US-20260130105-A1 - Film Manufacturing Method, Laminated Structure, and Bolometer

Abstract

A film manufacturing method includes forming a first self-organized film on a substrate, drying the formed first self-organized film, immersing the dried first self-organized film in a dissolving solution in which a silane coupling agent is dissolved to form a second self-organized film, drying the formed second self-organized film, and laminating a nanocarbon layer on the dried second self-organized film.

Inventors

• Noriyuki TONOUCHI

Assignees

• NEC CORPORATION

Dates

Publication Date

20260507

Application Date

20241107

Priority Date

20231129

Claims (11)

1. 1 . A film manufacturing method comprising: forming a first self-organized film on a substrate; drying the formed first self-organized film; immersing the dried first self-organized film in a dissolving solution in which a silane coupling agent is dissolved to form a second self-organized film; drying the formed second self-organized film; and laminating a nanocarbon layer on the dried second self-organized film.
2. 2 . The film manufacturing method according to claim 1 , further comprising: cleaning the dried first self-organized film before the immersing.
3. 3 . The film manufacturing method according to claim 1 , wherein the silane coupling agent includes an amino group.
4. 4 . The film manufacturing method according to claim 1 , wherein the silane coupling agent is 3-aminopropyltriethoxysilane.
5. 5 . The film manufacturing method according to claim 1 , wherein a concentration of the silane coupling agent in the dissolving solution is 0.025% to 5% by mass.
6. 6 . The film manufacturing method according to claim 1 , wherein the nanocarbon layer includes carbon nanotubes.
7. 7 . The film manufacturing method according to claim 1 , wherein the nanocarbon layer is laminated on the dried second self-organized film using a surfactant.
8. 8 . A laminated structure including, in order, a substrate, a self-organized film, and a nanocarbon layer having an alignment parameter, wherein the alignment parameter has an alignment component and a random component, a function of the alignment component is expressed by a formula: S 2 ⁢ D a ⁢ l ⁢ i ⁢ g ⁢ n ( d ) = S full + ( 1 - S full ) ⁢ e - d 2 ⁢ λ c , wherein λ c is a damping constant related to the degree of local alignment, d is a size of one side of a square observation area of the nanocarbon layer, and S full is a constant value, and the damping constant is 300 nm or more.
9. 9 . The laminated structure according to claim 8 , wherein the alignment component asymptotically is configured to approach the constant value as the observation area becomes larger.
10. 10 . The laminated structure according to claim 8 , wherein the nanocarbon layer contains carbon nanotubes.
11. 11 . A bolometer comprising: the laminated structure according to claim 8 ; and an electrode electrically connected to the nanocarbon layer.

Description

CROSS-REFERENCE TO RELATED APPLICATION Priority is claimed on Japanese Patent Application No. 2023-201758, filed Nov. 29, 2023, the content of which is incorporated herein by reference. BACKGROUND ART This disclosure relates to a film manufacturing method, a laminated structure, and a bolometer. It is known that carbon nanotubes are used in electrical elements. For example, PCT International Publication No. WO/2006/103872 (hereinafter referred to as Patent Document 1) discloses a carbon nanotube field effect transistor (FET) that uses carbon nanotubes. SUMMARY The carbon nanotube FET disclosed in Patent Document 1 is configured such that a substrate surface is treated with aminosilane to fix the carbon nanotubes, and amino groups are introduced onto the substrate surface. Carbon nanotube films formed using amino groups tend to have localized alignment, making it difficult to control the degree of alignment of the carbon nanotubes. An example object of this disclosure is to provide a film manufacturing method, a laminated structure, and a borometer for solving the above-mentioned problems. A film manufacturing method of the present disclosure includes forming a first self-organized film on a substrate, drying the formed first self-organized film, immersing the dried first self-organized film in a dissolving solution in which a silane coupling agent is dissolved to form a second self-organized film, drying the formed second self-organized film, and laminating a nanocarbon layer on the dried second self-organized film. A laminated structure of the present disclosure includes, in order, a substrate, a self-organized film, and a nanocarbon layer having an alignment parameter, in which the alignment parameter has an alignment component and a random component, a function of the alignment component is expressed by a formula: S2⁢Da⁢l⁢i⁢g⁢n(d)=Sfull+(1-Sfull)⁢e-d2⁢λc,wherein λc is a damping constant related to the degree of local alignment, d is a size of one side of a square observation area of the nanocarbon layer, and Sfull is a constant value, and the damping constant is 300 nm or more. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view I showing an example of a configuration of a laminated structure in this disclosure. FIG. 2 is a diagram for deriving a damping constant of the laminated structure in this disclosure. FIG. 3 is a flowchart for deriving a damping constant of the laminated structure in this disclosure. FIG. 4 shows image processing I for deriving a damping constant of the laminated structure in this disclosure. FIG. 5 shows image processing II for deriving a damping constant of the laminated structure in this disclosure. FIG. 6 shows image processing III for deriving a damping constant of the laminated structure in this disclosure. FIG. 7 shows image processing IV for deriving a damping constant of the laminated structure in this disclosure. FIG. 8 shows image processing V for deriving a damping constant of the laminated structure in this disclosure. FIG. 9 shows image processing VI for deriving a damping constant of the laminated structure in this disclosure. FIG. 10 is a flowchart I showing an example of processing of a film manufacturing method in this disclosure. FIG. 11 is a diagram showing an example of a manufacturing procedure of the film manufacturing method in this disclosure. FIG. 12 is a cross-sectional view showing an example of a configuration of a borometer in this disclosure. FIG. 13 is a cross-sectional view II showing an example of a configuration of a laminated structure in this disclosure. FIG. 14 is a flowchart II showing an example of processing of the film manufacturing method in this disclosure. FIG. 15 is a plan view of an element in an example. FIG. 16 is a diagram showing evaluation results of a laminated structure of an element I in the example. FIG. 17 is a SEM image showing a part of a planar image of the laminated structure of the element I in the example. FIG. 18 is a diagram showing evaluation results of a laminated structure of an element II in the example. FIG. 19 is a SEM image showing a part of a planar image of the laminated structure of the element II in the example. FIG. 20 is a diagram showing evaluation results of a laminated structure of an element III in the example. FIG. 21 is a SEM image showing a part of a planar image of the laminated structure of the element III in the example. FIG. 22 is a diagram showing evaluation results of a laminated structure of an element IV in the example. FIG. 23 is a SEM image showing a part of a planar image of a laminated structure of an element V in the example. FIG. 24 is a diagram showing a relationship between the concentration of each dissolving solution 2β and a damping constant λc in a laminated structure of an element in the example. FIG. 25 is a table showing a resistance value of a nanocarbon layer with respect to the concentration of each dissolving solution 2β in the laminated structure of the