US-20260126379-A1 - SPECTROMETRY DEVICE

US20260126379A1US 20260126379 A1US20260126379 A1US 20260126379A1US-20260126379-A1

Abstract

A spectrometry device simultaneously performs an infrared spectroscopic analysis and a Raman spectroscopic analysis on a sample that cannot be exposed to the atmosphere with high spatial resolution. The spectrometry device includes electromagnetic wave sources that generate first and second electromagnetic waves. The second electromagnetic wave has a wavelength shorter than the first electromagnetic wave. An optical system focusses the first and second electromagnetic waves on the sample. An electromagnetic wave having the same wavelength as the second electromagnetic wave is detected by a first detector and an electromagnetic wave having a different wavelength is detected by a second detector, among electromagnetic waves generated by reflection or scattering of the second electromagnetic wave by the sample. A control device performs a first analysis based on a detection signal of the first detector and a second analysis based on a detection signal of the second detector.

Inventors

Kaifeng ZHANG
Masahiro Watanabe
Takenori Hirose

Assignees

HITACHI HIGH-TECH CORPORATION

Dates

Publication Date: 20260507
Application Date: 20230927
Priority Date: 20221228

Claims (8)

1 . A spectrometry device comprising: a stage configured to allow a sample to be placed; a first electromagnetic wave source configured to generate a first electromagnetic wave; a second electromagnetic wave source configured to generate a second electromagnetic wave having a wavelength shorter than the first electromagnetic wave; an optical system including an objective lens configured to focus the first electromagnetic wave and the second electromagnetic wave on the sample; a first detection unit configured to detect an electromagnetic wave having the same wavelength as the second electromagnetic wave and a second detection unit configured to detect an electromagnetic wave having a different wavelength from the second electromagnetic wave, among electromagnetic waves generated by reflection or scattering of the second electromagnetic wave by the sample; a cell configured to separate the sample from an atmospheric environment to allow the sample to be placed on the stage; and a control device configured to perform a first analysis based on a detection signal of the first detection unit and a second analysis based on a detection signal of the second detection unit.
2 . The spectrometry device according to claim 1 , wherein the first electromagnetic wave is infrared light, and the second electromagnetic wave is visible light or ultraviolet light, and the first analysis is an infrared spectroscopic analysis, and the second analysis is a Raman spectroscopic analysis.
3 . The spectrometry device according to claim 1 , wherein the first detection unit includes a condensing lens, a first confocal detector, and a second confocal detector, the second detection unit includes a spectrometer, the first confocal detector includes a first light detector and a first pinhole that limits an amount of light incident on the first light detector, the second confocal detector includes a second light detector and a second pinhole that limits an amount of light incident on the second light detector, the first pinhole is disposed at a position away from a focus position of the condensing lens by a predetermined distance in a direction approaching the first light detector along an optical axis of the condensing lens, and the second pinhole is disposed at a position away from the focus position of the condensing lens by a predetermined distance in a direction away from the second light detector along an optical axis of the condensing lens.
4 . The spectrometry device according to claim 1 , wherein the cell includes an observation window that transmits the first electromagnetic wave and the second electromagnetic wave, and a material of the observation window is calcium fluoride or diamond.
5 . The spectrometry device according to claim 4 , wherein the cell is an electrochemical cell including first and second electrodes that apply a voltage to the sample.
6 . The spectrometry device according to claim 4 , comprising: an aberration correction plate that cancels out wavefront aberration caused by the observation window.
7 . The spectrometry device according to claim 6 , wherein the aberration correction plate is attached to the objective lens.
8 . A method for measuring a sample using a spectrometry device, wherein the sample is a battery material having a stacked structure including a positive electrode material, a separator, and a negative electrode material, and the spectrometry device includes a stage configured to allow a sample to be placed, a first electromagnetic wave source configured to generate a first electromagnetic wave, a second electromagnetic wave source configured to generate a second electromagnetic wave having a wavelength shorter than the first electromagnetic wave, an optical system including an objective lens configured to focus the first electromagnetic wave and the second electromagnetic wave on the sample, a first detection unit configured to detect an electromagnetic wave having the same wavelength as the second electromagnetic wave and a second detection unit configured to detect an electromagnetic wave having a different wavelength from the second electromagnetic wave, among electromagnetic waves generated by reflection or scattering of the second electromagnetic wave by the sample, a cell configured to separate the sample from an atmospheric environment to allow the sample to be placed on the stage and including a first electrode and a second electrode that apply a voltage to the sample, and a control device configured to perform a first analysis based on a detection signal of the first detection unit and a second analysis based on a detection signal of the second detection unit, the method comprising: sealing the sample in the cell in a state where the first electrode is in contact with the positive electrode material and the second electrode is in contact with the negative electrode material; and irradiating the sample with the first electromagnetic wave and the second electromagnetic wave in a state where a predetermined voltage is applied to the sample to in-situ measure a change in the sample during charging and discharging of a battery.

