US-20260126380-A1 - SILICATE CONCENTRATION MONITORING DEVICE AND SILICATE CONCENTRATION MONITORING METHOD

US20260126380A1US 20260126380 A1US20260126380 A1US 20260126380A1US-20260126380-A1

Abstract

A device for monitoring a concentration of silicate in a fluid including the silicate includes a concentrator, a solution reactor configured to introduce a molybdic compound and a reducer to the fluid, and a concentration analyzer configured to output a quantified silicate concentration by measuring an absorbance, wherein the concentrator includes a first electrode, a second electrode spaced apart from the first electrode, a current collector configured to supply power to the first electrode and the second electrode at one side of each of the first electrode and the second electrode, a concentrator flow path which is disposed between the first electrode and the second electrode and is a passage through which the fluid moves, and a cation exchange membrane disposed between the first electrode and the concentrator flow path. A silicate concentration monitoring method is also provided.

Inventors

Jinhyeok Jang
Changha Lee
Yunho Kim
Alim Jang
Minhyun PARK
Younghun Kim
Junyoung Oh
Samjong Choi

Assignees

SAMSUNG ELECTRONICS CO., LTD.

Dates

Publication Date: 20260507
Application Date: 20250714
Priority Date: 20241107

Claims (20)

1 . A device for monitoring a concentration of silicate in a fluid including the silicate, the device comprising: a concentrator; a solution reactor configured to introduce a molybdic compound and a reducer to the fluid transferred from the concentrator; and a concentration analyzer configured to output a quantified silicate concentration by measuring, at a wavelength of about 800 nm to about 820 nm, an absorbance of the fluid transferred from the solution reactor, wherein the concentrator comprises: a first electrode; a second electrode spaced apart from the first electrode; a current collector configured to supply power to the first electrode and the second electrode at one side of each of the first electrode and the second electrode; a concentrator flow path which is disposed between the first electrode and the second electrode and is a passage through which the fluid moves; and a cation exchange membrane disposed between the first electrode and the concentrator flow path.
2 . The device of claim 1 , wherein the fluid is acidic.
3 . The device of claim 1 , wherein, in the concentrator, the first electrode is a positive electrode, and the second electrode is a negative electrode.
4 . The device of claim 1 , wherein the concentrator increases the concentration of the silicate included in the fluid by about 10 times to about 20 times.
5 . The device of claim 1 , wherein, in the concentrator, the first electrode comprises a porous carbon electrode, and the second electrode comprises graphite.
6 . The device of claim 1 , wherein, in the concentrator, the second electrode generates hydroxyl ions from the fluid to maintain a pH concentration of the fluid at about 5 to about 9.
7 . The device of claim 1 , wherein, in the concentrator, only the silicate passes from the fluid to the first electrode through the cation exchange membrane.
8 . The device of claim 1 , wherein the molybdic compound includes molybdic acid (H 2 MoO 4 ), ammonium molybdate ((NH 4 ) 6 Mo 7 O 24 ·4H 2 O), lithium molybdate (Li 2 MoO 4 ), or phosphomolybdic acid (H 3 [PMo 12 O 40 ]·nH 2 O).
9 . The device of claim 1 , wherein the reducer includes ascorbic acid (C 6 H 8 O 6 ).
10 . The device of claim 1 , wherein a basic pH control agent is further introduced to the solution reactor.
11 . The device of claim 1 , wherein the concentration analyzer comprises: a light source configured to emit light on the fluid; a wavelength selector configured to separate a particular wavelength from a wavelength of the light; a concentration analyzer fluid vessel that is a passage through which the fluid moves; a detector configured to measure intensity of the light having passed through the fluid and convert the intensity of the light into an electrical signal; and an analyzer configured to convert the electrical signal transmitted from the detector into a quantified silicate concentration.
12 . A device for monitoring a concentration of silicate in an acidic fluid including the silicate, the device comprising: a concentrator; a solution reactor configured to introduce a molybdic compound, a basic pH control agent, and a reducer to the fluid transferred from the concentrator; and a concentration analyzer configured to output a quantified silicate concentration by measuring, at a wavelength of about 800 nm to about 820 nm, an absorbance of the fluid transferred from the solution reactor, wherein the concentrator comprises: a first electrode including a porous carbon electrode; a second electrode spaced apart from the first electrode and including graphite; a current collector configured to supply power to the first electrode and the second electrode at one side of each of the first electrode and the second electrode; a concentrator flow path which is disposed between the first electrode and the second electrode and is a passage through which the fluid moves; and a cation exchange membrane disposed between the first electrode and the concentrator flow path, the molybdic compound is introduced in an amount of about 0.5% to about 5% of an amount of the fluid introduced to the solution reactor, the reducer is introduced in an amount of about 0.5% to about 5% of the amount of the fluid introduced to the solution reactor, and the basic pH control agent is introduced in an amount by which a pH concentration of the fluid introduced to the solution reactor is adjusted to be about 5 to about 9.
13 . The device of claim 12 , wherein the reducer includes ascorbic acid (C 6 H 8 O 6 ), and the basic pH control agent includes sodium hydroxide.
14 . The device of claim 12 , wherein the concentration analyzer comprises: a light source configured to emit light on the fluid; a wavelength selector configured to separate a particular wavelength from a wavelength of the light; a concentration analyzer fluid vessel that is a passage through which the fluid moves; a detector configured to measure intensity of the light having passed through the fluid and convert the intensity of the light into an electrical signal; and an analyzer configured to convert the electrical signal transmitted from the detector into a quantified silicate concentration.
