US-20260129983-A1 - IMAGING DEVICE

US20260129983A1US 20260129983 A1US20260129983 A1US 20260129983A1US-20260129983-A1

Abstract

An imaging device of an embodiment of the present disclosure includes a light separator, a first pixel, a second pixel, and a light shielding unit. The light separator separates first wavelength light included in a first wavelength region and second wavelength light included in a second wavelength region from incident light, and includes a structure whose size is equal to or less than a wavelength of incident light. The first pixel includes a first photoelectric converter that selectively receives the first wavelength light and performs photoelectric conversion on the first wavelength light. The second pixel is adjacent to the first pixel and includes a second photoelectric converter that selectively receives the second wavelength light and performs photoelectric conversion on the second wavelength light. The light shielding unit is provided at a boundary between the first pixel and the second pixel and blocks incident light.

Inventors

Masaya MOTOKUBOTA
Atsushi Toda
Susumu Ooki
Kazuhiro GOI

Assignees

SONY SEMICONDUCTOR SOLUTIONS CORPORATION

Dates

Publication Date: 20260507
Application Date: 20251219
Priority Date: 20210806

Claims (11)

1 . A light detecting device, comprising: a pixel section that includes: a first photoelectric conversion region; a second photoelectric conversion region; a first deflector above the first photoelectric conversion region; and a second deflector above the second photoelectric conversion region, wherein the first deflector is at a first image height in the pixel section and the second deflector is at a second image height higher than the first image height in the pixel section, the first deflector includes a first surrounding media, and a first plurality of structures in the first surrounding media, a density of the first plurality of structures in the first surrounding media gradually decrease as an image height within the first deflector increases, each of the first plurality of structures has a refractive index larger than a refractive index of the first surrounding media, the second deflector includes a second surrounding media, and a second plurality of structures in the second surrounding media, a density of the second plurality of structures in the second surrounding media gradually decrease as an image height within the second deflector increases, and each of the second plurality of structures has a refractive index larger than a refractive index of the second surrounding media.
2 . The light detecting device according to claim 1 , wherein the first deflector has a first refractive index at a position farthest from a center of the pixel section, and the second deflector has a second refractive index larger than the first refractive index at a position closest to the center of the pixel section.
3 . The light detecting device according to claim 1 , wherein a refractive index of the first deflector is configured to gradually decrease as the image height within the first deflector increases, and a refractive index of the second deflector is configured to gradually decrease as the image height within the second deflector increases.
4 . The light detecting device according to claim 1 , wherein a difference between a maximum refractive index of the first deflector and a minimum refractive index of the first deflector is smaller than a difference between a maximum refractive index of the second deflector and a minimum refractive index of the second deflector.
5 . The light detecting device according to claim 1 , further comprising: a third photoelectric conversion region; and a fourth photoelectric conversion region, wherein the first deflector is above the third photoelectric conversion region, and the second deflector is above the fourth photoelectric conversion region.
6 . The light detecting device according to claim 5 , wherein each of the first photoelectric conversion region and the third photoelectric conversion region is configured to receive light of a first color, each of the second photoelectric conversion region and the fourth photoelectric conversion region is configured to receive light of a second color different than the first color.
7 . The light detecting device according to claim 5 , further comprising: a first color filter above the first photoelectric conversion region and the third photoelectric conversion region, wherein the first color filter is configured to pass through light of a first color; and a second color filter above the second photoelectric conversion region and the fourth photoelectric conversion region, wherein the second color filter is configured to pass through light of a second color different than the first color.
8 . The light detecting device according to claim 1 , further comprising: a first light separator between the first deflector and the first photoelectric conversion region; and a second light separator between the second deflector and the second photoelectric conversion region, wherein the first light separator is configured to: guide light of a first color to the first photoelectric conversion region; and guide light of a second color, different from the first color, to a fifth photoelectric conversion region adjacent to the first photoelectric conversion region, and the second light separator is configured to: guide light of a third color to the second photoelectric conversion region; and guide light of a fourth color, different from the third color, to a sixth photoelectric conversion region adjacent to the second photoelectric conversion region.
9 . The light detecting device according to claim 7 , further comprising a multi-layer wiring layer, wherein the first photoelectric conversion region and the third photoelectric conversion region are between the multi-layer wiring layer and the first color filter, and the second photoelectric conversion region and the fourth photoelectric conversion region are between the multi-layer wiring layer and the second color filter.
10 . The light detecting device according to claim 1 , wherein a size of each of the first plurality of structures is equal to or less than one-tenth of a wavelength of incident light.
11 . The light detecting device according to claim 8 , wherein at least one of the first light separator or the second light separator includes a structure that has a size equal to or less than a wavelength of incident light.

