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US-20260125309-A1 - GLASS COMPOSITION FOR GLASS SUBSTRATES CONTAINING OPTICAL WAVEGUIDES

US20260125309A1US 20260125309 A1US20260125309 A1US 20260125309A1US-20260125309-A1

Abstract

Disclosed herein are embodiments of a glass composition including SiO 2 in an amount in a range from 53 mol % to 84 mol %, Al 2 O 3 in an amount in a range from 0.3 mol % to 20 mol %, Na 2 O in an amount in a range from 3 mol % to 16 mol %, and at least one of Cs 2 O or Rb 2 O in an amount in a range from 0.05 mol % to 8 mol %. The glass composition has a first silver ion diffusivity at 110° C. of 5×10 −19 m 2 /s or less, and the glass composition has a second silver ion diffusivity at 350° C. of at least 5×10 −17 m 2 /s at 350° C. The glass composition is particularly suitable for use as a glass substrate of a photonic chip package.

Inventors

  • Lars Martin Otfried Brusberg
  • Matthew John Dejneka

Assignees

  • CORNING INCORPORATED

Dates

Publication Date
20260507
Application Date
20260105

Claims (20)

  1. 1 . A glass article, comprising: a glass substrate comprising glass having a composition, in terms of mol % on a representative oxide basis, comprising: SiO 2 in an amount in a range from 61 mol % to 84 mol %; B 2 O 3 in an amount in a range from 0 mol % to 15 mol %; Li 2 O in an amount in a range from 0 mol % to 4 mol %; SrO in an amount in a range from 0.25 mol % to 10 mol %; and at least one of Cs 2 O or Rb 2 O in an amount in a range from 0.05 mol % to 8 mol %; a first major surface of the glass substrate; a second major surface of the glass substrate opposite to the first major surface; a waveguide comprising silver disposed in the glass substate between the first major surface and the second major surface, and closer to the first major surface than the second major surface.
  2. 2 . The glass article of claim 1 , wherein the composition comprises no more than 12 mol % Al 2 O 3 .
  3. 3 . The glass article of claim 1 , wherein the glass substrate has a silver ion diffusivity of at most 5×10 −19 m 2 /s at a temperature of 110° C.
  4. 4 . The glass article of claim 1 , wherein the glass substrate has a silver ion diffusivity of at least 5×10 −17 m 2 /s at 350° C.
  5. 5 . The glass article of claim 1 , further comprising a depth of layer of from at least 4 micrometers to less than 80 micrometers for the silver.
  6. 6 . The glass article of claim 1 , wherein the waveguide has a width from at least 1 micrometer to no more than 50 micrometers.
  7. 7 . The glass article of claim 1 , wherein the waveguide has a refractive index profile comprising a first refractive index (n s ) at the first major surface, a bulk refractive index (n 0 ) of the glass, and a maximum refractive index (n 1 ) within the waveguide such that n 0 <n 1 and such that n 0 ≤n s , and (n s −n 0 )≥0.015.
  8. 8 . The glass article of claim 7 , wherein (n s −n 0 )≥0.02, and the waveguide has a propagation loss of 0.1 dB/cm or less at 1310 nm.
  9. 9 . A glass article, comprising: a glass substrate comprising glass having a composition, in terms of mol % on a representative oxide basis, comprising: SiO 2 in an amount in a range from 53 mol % to 84 mol %; B 2 O 3 in an amount in a range from 0 mol % to 12.8 mol %; Li 2 O in an amount in a range from 0 mol % to 4 mol %; K 2 O in an amount in a range from 0 mol % to 6 mol %; Rb 2 O in an amount in a range from 0 mol % to 5 mol %; and alkaline earth metal oxides of the group consisting of MgO, CaO, and SrO, wherein a sum of the alkaline earth metal oxides of the group is in a range from 1 mol % to 16 mol %; a first major surface of the glass substrate; a second major surface of the glass substrate opposite to the first major surface; a waveguide disposed in the glass substate between the first major surface and the second major surface, and closer to the first major surface than the second major surface; wherein the waveguide has a refractive index profile comprising a first refractive index (n s ) at the first major surface, a bulk refractive index (n 0 ) of the glass, and a maximum refractive index (n 1 ) within the waveguide such that n 0 <n 1 and such that n 0 ≤n s .