15 . A device for monitoring a concentration of silicate in a fluid including the silicate, the device comprising: a concentrator; a solution reactor configured to introduce a molybdic compound and a reducer to the fluid transferred from the concentrator; and a concentration analyzer configured to output a quantified silicate concentration by measuring, at a wavelength of about 800 nm to about 820 nm, an absorbance of the fluid transferred from the solution reactor, wherein the concentrator comprises: a first electrode; a second electrode spaced apart from the first electrode; a current collector configured to supply power to the first electrode and the second electrode at one side of each of the first electrode and the second electrode; a concentrator flow path which is disposed between the first electrode and the second electrode and is a passage through which the fluid moves; and a cation exchange membrane disposed between the first electrode and the concentrator flow path, wherein the molybdic compound includes molybdic acid (H 2 MoO 4 ), ammonium molybdate ((NH 4 ) 6 Mo 7 O 24 ·4H 2 O), lithium molybdate (Li 2 MoO 4 ), or phosphomolybdic acid (H 3 [PMo 12 O 40 ]·nH 2 O), and wherein the reducer includes ascorbic acid (C 6 H 8 O 6 ).
16 . The device of claim 15 , wherein, in the concentrator, the first electrode is a positive electrode, and the second electrode is a negative electrode.
17 . The device of claim 15 , wherein, in the concentrator, the first electrode comprises a porous carbon electrode, and the second electrode comprises graphite.
18 . The device of claim 15 , wherein, in the concentrator, only the silicate passes from the fluid to the first electrode through the cation exchange membrane.
19 . The device of claim 15 , wherein the concentration analyzer comprises: a light source configured to emit light on the fluid; a wavelength selector configured to separate a particular wavelength from a wavelength of the light; a concentration analyzer fluid vessel that is a passage through which the fluid moves; a detector configured to measure intensity of the light having passed through the fluid and convert the intensity of the light into an electrical signal; and an analyzer configured to convert the electrical signal transmitted from the detector into a quantified silicate concentration.
20 . The device of claim 15 , wherein the concentrator flow path is a portion of a circulation flow path which is configured in a closed loop shape.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS This application is based on and claims priority under 35 U.S.C. § 119 to Korean Patent Application Nos. 10-2024-0157164, filed on Nov. 7, 2024, and 10-2024-0202662, filed on Dec. 31, 2024, in the Korean Intellectual Property Office, the disclosures of which are incorporated by reference herein in their entireties. BACKGROUND The present disclosure relates to a silicate concentration monitoring device and a silicate concentration monitoring method. Along with the advancement and miniaturization of the semiconductor technology, fine impurities included in a material used in a semiconductor manufacturing process have affected product quality. Because a product may be defective due to a fine impurity, impurities need to be minimized in a chemical to be supplied in a semiconductor manufacturing process. In particular, recently, silicate-based particles may remain in a chemical operation. Many problems occur because silicate remaining in a chemical still remains without being removed by a filter and is developed in a semiconductor manufacturing process. At present, a semiconductor chemical material is refined by a material company by using a filter up to a material manufacturing operation, but a filter technique being used is in a state in which a filtering degree faces a technical limit. Particularly, a filter having a pore size of 1 nm to 2 nm is used, but defects due to ultrafine silicate-based particles have still occurred. Therefore, development of a technique of monitoring whether silicate remains in a semiconductor chemical material is necessary. SUMMARY The present disclosure is directed to monitoring whether silicate remains in a semiconductor chemical material, and provides a silicate concentration monitoring device and a silicate concentration monitoring method capable of monitoring the concentration of silicate even when the silicate remains at a relatively dilute concentration. The problems to be solved by the present disclosure are not limited to the problems mentioned above, and other problems could be clearly understood by those of ordinary skill in the art from the description below. According to an aspect of the present disclosure, there is provided a device for monitoring a concentration of silicate in a fluid including the silicate, the device including a concentrator, a solution reactor configured to introduce a molybdic compound and a reducer to the fluid transferred from the concentrator, and a concentration analyzer configured to output a quantified silicate concentration by measuring, at a wavelength of 810 nm, an absorbance of the fluid transferred from the solution reactor, wherein the concentrator includes a first electrode, a second electrode spaced apart from the first electrode, a current collector configured to supply power to the first electrode and the second electrode at one side of each of the first electrode and the second electrode, a concentrator flow path which is disposed between the first electrode and the second electrode and is a passage through which the fluid moves, and a cation exchange membrane disposed between the first electrode and the concentrator flow path. According to another aspect of the present disclosure, there is provided a method of monitoring a concentration of silicate in a fluid including the silicate, the method including passing the fluid through a concentrator configured to increase the concentration of the silicate, passing the fluid through a solution reactor configured to introduce a molybdic compound and a reducer, and passing the fluid through a concentration analyzer configured to output a quantified silicate concentration by emitting light and measuring an absorbance of the fluid at a wavelength of 810 nm, wherein the concentrator includes a first electrode including a porous carbon electrode, a second electrode spaced apart from the first electrode and including graphite, a current collector configured to supply power to the first electrode and the second electrode at one side of each of the first electrode and the second electrode, a concentrator flow path which is disposed between the first electrode and the second electrode and is a passage through which the fluid moves, and a cation exchange membrane disposed between the first electrode and the concentrator flow path. In an embodiment of the method, the fluid includes sulfuric acid. In another embodiment of the method, the passing of the fluid through the concentrator includes: passing a first fluid of the fluid through the concentrator flow path and supplying power by using the first electrode as a positive electrode and the second electrode as a negative electrode; and passing a second fluid of the fluid through the concentrator flow path and supplying power by using the first electrode as the negative electrode and the second electrode as the positive electrode, and an amount of the second fluid that is introduced is less than an amount of th