US-20260129884-A1 - METAL-OXIDE-METAL (MOM) CAPACITOR

Abstract

A capacitor may include a plurality of adjacent stacked layers and an atypical layer. Each of the plurality of adjacent stacked layers may include a first set of fingers. Each finger of the first sets of fingers may include a first end, a second end opposite the first end, and a body extending between the first and second ends in a first direction. The atypical layer may be disposed adjacent a first stacked layer of the plurality of stacked layers. The atypical layer may include a second set of fingers. Each finger of the second set of fingers may include a first end, a second end opposite the first end, and a body extending between the first and second ends in a second direction. The second direction may be substantially orthogonal to the first direction.

Inventors

• Luke Anthony Johnson
• Fabien Vaucher
• Carlo Marino
• Mihai Claudiu Tanase
• Reiner Grimm
• Jean-Michel Blin

Assignees

• MICROCHIP TECHNOLOGY INCORPORATED

Dates

Publication Date

20260507

Application Date

20250206

Claims (19)

1. 1 . A capacitor comprising: a plurality of adjacent stacked layers, each of the plurality of adjacent stacked layers including a first set of fingers, each finger of the first sets of fingers having a first end, a second end opposite the first end, and a body extending between the first and second ends in a first direction; and an atypical layer disposed adjacent a first stacked layer of the plurality of stacked layers, the atypical layer including a second set of fingers, each finger of the second set of fingers having a first end, a second end opposite the first end, and a body extending between the first and second ends in a second direction, the second direction being substantially orthogonal to the first direction.
2. 2 . The capacitor of claim 1 , a distance between adjacent fingers of each of the first sets of fingers defining corresponding first finger gaps, a distance between adjacent fingers of the second set of fingers defining corresponding second finger gaps, each of the second finger gaps being larger than each of the first finger gaps.
3. 3 . The capacitor of claim 1 , a first length of each finger of the first sets of fingers being substantially the same, a second length of each finger of the second set of fingers being substantially the same, a first width of each finger of the first sets of fingers being smaller than a second width of each finger of the second set of fingers.
4. 4 . The capacitor of claim 1 , the first stacked layer being a bottom layer of the plurality of stacked layers.
5. 5 . The capacitor of claim 1 , the first stacked layer being a top layer of the plurality of stacked layers.
6. 6 . The capacitor of claim 1 , a first thickness of each finger of the first sets of fingers being smaller than a second thickness of each finger of the second set of fingers.
7. 7 . The capacitor of claim 1 , comprising: a first set of vias coupled between adjacent ones of the plurality of stacked layers, a second set of vias coupled between the first stacked layer and the atypical layer, the first and second sets of vias being operable to increase a capacitance of the capacitor.
8. 8 . The capacitor of claim 7 , each finger of the first sets of fingers presenting a first side and a second side opposite the first side, each of the first set of vias being coupled to the first side of one of the fingers of the first sets of fingers and to the second side of an other of the fingers of the first sets of fingers, the other of the fingers being in an adjacent one of the plurality of stacked layers.
9. 9 . The capacitor of claim 7 , each finger of the first set of fingers of the first stacked layer presenting a first side and a second side opposite the first side, each finger of the second set of fingers presenting a first side and a second side opposite the first side.
10. 10 . The capacitor of claim 9 , each via of the second set of vias being coupled to the first side of one of the fingers of the first set of fingers of the first stacked layer and to the second side of one of the second set of fingers.
11. 11 . The capacitor of claim 1 , each of the first sets of fingers and the second set of fingers including a first finger subset corresponding to a first electrode and a second finger subset corresponding to a second electrode, each subset of the first finger subsets of the first sets of fingers being interdigitated with a corresponding subset of the second finger subsets of the first sets of fingers, the first finger subset of the second set of fingers being interleaved with the second finger subset of the second set of fingers.
12. 12 . The capacitor of claim 11 , each of the plurality of stacked layers including a first sidewall and a second sidewall opposite the first sidewall, each of the first and second sidewalls presenting an inner face, the first end of each of the fingers of the first finger subsets terminating at the inner face of the corresponding first sidewall, the second end of each of the fingers of the first finger subsets being adjacent the inner face of the corresponding second sidewall to define respective first sidewall gaps, the first end of each of the fingers of the second finger subsets terminating at the inner face of the corresponding second sidewall, the second end of each of the fingers of the second finger subsets being adjacent the inner face of the corresponding first sidewall to define respective second sidewall gaps.
13. 13 . The capacitor of claim 1 , comprising: a second atypical layer adjacent the atypical layer opposite the first stacked layer, the second atypical layer including a third set of fingers, each finger of the third set of fingers presenting a first end, a second end opposite the first end, and a body extending along the second direction between the first and second ends.
14. 14 . The capacitor of claim 13 , a first length of each finger of the first sets of fingers being substantially the same, a second length of each finger of the second set of fingers and a third length of each finger of the third set of fingers being substantially the same, a first width of each finger of the first sets of fingers being both smaller than a second width of each finger of the second set of fingers and smaller than a third width of each finger of the third set of fingers, the second and third widths being substantially the same, a first thickness of each finger of the first sets of fingers being both smaller than a second thickness of each finger of the second set of fingers and smaller than a third thickness of each finger of the third set of fingers, the second and third thicknesses being substantially the same.
15. 15 . The capacitor of claim 13 , a set of vias coupled between the atypical layer and the second atypical layer, the set of vias being operable to increase a capacitance of the capacitor.
16. 16 . The capacitor of claim 15 , each finger of the second set of fingers and each finger of the third set of fingers presenting a first side and a second side opposite the first side, each via of the set of vias being coupled to the first side of one of the fingers of the second set of fingers and to the second side of one of the fingers of the third set of fingers.
17. 17 . The capacitor of claim 13 , each finger of the second set of fingers and each finger of the third set of fingers including a first finger corresponding to a first electrode and a second finger subset corresponding to a second electrode, each subset of the first finger subsets being interleaved with a corresponding subset of the second finger subsets.
18. 18 . The capacitor of claim 13 , a distance between adjacent fingers of each of the first sets of fingers defining corresponding first finger gaps, a distance between adjacent fingers of the second set of fingers defining corresponding second finger gaps, a distance between adjacent fingers of the third set of fingers defining corresponding third finger gaps, each of the second finger gaps and the third finger gaps being larger than each of the first finger gaps.
19. 19 . The capacitor of claim 1 , wherein the capacitor is one of: a metal-oxide-metal (MOM) capacitor, an alternate polarity metal-oxide-metal (APMOM) capacitor, and a vertical natural capacitor (VNCAP).

