analysis, and/or the like of the various systems associated with the machine. SUMMARY OF THE DISCLOSURE The foregoing needs are met, to a great extent, by the disclosure, wherein in one aspect a device, system, and method for automated material delivery to a machine that will reduce contamination of the clean room and limit impact on the quality of the resulting electronic devices. In one general aspect, a material delivery device includes side walls, a top wall, a floor, an interior space, and a back wall. The material delivery device in addition includes a machine readable code device. The material delivery device moreover includes at least one power connector configured to provide power to components of the material delivery device. The material delivery device also includes at least one sensor configured to sense a physical characteristic associated with the material delivery device and/or the service element to generate, in part, device related information. The material delivery device further includes a transceiver configured to transmit the device related information to a controller. The material delivery device in addition includes a holding mechanism arranged within the interior space and configured to receive and/or securely hold the service element. In one general aspect, a material delivery process includes implementing a material delivery device. The material delivery process in addition includes configuring the material delivery device with side walls, a top wall, a floor, an interior space, and a back wall. The material delivery process moreover includes configuring the material delivery device with a machine readable code device. The material delivery process also includes configuring the material delivery device with at least one power connector configured to provide power to components of the material delivery device. The material delivery process further includes configuring the material delivery device with at least one sensor to sense a physical characteristic associated with the material delivery device and/or the service element to generate, in part, device related information. The material delivery process in addition includes configuring the material delivery device with a transceiver to transmit the device related information to a controller. The material delivery process moreover includes configuring the material delivery device with a holding mechanism arranged within the interior space to receive and/or securely hold the service element. There has thus been outlined, rather broadly, certain aspects of the disclosure in order that the detailed description thereof herein may be better understood, and in order that the present contribution to the art may be better appreciated. There are, of course, additional aspects of the disclosure that will be described below and which w