Description

CROSS REFERENCE TO RELATED APPLICATIONS This application is a continuation application of U.S. Patent Application No. 18/580,221 filed on January 18, 2024, which is a U.S. National Phase of International Patent Application No. PCT/JP2022/027991 filed on July 19, 2022, which claims priority benefit of Japanese Patent Application No. JP2021-129695 filed in the Japan Patent Office on August 6, 2021.Each of the above-referenced applications is hereby incorporated herein by reference in its entirety. TECHNICAL FIELD The present disclosure relates to an imaging device. BACKGROUND ART There has been proposed an imaging device that obtains a signal corresponding to a color component by means of a spectral separation device including multiple columnar structures (PTL 1). CITATION LIST PATENT LITERATURE PTL 1: Japanese Unexamined Patent Application Publication No. 2020-123964 SUMMARY OF INVENTION An imaging device is expected to improve its characteristics for light that enters obliquely. It is desirable to provide an imaging device that makes it possible to improve the characteristics for obliquely incident light. An imaging device as an embodiment of the present disclosure includes a light separator, a first pixel, a second pixel, and a light shielding unit.The light separator separates first wavelength light included in a first wavelength region and second wavelength light included in a second wavelength region from incident light.The light separator includes a structure whose size is equal to or less than a wavelength of incident light.The first pixel includes a first photoelectric converter that selectively receives the first wavelength light and performs photoelectric conversion on the first wavelength light.The second pixel is adjacent to the first pixel and includes a second photoelectric converter that selectively receives the second wavelength light and performs photoelectric conversion on the second wavelength light.The light shielding unit blocks incident light.The light shielding unit is provided at a boundary between the first pixel and the second pixel. BRIEF DESCRIPTION OF DRAWINGS [FIG. 1] FIG. 1 is a block diagram illustrating an example of an overall configuration of an imaging device according to a first embodiment of the present disclosure. [FIG. 2] FIG. 2 is a diagram illustrating an example of a planar configuration of the imaging device according to the first embodiment of the present disclosure. [FIG. 3] FIG. 3 is a diagram illustrating an example of a cross-sectional configuration of the imaging device according to the first embodiment of the present disclosure. [FIG. 4] FIG. 4 is a diagram illustrating an example of the planar configuration of part of the imaging device according to the first embodiment of the present disclosure. [FIG. 5A] FIG. 5A is a diagram illustrating an example of the cross-sectional configuration of the imaging device according to the first embodiment of the present disclosure in a position of a different image height. [FIG. 5B] FIG. 5B is a diagram illustrating an example of the cross-sectional configuration of the imaging device according to the first embodiment of the present disclosure in a position of a different image height. [FIG. 6A] FIG. 6A is a diagram illustrating an example of a cross-sectional configuration of an imaging device according to Modification Example 1 of the present disclosure. [FIG. 6B] FIG. 6B is a diagram illustrating an example of the cross-sectional configuration of the imaging device according to Modification Example 1 of the present disclosure. [FIG. 7] FIG. 7 is a diagram illustrating an example of a cross-sectional configuration of an imaging device according to Modification Example 2 of the present disclosure. [FIG. 8] FIG. 8 is a diagram illustrating an example of a planar configuration of an imaging device according to Modification Example 3 of the present disclosure. [FIG. 9] FIG. 9 is a diagram illustrating an example of a cross-sectional configuration of the imaging device according to Modification Example 3 of the present disclosure. [FIG. 10A] FIG. 10A is a diagram illustrating an example of a cross-sectional configuration of an imaging device according to a second embodiment of the present disclosure in a position of a different image height. [FIG. 10B] FIG. 10B is a diagram illustrating an example of the cross-sectional configuration of the imaging device according to the second embodiment of the present disclosure in a position of a different image height. [FIG. 10C] FIG. 10C is a diagram illustrating an example of the cross-sectional configuration of the imaging device according to the second embodiment of the present disclosure in a position of a different image height. [FIG. 11A] FIG. 11A is a diagram illustrating an example of a cross-sectional configuration of an imaging device according to Modification Example 4 of the present disclosure. [FIG. 11B] FIG. 11B is a diagram illustrating an example of the cross-sectional