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US-20260125328-A1 - CERAMIC COMPOSITE MATERIAL AND CAPILLARY

US20260125328A1US 20260125328 A1US20260125328 A1US 20260125328A1US-20260125328-A1

Abstract

A ceramic composite material is formed by sintering powder. The powder includes silicon nitride, silicon carbide, first metal oxide, and second metal oxide. The silicon nitride and the silicon carbide have a weight ratio of 100:0.5 to 100:12. The first metal oxide is aluminum oxide, and the second metal oxide is yttrium oxide. Alternatively, the first metal oxide may be magnesium oxide, and the second metal oxide may be cerium oxide. The ceramic composite material can be used as a capillary.

Inventors

  • Huai-Chen YU
  • Hsun-Ching HSU
  • Jian-Zhi Wang
  • Shih-Hao Hua

Assignees

  • INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Dates

Publication Date
20260507
Application Date
20241114
Priority Date
20241101

Claims (7)

  1. 1 . A ceramic composite material, being formed by sintering powder, wherein the powder comprises silicon nitride, silicon carbide, first metal oxide, and second metal oxide, the silicon nitride and the silicon carbide have a weight ratio of 100:0.5 to 100:12, and the first metal oxide is aluminum oxide or magnesium oxide, wherein when the first oxide is aluminum oxide, the second metal oxide is yttrium oxide; and when the first oxide is magnesium oxide, the second metal oxide is cerium oxide.
  2. 2 . The ceramic composite material as claimed in claim 1 , wherein the silicon nitride and the first metal oxide have a weight ratio of 100:3 to 100:7.
  3. 3 . The ceramic composite material as claimed in claim 1 , wherein the silicon nitride and the second metal oxide have a weight ratio of 100:1 to 100:5.
  4. 4 . The ceramic composite material as claimed in claim 1 , wherein the powder further comprises an impurity, and the impurity comprises titanium, iron, nickel, zirconium, lanthanum, or a combination thereof.
  5. 5 . The ceramic composite material as claimed in claim 4 , wherein the silicon nitride and the impurity have a weight ratio of 100:0.01 to 100:4.
  6. 6 . The ceramic composite material as claimed in claim 4 , wherein a content of the first metal oxide is higher than a content of the impurity, and a content of the second metal oxide is higher than the content of the impurity.
  7. 7 . A capillary, comprising the ceramic composite material as claimed in claim 1 .

Description

CROSS REFERENCE TO RELATED APPLICATIONS The present application is based on, and claims priority from, Taiwan Application Serial Number 113141880, filed on Nov. 1, 2024, the disclosure of which is hereby incorporated by reference herein in its entirety. TECHNICAL FIELD The technical field relates to a ceramic composite material and capillary. BACKGROUND Wire bonding is an indispensable bonding technology used in the semiconductor packaging industry for products such as ICs, LEDs, and the like. The bonding wire is usually gold wire. Gold has good ductility, conductivity, and oxidation resistance, but it is expensive. If the gold wire is replaced with an alloy wire, the cost can be reduced by about 60%. However, the alloy wire can easily abrade the capillary due to its high hardness, and so a ceramic composite material having a higher hardness and greater flexural strength is called for, for use as the capillary. SUMMARY One embodiment of the disclosure provides a ceramic composite material, formed by sintering powder, wherein the powder includes silicon nitride, silicon carbide, first metal oxide, and second metal oxide. The silicon nitride and the silicon carbide have a weight ratio of 100:0.5 to 100:12. The first metal oxide is aluminum oxide or magnesium oxide. When the first oxide is aluminum oxide, the second metal oxide is yttrium oxide. When the first oxide is magnesium oxide, the second metal oxide is cerium oxide. One embodiment of the disclosure provides a capillary including the described ceramic composite material. A detailed description is given in the following embodiments. DETAILED DESCRIPTION In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the disclosed embodiments. It will be apparent, however, that one or more embodiments may be practiced without these specific details. One embodiment of the disclosure provides a ceramic composite material, being formed by sintering powder. The powder includes silicon nitride, silicon carbide, first metal oxide, and second metal oxide, and the silicon nitride and the silicon carbide have a weight ratio of 100:0.5 to 100:12, such as 100:0.9, 100:1, 100:2, 100:3, 100:4, 100:5, 100:6, 100:7, 100:8, 100:9, 100:10, 100:11, 100:11.5, or 100:12. If the amount of the silicon carbide is too low, the hardness of the ceramic composite material cannot be enhanced. If the amount of the silicon carbide is too high, the hardness of the ceramic composite material is lowered (compared to the ceramic composite material obtained by sintering powder without silicon carbide). In some embodiments, the powder is essentially consisting of silicon nitride, silicon carbide, first metal oxide, and second metal oxide, which is free of another general material for sintering ceramic (e.g., boron oxide, iron oxide, chromium oxide, or titanium oxide). In some embodiments, the first metal oxide is aluminum oxide and the second metal oxide is yttrium oxide. In some embodiments, the first oxide is magnesium oxide and the second metal oxide is cerium oxide. In some embodiments, the silicon nitride and the first metal oxide have a weight ratio of 100:3 to 100:7, such as 100:4, 100:5, or 100:6. If the amount of the first metal oxide is too low or too high, the hardness and the flexural strength of the ceramic composite material will be relatively low. In some embodiments, the silicon nitride and the second metal oxide have a weight ratio of 100:1 to 100:5, such as 100:1.5, 100:2, 100:3, or 100:4. If the amount of the second metal oxide is too low or too high, the hardness and the flexural strength of the ceramic composite material will be relatively low. In some embodiments, the powder further includes an impurity, and the impurity includes titanium, iron, nickel, zirconium, lanthanum, or a combination thereof. The impurity mainly comes from the raw materials of the silicon nitride, silicon carbide, first metal oxide, and second metal oxide. Theoretically, the raw materials can be further purified to remove the impurity, but the purification steps may dramatically increase the cost of the ceramic composite material. On the other hand, the effects of the impurity on the properties of the ceramic composite material may be negligible, and so the raw materials are not deliberately purified to remove the impurity. It should be understood that if the commercially available raw materials are free of impurities, the ceramic composite material of the disclosure will also be free of impurities. Therefore, the ceramic composite material can be free of impurities. In some embodiments, the silicon nitride and the impurity have a weight ratio of 100:0.01 to 100:4. If the content of the impurity is too high, the properties of the ceramic composite material (e.g., its hardness and flexural strength) will be lowered. In some embodiments, the content of the first metal oxide is higher than the content of t