Description

TECHNICAL FIELD The present invention relates to a spectrometry device. BACKGROUND ART A spectrometry device is a device that analyzes a composition of a substance or identifies a foreign substance mixed in the substance by measuring an absorption curve specific to the substance with respect to a wavelength of light, that is, an absorption spectrum. Since infrared light having a wavelength around 10 times that of visible light is generally used for analysis of molecular vibration or the like, spatial resolution limited by a diffraction limit which is proportional to a wavelength of used light is limited to the order of 10 μm. PTL 1 discloses an observation device including an ultraviolet, visible, and infrared spectroscopy unit that acquires an absorption spectrum via a common microscope optical system and a Raman spectroscopy unit that acquires a Raman spectrum. CITATION LIST Patent Literature PTL 1: JP2017-49611A SUMMARY OF INVENTION Technical Problem The ultraviolet, visible, and infrared spectroscopy unit in PTL 1 generates a two-dimensional spectroscopic image by introducing ultraviolet, visible, or infrared light transmitted through an observation sample, and obtains an absorption spectrum from the two-dimensional spectroscopic image. Therefore, spatial resolution of a spectrometry device, in particular, infrared spectrometry, disclosed in PTL 1 is low. The inventors have developed a spectrometry device capable of simultaneously achieving infrared spectrometry and Raman spectrometry with high spatial resolution by using probe light having a short wavelength. In general, a spectrometry device performs measurement in an atmospheric environment, but there is also a need for observation of a sample that cannot be exposed to, for example, the atmosphere, which is an observation application that is not disclosed in the related art, by utilizing high spatial resolution. For example, in research and development of an electrode material, a catalyst, and the like of a lithium ion battery, there is a need to observe a change in a material caused by an electrochemical action during charging and discharging of a battery under an operation state of the battery. In-situ spectrometry for such a battery material cannot be performed in an atmospheric environment. Solution to Problem A spectrometry device according to an embodiment of the invention includes: a stage configured to allow a sample to be placed; a first electromagnetic wave source configured to generate a first electromagnetic wave; a second electromagnetic wave source configured to generate a second electromagnetic wave having a wavelength shorter than the first electromagnetic wave; an optical system including an objective lens configured to focus the first electromagnetic wave and the second electromagnetic wave on the sample; a first detection unit configured to detect an electromagnetic wave having the same wavelength as the second electromagnetic wave and a second detection unit configured to detect an electromagnetic wave having a different wavelength from the second electromagnetic wave, among electromagnetic waves generated by reflection or scattering of the second electromagnetic wave by the sample; a cell configured to separate the sample from an atmospheric environment to allow the sample to be placed on the stage; and a control device configured to perform a first analysis based on a detection signal of the first detection unit and a second analysis based on a detection signal of the second detection unit. Advantageous Effects of Invention It is possible to provide a spectrometry device capable of simultaneously performing an infrared spectroscopic analysis and a Raman spectroscopic analysis on a sample that cannot be exposed to the atmosphere with high spatial resolution. Problems, configurations, and effects other than those described above will be clarified by description of the following embodiments. BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a schematic configuration diagram showing an example of a spectrometry device. FIG. 2 is a diagram showing an energy beam and probe light emitted to a sample. FIG. 3A shows a configuration of a confocal detector. FIG. 3B is a diagram showing a relationship between a detection light amount of the confocal detector and a displacement amount. FIG. 4A is a diagram showing a relationship between detection light amounts of two confocal detectors and a displacement amount. FIG. 4B is a diagram showing a relationship between a sum of the detection light amounts of the two confocal detectors and the displacement amount. FIG. 4C is a diagram showing a relationship between the displacement amount and a ratio of a difference to the sum of the detection light amounts of the two confocal detectors. FIG. 5A is a view showing an internal structure of an electrochemical cell. FIG. 5B is a view showing an internal structure of the electrochemical cell. FIG. 6A shows an example in which an aberration correction plate is pro