  10. 10 . The glass article of claim 9 , wherein the glass further comprises B 2 O 3 in an amount in a range from 0 mol % to 12 mol %.
  11. 11 . The glass article of claim 9 , wherein the glass substrate has a silver ion diffusivity of at most 5×10 −19 m 2 /s at a temperature of 110° C.
  12. 12 . The glass article of claim 9 , wherein the glass substrate has a silver ion diffusivity of at least 5×10 −17 m 2 /s at 350° C.
  13. 13 . The glass article of claim 10 , wherein the glass comprises no more than 0.5 mol % in total of trace metal oxides of the group consisting of oxides of iron, chromium, nickel, copper, and arsenic.
  14. 14 . The glass article of claim 10 , wherein the first refractive index of the waveguide is a maximum refractive index within the waveguide such that n 0 <n s , and (n s −n 0 )≥0.015.
  15. 15 . The glass article of claim 14 , wherein (n s −n 0 )≥0.02.
  16. 16 . The glass article of claim 10 , wherein the waveguide has a propagation loss of 0.1 dB/cm or less at 1310 nm.
  17. 17 . A glass article, comprising: a glass substrate comprising glass having a composition, in terms of mol % on a representative oxide basis, comprising: SiO 2 in an amount in a range from 61 mol % to 82 mol %; B 2 O 3 in an amount in a range from 0 mol % to 15 mol %; Li 2 O in an amount in a range from 0 mol % to 4 mol %; K 2 O in an amount in a range from 0 mol % to 8 mol %; and Rb 2 O in an amount in a range from 0 mol % to 5 mol %; a first major surface of the glass substrate; a second major surface of the glass substrate opposite to the first major surface; a waveguide comprising silver disposed in the glass substate between the first major surface and the second major surface, wherein the waveguide has a refractive index profile comprising a first refractive index (n s ) at the first major surface, a bulk refractive index (n 0 ) of the glass, and a maximum refractive index (n 1 ) within the waveguide such that n 0 <n 1 and such that n 0 ≤n s , wherein the glass substrate has a silver ion diffusivity of at most 5×10 −19 m 2 /s at a temperature of 110° C., and the glass substrate has a second silver ion diffusivity of at least 5×10 −17 m 2 /s at 350° C., and wherein the first refractive index of the waveguide is a maximum refractive index within the waveguide such that n 0 <n s and (n s −n 0 )≥0.02.
  18. 18 . The glass article of claim 17 , wherein the waveguide has a propagation loss of 0.1 dB/cm or less at 1310 nm.
  19. 19 . The glass article of claim 17 , wherein the waveguide comprises a depth of layer in a range of 4 μm to 15 μm below the first major surface.
  20. 20 . The glass article of claim 17 , wherein the waveguide comprises a width in a range from 10 μm to 50 μm.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS This Application is a continuation of U.S. application Ser. No. 19/263,960, filed on Jul. 9, 2025, which is a continuation of International Patent Application Serial No. PCT/US2024/053372, filed on Oct. 29, 2024, which claims the benefit of priority of U.S. Provisional Application Ser. No. 63/604,629, filed on Nov. 30, 2023, the contents of each of which is relied upon and incorporated herein by reference in its entirety. BACKGROUND The disclosure relates to glass compositions and a glass substrate formed thereform and, in particular, to a glass composition suitable for forming optical waveguides for use in glass packaging substrates. Optical waveguides are finding increasing use in forming optical links with silicon photonic integrated circuits (PIC) mounted on printed circuit boards (PCBs) that support optical transceiver modules. In some cases, the optical waveguides are integrated in PCBs and are optically connected to optical fibers. The increasing demands