US-20260125581-A1 - METHOD FOR PRODUCING POLISHING COMPOSITION CONTAINING MODIFIED POLYVINYL ALCOHOL COMPOSITION AND POLISHING COMPOSITION CONTAINING MODIFIED POLYVINYL ALCOHOL COMPOSITION

Abstract

Provided is a method for producing a polishing composition of which filterability is good and which can reduce surface defects of an object to be polished. A method for producing a polishing composition containing a modified polyvinyl alcohol composition containing a modified polyvinyl alcohol or a derivative thereof and water includes a heat retention step of retaining the modified polyvinyl alcohol composition at a solution temperature of 30° C. or higher and lower than 60° C., in which the heat retention step is performed such that a parameter A is 2.0 or more.

Inventors

• Taiki ICHITSUBO
• Kohsuke Tsuchiya

Assignees

• FUJIMI INCORPORATED

Dates

Publication Date

20260507

Application Date

20220914

Priority Date

20210928

Claims (7)

1. 1 . A method for producing a polishing composition comprising a modified polyvinyl alcohol composition comprising a modified polyvinyl alcohol or a derivative thereof and water, the method comprising: a heat retention step of retaining the modified polyvinyl alcohol composition at a solution temperature of 30° C. or higher and lower than 60° C., wherein the heat retention step is performed such that a parameter A represented by a formula below is 2.0 or more. [ Math . 1 ]  Solution ⁢ temperature ⁢ of modified ⁢ polyvinyl ⁢ alcohol ⁢ composition ⁢ ( °C . ) × Heat ⁢ retention ⁢ time ⁢ ( h ) Concentration ⁢ of ⁢ modified ⁢ polyvinyl ⁢ alcohol ⁢ or ⁢ derivative ⁢ thereof in ⁢ modified ⁢ polyvinyl ⁢ alcohol ⁢ composition ⁢ ( % ⁢ by ⁢ mass ) [ Parameter ⁢ A ]
2. 2 . The method for producing a polishing composition according to claim 1 , wherein the modified polyvinyl alcohol or a derivative thereof is contained in an amount of 0.1% by mass or more and 40% by mass or less with respect to a total mass of the modified polyvinyl alcohol composition.
3. 3 . The method for producing a polishing composition according to claim 1 , wherein in the modified polyvinyl alcohol composition, a rate of change (Rg 1 /Rg 0 ) of a radius of gyration (Rg 1 ) of the modified polyvinyl alcohol or a derivative thereof after the heat retention step with respect to a radius of gyration (Rg 0 ) of the modified polyvinyl alcohol or a derivative thereof before the heat retention step is 95% or less.
4. 4 . The method for producing a polishing composition according to claim 1 , further comprising: a mixing step of mixing the modified polyvinyl alcohol composition and a pH adjusting agent after the heat retention step; and a filtration step of filtering the polishing composition obtained in the mixing step.
5. 5 . The method for producing a polishing composition according to claim 1 , wherein the heat retention step is performed for 0.5 hours or more and 200 hours or less.
6. 6 . A polishing composition comprising a modified polyvinyl alcohol composition comprising a modified polyvinyl alcohol or a derivative thereof and water, wherein the modified polyvinyl alcohol composition is produced by a production method comprising a heat retention step of performing retention at a solution temperature of 30° C. or higher and lower than 60° C., and the heat retention step is performed such that a parameter A represented by a formula below is 2.0 or more. [ Math . 2 ]  Solution ⁢ temperature ⁢ of modified ⁢ polyvinyl ⁢ alcohol ⁢ composition ⁢ ( °C . ) × Heat ⁢ retention ⁢ time ⁢ ( h ) Concentration ⁢ of ⁢ modified ⁢ polyvinyl ⁢ alcohol ⁢ or ⁢ derivative ⁢ thereof in ⁢ modified ⁢ polyvinyl ⁢ alcohol ⁢ composition ⁢ ( % ⁢ by ⁢ mass ) [ Parameter ⁢ A ]
7. 7 . A concentrate of the polishing composition according to claim 6 .