Description

CROSS-REFERENCE TO RELATED APPLICATIONS The current patent application claims the benefit under 35 U.S. C. § 119(e) of the priority date of U.S. Provisional Application Ser. No. 63/717,324; titled “METAL-OXIDE-METAL (MOM) CAPACITOR”; and filed Nov. 7, 2024. The Provisional Application is hereby incorporated by reference, in its entirety, into the current patent application. TECHNICAL FIELD Various examples of the present disclosure relate to a metal-oxide-metal (MOM) capacitor. BACKGROUND Metal-oxide-metal (MOM) capacitors are typically designed to be as compact as possible within existing design constraints. Due to the design constraints, a top (or bottom) layer of a typical MOM capacitor may have different dimensions than the underlying layers. The top (or bottom) layer may be generally directionally aligned with the underlying layers and may be offset from underlying stacked layers due to the different dimensions. Due to the top (or bottom) layer being offset from the underlying layers, conductive vias (placed uniformly between the underlying stacked layers) may not be able to be placed between the top (or bottom layer) and the underlying stacked layers, thereby increasing an amount of space in, and lowering the overall capacitance of, the MOM capacitor. This background discussion is intended to provide information related to the present invention which is not necessarily prior art. SUMMARY OF THE INVENTION According to various examples of the present disclosure, a capacitor may include a plurality of adjacent stacked layers and an atypical layer. Each of the plurality of adjacent stacked layers may include a first set of fingers. Each finger of the first sets of fingers may include a first end, a second end opposite the first end, and a body extending between the first and second ends in a first direction. The atypical layer may be disposed adjacent a first stacked layer of the plurality of stacked layers. The atypical layer may include a second set of fingers. Each finger of the second set of fingers may include a first end, a second end opposite the first end, and a body extending between the first and second ends in a second direction. The second direction may be substantially orthogonal to the first direction. This summary is not intended to identify essential features of the examples, and is not intended to be used to limit the scope of the claims. These and other aspects of the present examples are described below in greater detail. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 illustrates an elevated side view of an example MOM capacitor including a plurality of stacked layers and an atypical layer; FIG. 2 illustrates a top view of one of the stacked layers of the MOM capacitor of FIG. 1; FIG. 3 illustrates a top view of the atypical layer of the MOM capacitor of FIG. 1; FIG. 4 illustrates the MOM capacitor of FIG. 1, rotated about a z-axis; FIG. 5 illustrates a bottom perspective view of the MOM capacitor of FIG. 1; FIG. 6 illustrates an elevated side view of an example two-by-two (2×2) MOM capacitor including a plurality of stacked layers and an atypical layer; FIG. 7 illustrates a partial top view of one of the stacked layers of the 2×2 MOM capacitor of FIG. 6, omitting additional fingers of the stacked layer for clarity; FIG. 8 illustrates a top view of the atypical layer of FIG. 6; and FIG. 9 illustrates an elevated side view of the example 2×2 MOM capacitor of FIG. 6 with an additional, second atypical layer. Unless otherwise indicated, the figures provided herein are meant to illustrate features of examples of this disclosure. These features are believed to be applicable in a wide variety of systems comprising one or more examples of this disclosure. As such, the figures are not meant to include all conventional features known by those of ordinary skill in the art to be required for the practice of the examples disclosed herein. DETAILED DESCRIPTION In the following detailed description, reference is made to the accompanying drawings, which form a part hereof and in which are shown, by way of illustration, specific examples in which the present disclosure may be practiced. These examples are described in sufficient detail to enable a person of ordinary skill in the art to practice the present disclosure. However, other examples may be utilized, and structural, material, and process changes may be made without departing from the scope of the disclosure. The illustrations presented herein are not meant to be actual views of any particular method, system, device, or structure, but are merely idealized representations that are employed to describe the examples of the present disclosure. While the drawings do not necessarily provide exact dimensions or tolerances for the illustrated components or structures, the drawings are to scale as examples of certain embodiments with respect to the relationships between the components of the structures illustrated in the drawings. Similar structures or compone