on the performance of silicon photonics systems places increasing demands on the performance of optical waveguides used in such systems, such as requirements for matching coefficients of thermal expansion between the glass, PIC and PCB, thermal and mechanical stability of the optical waveguide, and low or zero birefringence. SUMMARY According to a first aspect, embodiments of the present disclosure relate to a glass composition including SiO2 in an amount in a range from 53 mol % to 84 mol %, Al2O3 in an amount in a range from 0.3 mol % to 20 mol %, Na2O in an amount in a range from 3 mol % to 16 mol %, and at least one of Cs2O or Rb2O in an amount in a range from 0.05 mol % to 8 mol %. The glass composition has a first silver ion diffusivity at 110° C. of 5×10−19 m2/s or less, and the glass composition has a second silver ion diffusivity at 350° C. of at least 5×10−17 m2/s at 350° C. According to a second aspect, embodiments of the present disclosure relate to a glass composition including SiO2 in an amount in a range from 53 mol % to 84 mol %, Cs2O in an amount in a range from 0.25 mol % to 8 mol %, Al2O3 in an amount in a range from 0.3 mol % to 20 mol %, B2O3 in an amount in a range from 0.25 mol % to 16 mol %, Na2O in an amount in a range from 3 mol % to 16 mol %, SrO in an amount in a range of 0 mol % to 10 mol %, MgO in an amount in a range fo 0 mol % to 5.3 mol %, K2O in an amount in a range from 0 mol % to 8 mol %, CaO in an amount in a range from 0 mol % to 8 mol %, Rb2O in an amount in a range from 0 mol % to 4 mol %, Fe2O3 in an amount in a range of 0 mol % to 0.2 mol %, and BaO in an amount in a range from 0 mol % to 8 mol %. According to a third aspect, embodiments of the present disclosure relate to a glass composition including SiO2 in an amount in a range from 53 mol % to 84 mol %, Cs2O in an amount in a range from 0.35 mol % to 8 mol %, Al2O3 in an amount in a range from 1 mol % to 20 mol %, B2O3 in an amount in a range from 0 mol % to 20 mol %, Na2O in an amount in a range from 3.2 mol % to 12.75 mol %, SrO in an amount in a range of 0 mol % to 10 mol %, MgO in an amount in a range fo 0 mol % to 8 mol %, K2O in an amount in a range from 0 mol % to 4.5 mol %, CaO in an amount in a range from 0 mol % to 8 mol %, Rb2O in an amount in a range from 0 mol % to 6 mol %, Fe2O3 in an amount in a range of 0 mol % to 0.2 mol %, and a combined amount of MgO, CaO, and SrO in a range from 1 mol % to 16 mol %. According to a fourth aspect, embodiments of the present disclosure relate to a glass composition including SiO2 in an amount in a range from 53 mol % to 84 mol %, Cs2O in an amount in a range from 0.35 mol % to 8 mol %, Al2O3 in an amount in a range from 1 mol % to 20 mol %, B2O3 in an amount in a range from 0 mol % to 20 mol %, Na2O in an amount in a range from 3.2 mol % to 16 mol %, SrO in an amount in a range of 0 mol % to 10 mol %, MgO in an amount in a range fo 0 mol % to 5.3 mol %, K2O in an amount in a range from 0 mol % to 4.5 mol %, CaO in an amount in a range from 0 mol % to 8 mol %, Rb2O in an amount in a range from 0 mol % to 8 mol %, Fe2O3 in an amount in a range of 0 mol % to 0.2 mol %, and a combined amount of MgO, CaO, and SrO in a range from 1 mol % to 16 mol %. According to a fifth aspect, embodiments of the present disclosure relate to a glass composition including SiO2 in an amount in a range from 52 mol % to 84 mol %, Cs2O in an amount in a range from 0.25 mol % to 8 mol %, Al2O3 in an amount in a range from 2 mol % to 12 mol %, B2O3 in an amount in a range from 4 mol % to 15 mol %, Na2O in an amount in a range from 4 mol % to 16 mol %, SrO in an amount in a range of 0 mol % to 7 mol %, CaO in an amount in a range from 0 mol % to 15 mol %, and Fe2O3 in an amount in a range of 0 mol % to 0.2 mol %. According to a sixth aspect, embodiments of the present disclosure relate to a glass composition including SiO2 in an amount in a range from 52 mol % to 84 mol %, Al2O3 in an amount in