US-20260128693-A1 - MOTOR CONTROL METHOD, TRANSFER DEVICE, AND STORING MEDIUM

US20260128693A1US 20260128693 A1US20260128693 A1US 20260128693A1US-20260128693-A1

Abstract

A motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, includes: a data acquisition process of acquiring, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor; and a transfer process of transferring the object to be transferred by controlling current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor.

Inventors

Youichi MASAKI
Mitsuteru Yano
Eiichi Sekimoto
Tsuyoshi OTSUKA
Akihiro TERAMOTO
Teppei Ito
Koji Takayanagi

Assignees

TOKYO ELECTRON LIMITED

Dates

Publication Date: 20260507
Application Date: 20251219
Priority Date: 20221005

Claims (15)

1 . A data processing method of processing data for transferring an object to be transferred in a substrate processing apparatus, the method comprising: a first acquisition process of acquiring pieces of drive data, which relate to driving of a motor for the transferring the object to be transferred and vary with heat generation of the motor, at different times; a second acquisition process of acquiring pieces of accumulation correspondence data that correspond to an accumulated value obtained by accumulating the pieces of drive data; and a third acquisition process of acquiring an amount of displacement of the object to be transferred from a target transfer position due to the heat generation of the motor, based on the pieces of accumulation correspondence data acquired in the second acquisition process.
2 . The data processing method of claim 1 , wherein the first acquisition process incudes acquiring the pieces of drive data multiple times in each of a first duration and a second duration after the first duration, and wherein the second acquisition process includes acquiring the pieces of accumulation correspondence data that correspond to the accumulated value obtained by accumulating the pieces of drive data in each of the first duration and the second duration.
3 . The data processing method of claim 2 , wherein the pieces of drive data are pieces of torque data of the motor.
4 . The data processing method of claim 3 , wherein the object to be transferred is a substrate, wherein the substrate is transferred by a moving object that moves by the driving of the motor, wherein the moving object is a substrate supporter configured to support the substrate, and wherein the substrate is moved toward a stage provided to place the substrate on the stage in the substrate processing apparatus.
5 . The data processing method of claim 4 , wherein the motor is enclosed by a housing and the substrate supporter moves toward the housing, and wherein the method further comprises compensating for the displacement of the object to be transferred caused by thermal expansion of the housing.
6 . The data processing method of claim 5 , wherein the transferring the object to be transferred comprises transferring the substrate in a transverse direction along a straight line toward the target transfer position above the stage, and wherein the displacement occurs in the transverse direction.
7 . The data processing method of claim 1 , further comprising calculating a correction amount relating to the motor to compensate for the amount of displacement acquired in the third acquisition process.
8 . A control apparatus that controls a transfer device, the control apparatus comprising a controller programmed to execute: a first acquisition process of acquiring pieces of drive data, which relate to driving of a motor and vary with heat generation of the motor, at different times, wherein the transfer device includes a transfer mechanism configured to transfer an object to be transferred in a substrate processing apparatus by the driving of the motor; a second acquisition process of acquiring pieces of accumulation correspondence data that correspond to an accumulated value obtained by accumulating the pieces of drive data; and a third acquisition process of acquiring an amount of displacement of the object to be transferred from a target transfer position due to the heat generation of the motor, based on the pieces of accumulation correspondence data acquired in the second acquisition process.
9 . The control apparatus of claim 8 , wherein the first acquisition process incudes acquiring the pieces of drive data multiple times in each of a first duration and a second duration after the first duration, and wherein the second acquisition process includes acquiring the pieces of accumulation correspondence data that correspond to the accumulated value obtained by accumulating the pieces of drive data in each of the first duration and the second duration.
10 . The control apparatus of claim 9 , wherein the pieces of drive data are pieces of torque data of the motor.
11 . The control apparatus of claim 10 , wherein the transfer device further includes a moving object configured to move by the driving of the motor to transfer the object to be transferred, wherein the object to be transferred is a substrate, wherein the moving object is a substrate supporter configured to support the substrate, and wherein the substrate is moved toward a stage provided to place the substrate on the stage in the substrate processing apparatus.
12 . The control apparatus of claim 11 , wherein the transfer device further includes a housing configured to enclose the motor, wherein the substrate supporter moves toward the housing, and wherein the controller is further programmed to execute compensating for the displacement of the object to be transferred caused by thermal expansion of the housing.
13 . The control apparatus of claim 12 , wherein the substrate supporter transfers the substrate in a transverse direction along a straight line toward the target transfer position above the stage, and wherein the displacement occurs in the transverse direction.
14 . The control apparatus of claim 8 , wherein the controller is further programmed to execute calculating a correction amount relating to the motor to compensate for the amount of displacement acquired in the third acquisition process.
15 . A non-transitory computer-readable storage medium that records software used in a substrate processing apparatus and incorporating a group of steps for executing the data processing method of claim 1 .