Description

TECHNICAL FIELD The present invention relates to a method for producing a polishing composition containing a modified polyvinyl alcohol composition and a polishing composition containing a modified polyvinyl alcohol composition. BACKGROUND ART A modified polyvinyl alcohol is a polyvinyl alcohol having a substituent (functional group) other than a hydroxyl group, and can impart various properties based on the substituent. Since a modified polyvinyl alcohol is a hydrophilic synthetic resin, the modified polyvinyl alcohol is often dispersed in water and used in a state of a fluid solution (aqueous solution) as a fiber raw material, a binding agent, a coating material, an adhesive, an emulsifier, or the like. For example, Patent Literature 1 discloses that a polishing liquid composition for a silicon wafer containing a modified polyvinyl alcohol can achieve both reduction in surface roughness (haze) and reduction in surface defects (LPD) of a silicon wafer. CITATION LIST Patent Literature Patent Literature 1: JP 2015-84379 A SUMMARY OF INVENTION Technical Problem However, the solution containing the modified polyvinyl alcohol has a problem of poor filterability. For example, when an object to be polished is polished with a polishing composition containing foreign matter, there is a concern that an excessive pressure will be locally applied to the object to be polished and the object to be polished will be scratched. Therefore, when the polishing composition is produced, filtration is often performed on the polishing composition in the form of a solution. Accordingly, filterability is important for a component to be added to the polishing composition in the form of a solution. In a case where the filterability is poor, the productivity is significantly reduced, such as filtration taking time and yield reduction. In addition, the technique of Patent Literature 1 is not yet sufficient in terms of reduction of surface defects (LPD). Therefore, an object of the present invention is to provide a method for producing a polishing composition of which filterability is good and which can reduce surface defects of an object to be polished. Solution to Problem In order to solve the above new problems, the present inventors have intensively studied. As a result, there is provided a method for producing a polishing composition containing a modified polyvinyl alcohol composition containing a modified polyvinyl alcohol or a derivative thereof and water, the method including a heat retention step of retaining the modified polyvinyl alcohol composition at a solution temperature of 30° C. or higher and lower than 60° C., in which the heat retention step is performed such that a parameter A represented by the following formula is 2.0 or more. [Math. 1]Solution⁢ temperature⁢ ofmodified⁢ polyvinyl⁢ alcohol⁢ composition⁢ (°C.)×Heat⁢ retention⁢ time⁢ (h)Concentration⁢ of⁢ modified⁢ polyvinyl⁢ alcohol⁢ or⁢ derivative⁢ thereofin⁢ modified⁢ polyvinyl⁢ alcohol⁢ composition⁢ (%⁢ by⁢ mass)[Parameter⁢ A] The present inventors have found that the above problem can be solved by the method for producing a polishing composition, and have completed the present invention. Effect of the Invention According to the present invention, a method for producing a polishing composition of which filterability is good and which can reduce surface defects of an object to be polished is provided. DESCRIPTION OF EMBODIMENTS The present invention is a method for producing a polishing composition containing a modified polyvinyl alcohol composition containing a modified polyvinyl alcohol or a derivative thereof and water, the method including a heat retention step of retaining the modified polyvinyl alcohol composition at a solution temperature of 30° C. or higher and lower than 60° C., in which the heat retention step is performed such that a parameter A represented by the following formula is 2.0 or more. [Math. 2]Solution⁢ temperature⁢ ofmodified⁢ polyvinyl⁢ alcohol⁢ composition⁢ (°C.)×Heat⁢ retention⁢ time⁢ (h)Concentration⁢ of⁢ modified⁢ polyvinyl⁢ alcohol⁢ or⁢ derivative⁢ thereofin⁢ modified⁢ polyvinyl⁢ alcohol⁢ composition⁢ (%⁢ by⁢ mass)[Parameter⁢ A] The polishing composition obtained through such a heat retention step is excellent in filterability and can reduce surface defects of an object to be polished. In addition, according to an embodiment, the polishing composition containing the modified polyvinyl alcohol composition obtained by such a production method has excellent storage stability. A mechanism for obtaining such an effect is considered as follows. However, the following mechanism is merely presumption, and the scope of the present invention is not limited by the mechanism. It is considered that the modified polyvinyl alcohol or a derivative thereof (hereinafter, also simply referred to as “modified PVA”) swells when dispersed in water and form