Description

CROSS-REFERENCE TO RELATED APPLICATION This application is a continuation of U.S. patent application Ser. No. 18/480,575, filed on Oct. 4, 2023, which is based upon and claims the benefit of priority from Japanese Patent Application No. 2022-161085, filed on Oct. 5, 2022, the entire contents of each of which are incorporated herein by reference in its entirety. TECHNICAL FIELD The present disclosure relates to a motor control method, a transfer device, and a non-transitory computer-readable storing medium that stores software. BACKGROUND A coating/developing apparatus used to manufacture a semiconductor device is provided with a processing module for processing a semiconductor wafer (referred to hereinafter as a wafer) as a substrate, and a transfer arm as transfer mechanism for transferring the wafer to the processing module. Patent Document 1 discloses a motor control program relating to a positioning operation of the transfer arm. PRIOR ART DOCUMENT Patent Document Patent Document 1: Japanese Laid-Open Patent Publication No. 2013-230036 SUMMARY According to one embodiment of the present disclosure, there is provided a motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, which includes: a data acquisition process of acquiring, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor; and a transfer process of transferring the object to be transferred by controlling current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor. BRIEF DESCRIPTION OF DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present disclosure, and together with the general description given above and the detailed description of the embodiments given below, serve to explain the principles of the present disclosure. FIG. 1 is a plan view of a coating/developing apparatus of a substrate processing apparatus according to an embodiment of the present disclosure. FIG. 2 is a longitudinal sectional front view of the coating/developing apparatus. FIG. 3 is a perspective view of a processing block provided in the coating/developing apparatus. FIG. 4 is a schematic transverse plan view of a transfer mechanism provided in the processing block. FIG. 5 is a transverse plan view of a base included in the transfer mechanism. FIG. 6 is an explanatory diagram illustrating an outline of a motor control method in a comparative mode. FIG. 7 is an explanatory diagram illustrating an outline of a motor control method according to the present disclosure. FIG. 8 is a block diagram illustrating the motor control method. FIG. 9 is a graph illustrating a torque ratio of a motor as a function of time. FIG. 10 is a time chart illustrating a correspondence between the torque ratio and a duration. DETAILED DESCRIPTION Reference will now be made in detail to various embodiments, examples of which are illustrated in the accompanying drawings. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present disclosure. However, it will be apparent to one of ordinary skill in the art that the present disclosure may be practiced without these specific details. In other instances, well-known methods, procedures, systems, and components have not been described in detail so as not to unnecessarily obscure aspects of the various embodiments. A coating/developing apparatus 1, which is an example of a substrate processing apparatus including a transfer mechanism, according to an embodiment of the present disclosure, will now be described with reference to a plan view of FIG. 1 and a longitudinal sectional front view of FIG. 2. The coating/developing apparatus 1 constitutes a system for performing photolithography on a wafer W, together with an exposure device D4, and is configured such that a carrier block D1, a processing block D2, and an interface block D3 are connected to each other in a row in a transverse direction. In the following description, a direction along the row of these blocks is referred to as a left-right direction. In addition, this left-right direction may be described as a Y direction and is a direction orthogonal to an X direction described later. The exposure device D4 is connected to the interface block D3 on the opposite side of a side to which the processing block D2 is connected. The wafer W is placed on a stage 11 provided in the carrier block D1 in a state in which the wafer W is accommodated in a carrier C, which is a transfer container. The carrier block D1 includes a transfer mechanism F1 for loading and unloading the wafer W to and from the carrier C on the stage 11. N